IZx-OMR0035

Performance . 28 5 -1. Basic Performance . 28 6. Dimensions . 30 7. Specifications . 34 8. Troubleshooting . 35 2 Doc. No.: IZ-OMR0035 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

HRX-OM-Q026

(Supply puressure: 0.3 to 0.5 MPa) Facility water outlet port *1 Rc1 36 to 38Nm 1.0 MPa or more Automatic fluid fill port Rc3/8 28 to 30Nm (Automatic fluid fill pressure: 0.2 to 0.5 MPa Overflow port Rc1 36 to 38Nm ID 25 mm or more Length 5m or less Tank drain port Rc3/4 28 to 30Nm ID 19 mm or more *1: Water cooled type only.

Table of Contents

36: T-slot pitch U N x P 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 27 26 26 48 47 46 104 103 101 199 194 189 385 374 363 42 43 55 58 119 142 219 239 398 444 Flange assembly 9 10 19 25 9 10 19 25 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

PWR: Power supply plug . 27 5.1 Power supply plug specifications . 27 5.2 Electric wire specifications . 27 5.3 Wiring of power supply plug . 28 (1) Wiring of the power supply (C24V, M24V, 0V) . 28 (2) Wiring of the stop switch (EMG) . 28 (3) Wiring of the lock release (LK RLS) . 28 5.4 Stop circuits . 29 (1) Example circuit 1 Single controller with teaching Box . 29 (2) Example circuit 2

Step Motor Controller

INP Outputs when servo is on Not output when EMG stop is instructed Not output when alarm is generated SVRE ESTOP Note) ALARM Note) Note) Signal of negative-logic circuit (N.C.) 28 Series LECP6 Step Data Setting 1. Step data setting for positioning 2.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Painting and coating Warnings or specifications printed or labeled on the product should not be erased, removed or covered up. 22 to 24 Rc 3/8 28 to 30 Rc 1/2 5. Connection of piping to products When connecting piping to a product, refer to its instruction manual to avoid mistakes regarding the supply port, etc. 6. Steam generated in a boiler contains a large amount of drainage.

VQ7-6/7-8

Proper tightening torque Nm Tightening torque for piping Connection threads Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

pa

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping directions Maximum stroke Cushion Bore size (mm) Model Height Overall length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated piping on right 28

EXxx-OMY0006CN

P LED Table 10-28 P LED LED Acknowledgement 64 No.EX##-OMY0006CN 10.10. MAC FW/HW Firmware version (FW): 2.1.X Hardware version (HW): 03 and higher Fig. 10-6 10.11. DIP 10.11.1.

KP/KPQ/KPG

Open the inner package of double packaging in a clean room or other clean environment. 12 to 14 R 1/4 22 to 24 R 3/8 28 to 30 R 1/2 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

Dedicated Controller

Abnormal driver parameter 28 A driver parameter abnormality in the controller system has occurred. Unsuccessful home position return 30 Trying to execute a program/step without completing the setup (home position return). No designated speed 31 No speed designation with MOVA or MOVI, and no prior speed designation found.

AR Series Modular Type Regulator

fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

(36.3) 15.6 26 (27) AS32l1FSl-U02-06 6 1/4 17 (17.5) 13 AQ 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 ASV 24.5 28.5 9.3 19.2 47 (48) AS32l1FSl-U02-08 8 13.2 22.7 33 14.2 AS32l1FSl-U02-10 10 15.9 26.7 37 35.7 15.6 48 (49) AS32l1FSl-U02-12 12 18.5 29.7 40 34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28

Unit Manifold Valve

Solenoid valve No. 3 8 7 6 5 4 3 2 1 2 No. 8 No. 7 8 7 27 (For C2: 28) 9 No. 6 No. 5 No. 4 No. 3 No. 2 No. 1 6 5 33.6 (Pitch) P = 6 (2) 38 4 3 2 1 1 (No.1) Groove side Barb fitting [1(P), 2(A), 3(R) port] Applicable tubing O.D. 4, I.D. 2.5, Polyurethane tubing (made by SMC) Soft nylon tubing (made by SMC) Connector (L = 300 to 1000) Lead wire length Cut dimension for panel mount (mounting

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Recommended tightening torque (Unit: Nm) Thread 1/8 1/4 3/8 1/2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 (4) When a one-touch fitting of SMC is used, refer to the operation manual for the one-touch fitting. (5) Do not apply torsion or bending moment other than the weight of the product itself. External piping needs to be supported separately as it may cause damage.