Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint MQR MQR MQR MQR Series Series Series Series

Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

KFx-OM00002

However, there does not exist stainless steel with absolute corrosion resistance; therefore, many types of stainless steel have been developed for improved corrosion resistance performance. 9 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior

KFx-OMY0077

However, there does not exist stainless steel with absolute corrosion resistance; therefore, many types of stainless steel have been developed for improved corrosion resistance performance. 9 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior

KFx-OMY0034

However, there does not exist stainless steel with absolute corrosion resistance; therefore, many types of stainless steel have been developed for improved corrosion resistance performance. 12 - Revision history A: Cleaning added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change

SPEED CONTROLLER STANDARD TYPE ELBOW TYPE (METAL BODY)

Specifications 5.Troubleshooting 7 - 6 Construction AS1400-M3 8 - S Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

DOC1023894

Part name Material Qty Remarks 1 Stud Brass 2 2 Body PBT 1 Red 3 O-Ring NBR 2 4 Valve HNBR 1 5 Valve guide Brass 1 6 Rod Brass 1 7 Push Button POM 1 Red 8 Spring Stainless steel304-WPB 1 9 Push nut Stainless steel304 1 12 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject

ISE70_75.eng

Normally closed URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

ZISE3.eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

ISA2.eng

Green 1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 6 9 5. Apply a thickness gauge again and check that the Green turns on.

PSE5xx.eng

Sumitomo 3M OMRON Series Tyco Electronics SMC corporation PSE53# 3-1473562-4 Connector for sensor lead wire Lever PSE54# 37104-3101-000FL ZS-28-C 1-1473562-4 PSE550 XN2A-1430 For low differential pressure For low pressure For positive pressure For compound pressure For vacuum URL https://www.smcworld.com Pressure range PSE56# 1473562-4 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo

VP4_50-OMU0001

mm c)612mm 912mm VP4350() P 3 ( P AorB ) )VP4350 () VP4450() A B EA EB () ()0() DIN 1 1) 1)() 2) 2)2a 2b 3)3a 3)2a 2b 4) 2. 0.5Nm20% 1) 90 2) No.12 (+/-) 3)3e 3f(Y ) DIN DIN , +COM-COM 3f 0.5Nm15% 1 A 2 B 3 COM 8 VP4_50-OMU0001 (EA,EB ) () (PE) 9 VP4_50-OMU0001 Ass'y 1 (ISO VG-32) Ass'y Ass'y Ass'y 1. 2. 3. 4. 5. 6. 10 VP4_50-OMU0001 Revision history :Vo 4-14

VFR2000-OMM0001

-15No.VFR2000-OMM0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation All Rights Reserved No.VFR2000-OMM0001

VFR3000-OMJ0001

VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 4 4 4 4 01F D 01C COM A B 1)8 2) +COM -COM 3) D U D 1 COM A B 1)8 2) +COM -COM 3)D U D 1 11 VFR3000-OMJ0001-A () X () [3(EB) 4(EA)] ( (PE) 12 VFR3000-OMJ0001-A No. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR3000-OMJ0001-A Revision history A Renewal Qo 1st printing:JX 4-14

VFR5000-OMN0001

P2=0.5MPa S AEB 77 1) 0.9MPa 2) 3) .50 4) 2 5) P A B ARBF5000 ARBF5000 P A B 10 VFR5000-OMN0001 VFR5000 Series/ 01F D COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14

VFR6000-OMQ0001

AC ( )() DC24V 16Nm 9 VFR6000-OMQ0001 VFR6000 Series/ / / / ) DIN DIN DIN DIN / / / / DIN 90 10 VFR6000-OMQ0001 () X () [3(EB)4(EA) ] () (PE) 11 VFR6000-OMQ0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 12 VFR6000-OMQ0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

VG300-OMI0003

Ass'y 1(ISO VG 32) [3(R),PE] N.O.1(P) Ass'y Ass'y (P,A,X) X(0.2~0.9MPa) X() 1) 2) 3) 4) 5) 6) 7) -10No.VG300**-OMI0001-A Revision history A Renewal QR 1st printing:iy 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on

VT307N-OMV0001

NO 8 No.VT307N-OMV0001 [3R] *N.O.[1P] 9 No.VT307N-OMV0001 No. 1ISO VG 32 [3R] *N.O.[1P] 1. 2. 3. 4. 5. 6. 7. 10 No.VT307N-OMV0001 VS 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

VT317-OMH0003

M4 180 4 O 9 VT317**-OMH0003-A , , [3R] *N.O.[1P] , () 10 VT317**-OMH0003-A No. 1 ISO VG 32 [3R] *N.O.[1P] 1. 2. 3. 4. 5. 6. 7. 11 VT317**-OMH0003-A A VW : LW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

VT315-OMH0005

N.O. 1 290 390 8 VT315**-OMH0005-A () AC 9 VT315**-OMH0005-A No. 1ISO VG 32 R 1. 2. 3. 4. 5. 6. 7. 10 VT315**-OMH0005-A A To : HV 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

VT301-OMP0001

N.C. 1 2 3 N.C. 6 VT301-OMP0001 , No. 1ISO VG 32 (R) 1. 2. 3. 4. 5. 6. 7 VT301-OMP0001 S Revision history 1st printing :PU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation