ZVB40_E_

Replacement parts added. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2014 SMC Corporation All Rights Reserved -17-

PAB-OM-B006-B

Operation Manual Process P ump P A 3 0 0 0 S eriesURL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved PAB-OM-B006-B C aution During operation C heck liquid

PAB-OM-C006-B

C ircuit(1 ) C ircuit(2 ) URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved C aution During operation C heck liquid and air leakage, and operation conditions

PAB-OM-B007-B

C ircuit(1 ) C ircuit(2 ) URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved Pilot valve set K T PA 5 3 8 NBR diaphragm set K T PA 5 3 2 PT F E diaphragm

PAB-OM-C007-B

C ircuit(1 ) C ircuit(2 ) URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved C aution During operation C heck liquid and air leakage, and operation conditions

Process Pump

Circuit example (1) Circuit example (2) Process Pump 3 port solenoid valve Regulator Process Pump Air filter Air FLUID Bypass Throttle SUP OUT Air supply FLUID Air IN EXH Strainer Silencer Transfer fluid 15 Dimensions 16 Revision 19-Feb-2021 Initial release 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com NOTE: Specifications

Process Pump

Circuit example (1) Recommended Valve Circuit example (2) VQZ240 (Exhaust center) 16 Dimensions 17 Revision 19-Feb-2021 Initial release 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation

Process Pump

Process Pump Air filter Air FLUID Bypass Throttle SUP OUT Air supply FLUID Air IN EXH Strainer Silencer Circuit example (3) Transfer fluid PA(P)3310 Air operated reset port 3 port solenoid valve for remote reset Air supply 15 Dimensions Integrated fitting type With nut Tube extension 16 Revision 24-Sep-2019 Revision F Completely revised by format change. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Process Pump

Circuit example 5 port solenoid valve (Exhaust center) Process Regulator Pump Throttle FLUID Air filter P1 OUT Air supply P2 FLUID IN Strainer Transfer fluid 16 Dimensions Integrated fitting type With nut Tube extension 17 24-Sep-2019 Revision F Completely revised by format change. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

Process Pump

Circuit example (1) Circuit example (2) 16 Dimensions 17 Revision 9-Feb-1998 Initial release 23-Dec-2019 Revision A Completely revised by format change. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Process Pump

Outer dimensions PB1011A-01PB1013A-0119 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

PAB-OM-O003

Outer dimensions 18 2 5/5 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013 SMC Corporation All Rights Reserved 19

Process Pump

Change the part number of amp for the sensor. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved 15

Process Pump

Delete Sensor mounting (stroke sensor). 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved 14

Valve Controller

Stop signal Fig. 22 Sequence Revision history B:complete revision C:Change dip switch operation D:complete revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Valve Controller

Stop signal Fig. 22 Sequence Revision A:complete revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

IBV-OMY0015

Pressurizing the air blow discharge port may result in the breakage of the product. 10 Revision history A: Specification and Notes added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation

High Speed 2 Port Valve

Downstream side flow of the valve is restricted. 9 SX10-OMR0002-A Revision ARENEWAL 2018.8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved No.SX10-OMR0002-A

Low Profile 2/3-Port Solenoid Valve

. -11- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

VN-OMP0002

O O O 12 13 14 8 VN-OMP0002 Revision history 1st printing : Py 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved VN-OMP0002