Modular Design with Uniform Body Style

Series AWmK Series p. 76 p. 76 p. 94 p. 94 Port size Port size Port size Port size 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 Size 20 V V V V V V V V Size 30 V V V V V V V V Size 40 V V V V V V V V V V V V Size 40-06 V V V V Size 50 V V V V Size 60 V V V V V V Lubricator New Spacer p. 48 AL Series p. 87 Port size 1/8 1/4 3/8 1/2 3/4 1 Size 20

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

Modular F.R.L. Unit

1 AF + AFM + AR 1/8, 1/4 AF20 AR20 AFM20 AC20C 1/4, 3/8 AF30 AR25 AFM30 AC25C 1/4, 3/8 AF30 AR30 AFM30 AC30C 1/4, 3/8, 1/2 AF40 AR40 AFM40 AC40C 3/4 AF40-06 AR40-06 AFM40-06 AC40C-06 AW + AFM 1/8, 1/4 AW20 AFM20 AC20D 1/4, 3/8 AW30 AFM30 AC30D 1/4, 3/8, 1/2 AW40 AFM40 AC40D 3/4 AW40-06 AFM40-06 AC40D-06 Table of Contents F.R.L.

SX

When ozone enters or is generated in the air supply. 2 4 2 4 2 4 Applicable solenoid valves: Series SX3 0, SX5 0, SX7 0 3 5 7 20 40 X90 SX Model no. Entry is the same as standard products.

AS

Flow Rate and Effective Area AS121F-M3 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F-M5 AS131F-M5 Model AS131F-M3 AS121F-M5-02 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size 2, 3.2, 4 3.2, 4, 6 3.2, 4 Tubing O.D. 1/8", 5/32" 1/8", 5/32" 3/16", 1/4", 1/4", 5/16", 1/8", 3/16" 3/8" 1/4" Inch size 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 1/4", 5/32" Flow rate l /min

Table of Contents

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Air Cylinder Series MB

4) 2 (n = 4, 8, 12, 16) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) 105 + 40 (n 4) 2 (n = 4, 8, 12, 16) n 2 (Different surfaces, same surface) 1 50 60 65 D-M9V D-M9WV 70 80 55 50 + 30 (n 4) 2 (n = 4, 8, 12, 16) 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) 70 + 30 (n 4) 2 (n = 4, 8, 12, 16) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) n 2 (Different

KQ2

3.2 10 14 8 8 10 14 10 10 12 14 17 15.5 3.4 2.9 M5 x 0.8 M6 x 1.0 12.7 13.9 8 4 4 4 1 8 1 4 18 13.5 5.6 4 16 Connection thread M5 x 0.8 M6 x 1.0 13.5 10 4 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 6 18.5 17 15.5 24 20.5 15.5 26 27.5 22.5 19 28.5 23.5 22 33 27.5 13.1 10.4 17 Applicable tubing 14 8 26.1 18.0 18.5 17 26.1 26.1 17 21 10 3 8 41.5 29.5 1 2 22 Connection thread (With sealant

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

tubing size (mm) 1/8" x 0.086" No. 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 Size No. 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7* 7* 7* 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 1" 1 1/4" 1/8" 1/4" x 5/32" 1/8" 1/4" 6 x 4 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 3/8" x 1/4" 1/8" 1/4" 1/2" x 3/8" 3/8" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1

CA2

4, 6, 8 80 + 40 (n 4) 2 n = 4, 8, 12, 16 85 + 40 (n 4) 2 n = 4, 8, 12, 16 90 + 40 (n 4) 2 n = 4, 8, 12, 16 105 + 40 (n 4) 2 95 + 40 (n 4) 2 n = 4, 8, 12, 16 n n = 4, 8, 12, 16 2 (Different sides and same side) 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV n 90 + 30 (n 4) 2 80 + 30 (n 4) 2 n = 4, 8, 12, 16 10 + 30 (n 2) 2 n = 2, 4, 6, 8 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 n = 4

0.4

7 (14) 11 (20) D side 2 6 6 (12) 10 (16) 3 5 5 (10) 9 (12) 4 4 (8) 8 (8) 5 3 (4) 4 (4) Note) The max. number of mounted valves applies to double wiring.

