3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Cylinder ports (1) N1 N3 N7 N9 N11 M5 01 02 Symbol NM External pilot port 3/8 1/8 5/32 1/4 5/16 Mix Applicable tube O.D.(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

Vacuum

Vacuum Switch Non-Analog Output Flexibility Hystetesis, Window ComparatoL and Reverse modes -760 +75mmHg C101kPa +1okPa) P2 P1 Hysleresis mode {slandad) n2 n1 Hysieresis mode (revrsed) ON 45mA max. (LED, LCD backlighl) OFF Indicalion: Red LED flashes/Error cod6 displayed P1 P2 Window comparator mode (standard) 0d, EEs dren!

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mode 1 isolaled crmnm A$lnlfics 4ir/4out31 sb, mode 1 Noie 1) Indicare thesze nthe specilication sheel in lhe case of Cl4 and Llv4 Nore 2) q,mbols tor inch s zes are 1to t2(24) N1:o1l8' N3:sY32' N7 6114' NM:l\,4ixed Thelop poded elbow is LN! and the bottom Porled e bow is BN !

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.-5-l Input block (Fill out for UO unit only) Wnhod Sl unib/inpui block (SDo) Note 1) Ind cate the size in lhe specifcaton sheel n tlre case olCN4 and Lfll Note 2J Symbols lor nch s zes are 1 ta 12l24J N1 0118' N3:o5l32' Seial kit for Remole l/O Nole 1) P Kl Order the .le assem.y separarey Lr lhe rype 20P Nole2)Nuhbers.srde( I ldcalelhehaf,un.urberorsorenods'crmEdF

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Vacuum

Vacuum Switch Non-Analog Output Flexibility Hystetesis, Window ComparatoL and Reverse modes -760 +75mmHg C101kPa +1okPa) P2 P1 Hysleresis mode {slandad) n2 n1 Hysieresis mode (revrsed) ON 45mA max. (LED, LCD backlighl) OFF Indicalion: Red LED flashes/Error cod6 displayed P1 P2 Window comparator mode (standard) 0d, EEs dren!

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Inch) 1/8" 5/32" 1/4" N1 N3 N7 Symbol VQ0 Plug Connector Assembly Model VQ4 Others, option symbols: to be indicated alphabetically. Connector assembly will be required when the F, P, T, S kits add a valve. Specify the valve and connector assembly. VQ5 2.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

seal material and leakage XM XY Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Symbol Nil A Note 2) Leakage Pam3/s or less Note 1) Changed part None w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Option ZS-39-5G ZS-39-B ZS-39-D ZS-39-R ZS-39-01 ZS-39-N1 ZS-39-N2 Lead wire with connector (with connector cover) (5 cores, 2 m) Panel mount adapter Panel mount adapter + Front protective cover DIN rail adapter Front protective cover R1/8 piping adapter NPT1/8 piping adapter Made to Order 1

MWB

B Basic L Axial foot F Rod ange G Head ange C Single clevis D Double clevis T Center trunnion Rod end bracket Port thread type Nil No bracket V Single knuckle joint W Double knuckle joint Sufx (Cushion) Nil Rc TN NPT TF G Nil Air cushion N1 Rubber bumper A knuckle joint pin is not provided with the single knuckle joint. Rod end bracket is shipped together with the product.

Series 10-SV ® EX500 Decentralized Serial Wiring

Note 1) Note 2) A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Finger option 1: Side tapped mounting 2: Through-holes in open/close direction Nil: Basic Standard type Narrow type Auto switch Nil Without auto switch (Built-in magnet) 3: Flat finger N: Basic N2: Through-holes in open/close direction N1: Side tapped mounting Auto Switch Specifications (Refer to the WEB catalog for further information on auto switches.)

LMU100/200 Series Mist Spray Unit

ALF ALT Model LMU100 LMU200 Inlet air pressure Oil tank set pressure range Oil Dynamic viscosity of oil (40C) 0.1 to 1.0 MPa 0.05 to 0.2 MPa Turbine oil, Non-water soluble cutting oil (JIS, N1 type) 2 to 200 mm2/s Total capacity: 3000 Effective capacity: 2500 5 to 50C 100 VAC 50/60Hz, 200 VAC 50/60Hz, 24 VDC ALD ALB Oil tank capacity (cm3) Ambient and fluid temperature Solenoid valve voltage

S

Without DIN rail (With bracket) SI unit output polarity With DIN rail Designated length (l: Station) Symbol Specifications Cylinder port size Special wiring specifications (Except double wiring) External pilot Nil N Positive common Symbol Port size R Note 3) Negative common C2 C3 C4 N1 N3 With 2 one-touch fitting With 3.2 one-touch fitting With 4 one-touch fitting With 1/8" one-touch fitting

Body Ported Single Unit S0700 Series Plug Lead Type

Plug Lead Type Body Ported Single Unit S0700 Series RoHS How to Order Valves S07 1 C4 6 5 G S Type of actuation P, E port/A, B port size Symbol Specications 1 2-position single 2 2-position double 3 3-position closed center Symbol Port size C2 2 One-touch tting C4 4 One-touch tting N1 1/8" One-touch tting N3 5/32" One-touch tting A 4-position dual 3-port (N.C. + N.C.)

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

-M9NL Du Seal material and its changed part XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM)

Series ZB Compact Vacuum Unit

kPa Option Note 12) Lead Wire with Connector for Vacuum Pressure Switch Without option Nil G Nil Without lead wire with connector (No need to specify for pressure sensor type. ) Lead wire with connector and connector cover, Lead wire length 78.7 inch (2 m) With bracket for single unit (Enclosed with the product for shipment without being assembled) B Vacuum (V) Port Note 11) Bracket C2 C4 N1