High Vacuum L Type Valve Disassembly procedure Step 1 Step 2 Bolt b 3 1 2 O-ring 4 Handle assembly Bottom surface of groove to discharge gas Bolt a Body Cover Heater The heater is removed by loosening Bolt a. Bolt a is behind the Cover. Remove the Cover using a watchmaker's screwdriver. Loosen the Bolt b gradually with the valve opened a little in numerical order.
nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) Working principle Port 1(P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0016 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered. Also, even within the warranty period, the wear of a product due to the use of the vacuum pad or failure due to the deterioration of rubber material are not covered by the limited warranty.
As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (
Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Connector Type: S (M12 Connector Type), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)
Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)]
Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C4L (ø4 One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m)
Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C4 (ø4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)
Cooling Capacity: 150, Thread Type: Rc, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: A (w/Caster Adjuster-foot)
Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: A (w/Caster Adjuster-foot)
Cooling Capacity: 150 (15.7 kW), Thread: Rc, Option: A (w/Caster Adjuster-foot)
Cooling Capacity: 200 (20.5 kW), Thread: Rc, Option: A (w/Caster Adjuster-foot)
Cooling Capacity: 300 (28 kW), Thread: Rc, Option: A (w/Caster Adjuster-foot)
Cooling Capacity: 100 (10.5 kW), Thread: Rc, Option: A (w/Caster Adjuster-foot)
Cooling Capacity: 100 (10.5kW), Thread: Rc, Option: A (w/Caster Adjuster-foot)
Cooling Capacity: 200 (20.5kW), Thread: Rc, Option: A (w/Caster Adjuster-foot)