Proposals for Energy Saving

Model VP3145 VPA3145 IN, OUT Port size Rc VP3165 VPA3165 VP3185 VPA3185 1 2 1 1/4 1 1/4 1 1/4 1 1/2 3/8 1/2 3/4 3/4 3/4 Easy conversion to N.C. or N.O.

LEC-OM069xx

ON Command).4-36 4.7.3 Battery Replacement.4-37 4.7.4 Absolute Encoder Setup and Reinitialization.4-39 4.7.5 Multiturn Limit Setting.4-40 4.7.6 Multiturn Limit Disagreement Alarm (A.CC0).4-41 4.7.7 Absolute Encoder Origin Offset.4-42 4.7.8 Absolute Data Reception Sequence.4-42 4.8 Other Output Signals.4-46 4.8.1 Servo Alarm Output Signal (ALM).4-46 4.8.2 Warning Output Signal (/WARN).4-46

NCM

= 2, 4, 6...) 0.6 3.1 3.1 + 2 (n 2) (n = 2, 4, 6...) 0.4 D-H7C D-C73C D-C80C 0.6 + 2 (n 2) 2 (n = 2, 4, 6...) 0.6 2.8 2.8 + 2 (n 2) (n = 2, 4, 6...) 0.4 D-G5NTL 0.6 + 2 (n 2) 2 (n = 2, 4, 6...) 0.6 2.7 2.7 + 2.2 (n 2) (n = 2, 4, 6...) 0.4 D-B5 D-B64 0.8 + 2 (n 2) 2 (n = 2, 4, 6...) 0.8 2.9 2.9 + 2.2 (n 2) (n = 2, 4, 6...) 0.6 D-B59W Note 1) D-G5NTL, B5, B64, B59W cannot be mounted

5 Port Solenoid Valve Series VQZ1000/2000/3000

, 5(R1), 3(R2) port] (8) (5.5) 49.9 150.3 [154.7] 20.5 24.4 36.6 36.4 36.4 136.8 [141.2] (30) 1 P 5 3 R1 R2 P 1 5 3 R1 R2 30 18 B B B B B B B 21 21 60 2 2 2 2 2 2 2 4 4 4 4 4 4 4 (35) (4) 68.4 [70.6] A A A A A A A (DIN rail) 34.5 4 x 4.5 (For mounting) 12 10 8 6 4 2 0 + + + + + + + (DIN rail clamp thread) PE port M3 x 0.5 (External pilot port) 59 [62.8] 4 (Pitch) P =

Modular F.R.L. Units

AF30-A 1/4, 3/8 Bracket (Except AF10-A) AF40-A 1/4, 3/8, 1/2 5 Float type auto drain AF40-06-A 3/4 AF50-A 3/4, 1 AF60-A 1 Pages 43 to 54 Mist Separator AFM Series AFM20-A 1/8, 1/4 AFM30-A 1/4, 3/8 Bracket 0.3 AFM40-A 1/4, 3/8, 1/2 Float type auto drain AFM40-06-A 3/4 Pages 55 to 63 Micro Mist Separator AFD Series AFD20-A 1/8, 1/4 AFD30-A 1/4, 3/8 Bracket 0.01 AFD40-A 1/4, 3/8, 1/2 Float type

JXCx-OMT0023

4 30 4.

NCQ2/CQ2

NPT1/4 G1/4 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P Through-hole (Std.)

ZP

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

0.4

(Not applicable to Gateway unit) VQ7 Connector type manifold Connector wiring diagram (Mixed wiring) 6 A 4 A 3 A 1 A 5 B 2 B Output The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 9 10 All kits use multi-pin