25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1?s, Rise time 1ns660 g1/2, 3/4

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns200 g1/8, 1/4

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

50, 63, 80, 100 *, Strokes from 10mm through 200mm depending upon bore size, Variety of switches and a variety of lead wire lengths, CYLINDER, ACTUATOR, MGQ GUIDED CYLINDER, MB, 40MM MGQ BALL BEARING, 5.07063 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2

10 to 60C (With no condensation and no freezing)Operating/Stored: 35 to 85%RH (With no condensation)10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (De-energized)980 m/s2 in X, Y, Z directions, 3 times each (De-energized)?3% F.S. or less1000 VAC for 1 min.

10 to 60C (With no condensation and no freezing)Operating/Stored: 35 to 85%RH (With no condensation)10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (De-energized)980 m/s2 in X, Y, Z directions, 3 times each (De-energized)?3% F.S. or less1000 VAC for 1 min.

10 to 60C (With no condensation and no freezing)Operating/Stored: 35 to 85%RH (With no condensation)10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (De-energized)980 m/s2 in X, Y, Z directions, 3 times each (De-energized)?3% F.S. or less1000 VAC for 1 min.

10 to 60C (With no condensation and no freezing)Operating/Stored: 35 to 85%RH (With no condensation)10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (De-energized)980 m/s2 in X, Y, Z directions, 3 times each (De-energized)?3% F.S. or less1000 VAC for 1 min.

10 to 60C (With no condensation and no freezing)Operating/Stored: 35 to 85%RH (With no condensation)10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (De-energized)980 m/s2 in X, Y, Z directions, 3 times each (De-energized)?3% F.S. or less1000 VAC for 1 min.