OMU0023

(a) Alphanumeric characters (capital / small letters) (b) Special characters (BS, space, TAB, comma, full stop, hyphen) (c) Line-break code (CR + LF) (3) ID When communication is established between the Card Motor controller and upper level device such as a PLC, a request will be received and a response will be sent only when the pre-set Card Motor controller ID matches with the controller

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

15

BS Bumper bolt (resin tipped): Plate B side or C side Shock absorber Applicable Auto Switches/Refer to pages 1575 to 1701 for further information on auto switches.

Hydraulic

mm) 32 40 50 63 80 100 40 50 63 80 100 550 862 1347 2126 3434 5388 1002 1569 2500 4035 6260 18 22.4 28 35.5 45 56 18 22.4 28 35.5 45 16 16 17 16 20 23 Effective cushion stroke B-series rod C-series rod Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection Same as double acting/single rod: Refer to page 74.

Swivels

Specifications Body Size (in.) 1/4 3/8 1/2 3/4 1 1-1/4 1-1/2 2 Maximum Rated Pressure (PSI) 5000 5000 5000 5000 4000 4000 4000 3000 Except the following port options in the noted size 03 (Male JIC 37) 3000 2000 05 (Male SAE O-Ring Boss) 2500 06 (Female JIC 37) 90 Housing Port 4000 3000 3000 2500 2000 06 (Female JIC 37) In-Line Housing Port 3000 2000 07 (Female NPSM) 4600 3000 2600 2100 1650

e

Max. thrust = Max. payload x Max. acceleration 120 100 Max. thrust (%) 80 60 40 20 0 500 1000 1500 2000 2500 Stroke (mm) 1143 Series E-MY2 e-Rodless Actuators Precautions 1 Be sure to read before handling. Mounting Design and Selection Warning Caution 3. Keep tightening torque. If tightened beyond the specified range, damage may occur.

Digital Flow Switch ( compatible)

) Pr = a (PD) + b = 0.25 2500 + 0 = 625 [L/min] (2) Conversion from the flow measurement value to the process data (For PF2MC7 series, unit L/min, flow range 1000 L and Pr = 800 [L/min]) (PD) = (Pr b) / a = [800 0] / 0.25 = 3200 -79No.PF-OMZ0002-A IO-Link parameter setting IODD file IODD (I/O Device Description) is a definition file which provides all properties and parameters required

Digital Flow Switch ( compatible)

) Pr = a (PD) + b = 0.25 2500 + 0 = 625 [L/min] (2) Conversion from the flow measurement value to the process data (For PFMC7 series, unit L/min, flow range 1000 L and Pr = 800 [L/min]) (PD) = (Pr b) / a = [800 0] / 0.25 = 3200 -75No.PF-OMY0002 IO-Link parameter setting IODD file IODD (I/O Device Description) is a definition file which provides all properties and parameters required for

HRX-OM-R039

Fig. 8.4-4 Cooling capacity(HRSE018-A-20/23) 8.4.5 HRSE024-A-20/23-(T) Ambient 3000 3000 Ambient Temperature Temperature 2500 2500 25 35 40 25 35 40 Cooling capacity[W] Cooling capacity[W] 2000 2000 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[] 50Hz 60Hz The cooling capacity will be reduced by 100W when option:

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

Mechanically Jointed Rodless Cylinders

2000 2500 3000 l l Support spacing l1 (mm) Support spacing l1 (mm) Caution Note) A side support must be used to keep the spacing from exceeding the value inside the parentheses.

