EXxx-OML0010CN

( ) 9 ERROR LED 10 POWER LED EX600 SI (50) -8No.EX-OML0010CN-C H.T.

0.01

A 72 27 B 41.8 15.8 SFD100-02 23 Hole shape for bracket mounting 26.2 SMC 23 14.7 90 1.5 3 51 17 Use a countersunk head screw (M3) for bracket mounting. 72 27 3.5 SFD200-C SFD200-C Dimensions Model A 125 B SFD200C08 C10 C12 8 10 126 12 126 SMC 42 24 Bracket mounting dimensions 96.5 36 4 x 3.5 114.5 4 x 7 Applicable tubing O.D.

VZ1000

: 2 to 10 stations U side: 2 to 10 stations Nil Standard length (Specify a longer rail than the standard length.)

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Please note that the graph should only be used as a guide, as there is a tolerance of about 10% in the clamp cylinder body. D) In the state of C), adjust shim w so that the arm side block contacts the workpiece.

Sine Rodless Cylinder Series REA

Usable range 20 30 40 50 50 40 30 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Note: 1N = 0.2248lbf 1kg = 2.2046lb 1in = 25.4mm 1in = 2.54cm 100 80 REA63 REA50 50 40 30 REA40 REA32 20 Load weight W (kg) REA25 10 1 100

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

HEC-OM-S019

: No corrosive gas, solvent such as thinner and flammable gas Cooling capacity Approx. 22W (Set temperature 23 C and ambient temperature 23 C, flow rate 100L/min(AIR)) Power supply Single phase AC100V(+/10%), 50/60Hz Operation temp. range 0.0 to 50.0 C (No dew condensation) Constant temperature air inlet pressure Maximum working pressure: 0.1 MPa Withstand pressure: 0.15 MPa Item Spec.

Cylinder with Lock Series CNS

Number of auto switches C Single clevis type Cylinder 2 pcs. Nil D Double clevis type J Nylon tarpaulin S 1 pc. T Center trunnion type Rod boot K Heat resistant tarpaulin n "n" pcs.

Compressed Air Preparation Filter

[g/m3] [mg/m3] 0 As specified by the equipment user or supplier and more stringent than class 1 1 20 400 10 70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time.

0.4

Response time (ms) Model Power consumption Flow rate Max. operating frequency High speed response required for OFF only without use of special control circuit ON OFF SX1-C 10 W 50 L/min 550 Hz 0.9 0.4 Select the 10 W type. -G 10 W 100 L/min 300 Hz 1.1 0.55 -L 10 W 150 L/min 250 Hz 1.35 0.75 * Please consult with SMC for continuous energization.

Air Cylinder MGQ Series Compact Guide Cylinder

(betwen lead wire and case) 10-60'c IEC Slandad, wabniqht(JlS C@m)and oil rsistins slrucure x "L js added to lhe end when tne lead wire is 3m lonsAuto Switch Internal Circuit Auto Switch W Table D-273 49 52 49 7.5 8-5 9.5 xReter to back cols for details ol the speciication of t l 13 contact protction bo)C Compact Guide Cylinder:Series MGQ Auto Switch 2 wire system 24VDC relay, Sequence contoller

Slider Type/Ball Bushing Bearing

C Q + Stroke Shock absorber Shock absorber RB0805 Side plate Section IF (CY1L6) (mm) A B D d C EA FA EB Model G HP J JK FB GP H HB HG HI HO HS HT HA CY1L6 CY1L10 7.6 8 3 6.5 7 M4 x 0.7 6 26 6.5 36 27 10 11 9 25 14 16 5 12 10 4 8 8.5 M5 x 0.8 6 3 12 7.5 33 9.5 5 50 34 17.5 14.5 13.5 33 21.5 18 6 PA (N) (NA) (NB) RW Q Z W tb ta T PB MM NN M L QW LD Model CY1L6 CY1L10 TT PW 12 54 68 56 10

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Through-hole/CQ2YB, CDQ2YB Both ends tapped/CQ2YA, CDQ2YA CDQ2YA Both ends tapped (mm) Bore size (mm) O1 R O1 thread R R 32 M6 x 1.0 10 40 M6 x 1.0 10 50 M8 x 1.25 14 H thread effective depth C U 4-N through 8-O counter bore Q F 2-P (Port size) (Rc, NPT, G) I 22 D M E Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Auto switch

XLF Series

C C C D D D D Valve seal (maintenance part) 4 Body (material: A6063) C C C C E E E E E E E E (K flange ) F F F Fn n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196

EXxx-OMU0020EN

(between FE and all accessible terminals) Insulation resistance 10 M or more (500 VDC is given between FE and all accessible terminals) Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z Vibration

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Proper tightening torque (Nm) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) 6, 10 16 20, 25 32 1.08 10% 2.45 10% 5.10 10% 8.04 10% M3 M4 M5 M6 C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187) 172 (209) 194 (231) C(D)U20-D 176 (230) 193 (252) 210 (269) 227 (286) 244 (303) 261 (320) 295 (354) 329 (388) C(D)U25-D 262 (335) 286 (364) 310 (388) 334 (412) 358

High-precision Digital Pressure Switch ( compatible)

The operating fluid temperature range is -5 to 70 C, and ambient temperature range is -5 to 50 C. Operation under low temperature (5 C or less) leads to cause damage or operation failure due to frozen moist in the fluid or air. Protection against freezing is necessary. Air dryer is recommended for elimination of drain and water.

1

It takes 10 [ms] to switch the channel. CH.B Channel 10 [ms] 10 [ms] CH.A Time GND CH.SELECT terminal 10 [ms] 10 [ms] Disconnected Time 16-13-11 19 Technical Information 2-wire pressure switch connections 14 Voltage and current output pressure sensors 15 A 3-wire type switch is a switch that has an output line other than the positive and negative lines that supply the electricity.

ITV0000

Temperature characteristics Operating temperature range 0 to 50C (with no condensation) Equivalent to IP65 Enclosure Connection type Built-in One-touch fitting Metric size z, x, c: 4 For single unit Inch size z, x, c: 5/32" Connection size Metric size z, c: 6, x: 4 Manifold Inch size z, c: 1/4", x: 5/32" Weight Note 1) 100g or less (without options) Note 1) Indicates the weight of a single