Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

HRX-OM-W058

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid . 8-7 Chapter

Vacuum Module Series ZX

(Needle fully open) 57.4 79.1 11.5 20 1 20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

EXxx-OMZ0016

0 EX600-DX *F (16 points) 16 0 EX600-DY *B (8 points) 0 8 Digital output unit EX600-DY *E (16 points) 0 16 (EX600 Series) DY EX600-DY *F (16 points) 0 16 EX600-DM *E (8/8 points) 8 8 Digital I/O unit (EX600 Series) DM EX600-DM *F (8/8 points) 8 8 Analog input unit AX EX600-AXA*1 (2 points) 32 0 Analog output unit AY EX600-AYA*1 (2 points) 0 32 Analog I/O unit AM EX600-AMB*1 (2/2 points)

Booster Regulator/Air Tank

gauge (Option) OUT side gauge port Rc 1/8 IN side gauge port Rc 1/8 IN port Rc 3/8 139 43 46 15 Silencer (Option) OUT port Rc 3/8 21 24 EXH port Rc 3/8 53 4 x 12 98 3.2 73 118 (When silencer installed: 179) (When high-noise reduction silencer installed: 179) VBA42A-04 404 43 40 Pressure gauge (Option) IN side gauge port Rc 1/8 OUT side gauge port Rc 1/8 IN port Rc 1/2 62 62.8 172 Silencer

A

02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24

Applicable Auto Switch Model

CDJ2 CDVJ CDLJ2 CDM2, CDBM2, CDVM3, CDVM5, CDLM2 CDG1, MGG CDLG1 RSDG MGC MLGC, RHC, REC 7 8 8 8 10 10 8 9 9 8 10 10 10 10 10 10 11 10 10 8 8 10 10 9 9 Note) Average value at normal temperature including hysteresis.

Aluminum High Vacuum Angle Valve

8-1 8-2 9 10 O-ring Part No.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Mini Free Mount Cylinder

15, 20 25, 30 4 4, 6 4, 6, 8 4, 6, 8, 10 6 Single acting, spring return 8 10 Mass: Double Acting Made to Order (Refer to page 24 for details.)

VP300/500/700

1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 0.19 Series VP300 VP344 (Base mounted) 0.25 VP542 (Body ported) 0.33 Series VP500 VP544 (Base mounted) 0.43 VP742 (Body ported) 0.64 Series VP700 VP744 (Base mounted) 0.75 Note 1) Weight for body ported does not include a bracket.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

8 !

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 42 29 11 7.5 8 8.5 9 M4 x 0.7 10 12 13 15 M4 x 0.7 4.3 4.3 5.6 5.6 M5 x 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 8 8 10 10 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 5 5 6 6 13 15 18 21 18 26 30 36 42 13 15 18 21 18 22 24 30 12 16 20 25 10, 20, 30, 40, 50, 75, 100 125, 150

ZP

Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.

ITV

G PPA ITV203 0.005 to 0.5 MPa 14-8-14 1/4, 3/8 AL ITV205 0.005 to 0.9 MPa Series ITV3000 ITV301 0.005 to 0.1 MPa Controls air pressure steplessly in proportion to an electric signal. ITV303 1/4, 3/8, 1/2 0.005 to 0.5 MPa 14-8-14 ITV305 0.005 to 0.9 MPa Series ITV209 Controls vacuum pressure steplessly in proportion to an electric signal.

Compact

L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load

Table of Contents

5 15.31 9.18 IN 30.6 21.44 Data 39.26 23.56 OUT 78.5 54.97 10 6 25.13 15.07 IN 50.3 35.18 Spring Reaction Force/Single Acting Standard Stroke Bore size (mm) 4 6 8, 10 4 6 8, 10 Standard stroke (mm) 4, 6, 8, 10 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 4, 6 4, 6, 8 4, 6, 8, 10 Action IN Spring in pre-loaded condition Spring in loaded condition OUT Double acting Single acting, Spring return When

Electric Actuator with Integrated Guide

Can designate 8 types of programs with a total of 3 bits. (Set by the binary system.)

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Port PE 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 6 Base Mounted Type Series VQ5000 Dimensions (mm) 1in = 25.4mm Plug Lead Type Grommet 0 1 G H 2 position single: VQ515 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5 27.5 2

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

8 Tube gasket Steel wire Spring pin NBR !1 !