Series KV2 Fittings

944-0555 Fax: (519) 944-1870 Austin Tel: (512) 926-2646 Fax: (512) 926-7055 Dallas Tel: (972) 446-1140 Fax: (972) 446-1251 Los Angeles Tel: (714) 669-1701 Fax: (714) 669-1715 Phoenix Tel: (480) 967-2570 Fax: (480) 829-0824 Portland Tel: (503) 644-1696 Fax: (503) 644-4041 San Jose Tel: (408) 943-9600 Fax: (408) 943-9111 Atlanta Tel: (770) 624-1940 Fax: (770) 624-1943 Boston Tel: (603) 610-2500

Series AK1000

Glossary of Terms Precautions SL AP Recommendations Regulators Dimensions inch (mm) AK9200 1.125 (28.6) Max. 6.4 (162.6) Max. 6.9 (175.3) (P & BP Option) 1.5 (38.1) 2.62 (66.5) 2.99 (75.9) Flow Characteristics AK9200 150 psig (1.0 MPa) Inlet pressure: 100 psig (0.69 MPa) 120 100 0.69 Delivery pressure (MPa) Delivery pressure (psig) 80 0.55 60 0.41 40 0.28 20 0.14 0.00 00 500 1000 1500 2000 2500

Low Friction Cylinders Series MQ

Piston Note 3) speed H (High speed/ High frequency type) 5 to 3000 mm/s (Refer to page 1191.) 250 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa 150 cm3/min or less Total allowable leakage 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.3 MPa 800 cm3/min or less 2500 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa 1500 cm3/min or less Note 1) Value when

Vacuum Ejector Series ZM

SP Nil 6 10 15 20 25 30 300 mm 600 mm ZCUK 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm AMJ AMV How to Order AEP ZM Nozzle diameter Body style Standard supply pressure HEP Related 0.35 MPa (Double diffuser) (Except nozzles diameter 05,, and 15,, type) 0.45 MPa (Single diffuser) (Nozzle diameter 13,, and 15,, only) 0.5 MPa (Double diffuser) (Except nozzles diameter 15,, type) Equipment

Compact Rotary Actuator

Then, piston A moves right , and the magnet goes into switch Bs operation range to turn on switch B. 7Cushions a) Rotary actuator is not adjusted so that the cushions work during shipment. Adjust the cushion valve attached to the cover depending on rotation time and load inertia moment.See Fig 15 b)Rotating the cushion valve reduces the orifice diameter and increases cushion effect.

Low-Speed Rotary Actuator

Then, piston A moves right, and the magnet goes into switch Bs operation range to turn on switch B. Mounting of auto switch When tightening the auto switch mounting screw, use a precision screwdriver with a handle of 5 to 6 mm in diameter. Table 8 shows the recommended tightening torque. Use the designated slotted set screw (M2.54L) to mount the auto switch. Table 8.

Modular Design with Uniform Body Style

10 12500 15000 17500 20 0 5000 7500 2500 10 12500 15000 17500 20 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 11 Air Combination AC20-D to AC60-D Series Pressure Characteristics (Representative values) Conditions: Inlet pressure of 0.7 MPa, Outlet pressure of 0.2 MPa, Flow rate 20 L/min (ANR) AC20-D AC30-D AC AF + AR + AL AW + AL AF + AR AF + AFM + AR AW + AFM Attachments AF AFM / AFD

CLQ

(Rail mounting style) Basic Weight: Mounting/Through-hole (Type B) (g) Bore size (mm) Standard stroke (mm) Bore size (mm) Mounting bracket part no. 10 15 20 25 30 35 40 45 50 75 5 184 260 100 Note 20 25 32 40 50 63 80 100 312 415 589 699 1128 1529 2771 4495 213 295 430 537 874 1242 2297 3860 255 346 498 606 983 1365 2500 4132 199 278 407 514 838 1202 2229 3770 227 312 453 560 910 1283

IDX-OM-W025

Air Pressure MPa 0.15 to1.0 Ambient Temperature oC 2 to 40 (Relative Humidity of 85% or less) Phase Single Three Single Three Power source (Note 4) Specification Voltage V AC200(50Hz) / AC200,220(60Hz) Electrical Operating urrent(Note 2) A 4.3 / 4.7 3.3 / 3.5 4.3 / 4.7 3.3 / 3.5 6.0 / 6.6 7.2 / 8.0 Power consumption(Note 2) W 810 / 940 850 / 1070 810 / 940 850 / 1070 1450 / 1890 2000 / 2500