Vacuum Unit

Release at least one side.) 2 For port exhaust type, air is exhausted from the One-touch fitting. 4 Nozzle size 12 and 15 have exhaust port. 5 Refer to page 46 for the part number and maintenance of the high-noise reduction silencer case assembly.

Table of Contents

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Modular F.R.L. Unit

G H I A B C D E F Model How to Order 33 42 44 50 61 28 30 36 44 54 45 55 63 69 81 59 78 107 110 134 20 29 39 42 53 40 53 70 75 90 34 46 63 67 78 22 21 26 45 55 58 65 76 VHS20 VHS30 VHS40 VHS40-06 VHS50 30 03 RZ F VHS 3-port valve for residual pressure release Caution 1. Consult SMC when a pressure switch and T type spacer are installed on the outlet of pressure release valve 2.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Grease pack part number: GR-S010 (10 g), GR-S-020 (20 g) 46 ISO Standards Air Cylinder: Standard Type Double Acting with End of Stroke Cushioning Series CP96 Dimensions Bore size Stroke Basic: CP96S(D)B Series C85 Series CP96 Series C96 Series C55 PL 2 x EE PL SW KK B WB WA B D R E Cushion valve 8 x RT L9 VD BG L2 L12 R E VA G WH A H L8 + Stroke ZZ + Stroke G With rod boot e d l f h h + L8

ZR

(mm) Model Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) ZR1-W10S ZR1-W13S ZR1-W15S ZR1-W18S ZR1-W20S 1.0 1.3 1.5 1.8 2.0 22 38 54 62 84 46 78 95 150 185 0.132 0.134 0.136 0.154 0.156 ZX ZR Model/Max. Vacuum Pressure 53 kPa (L: Large flow type) ZM Nozzle dia.

Basic Type/Direct Mount Type

42 26 30 46 42 28 32 48 44 32 48 44 17.5 21.5 76.5 56.5 72.5 60.5 19.5 23.5 87.5 35.5 67.5 83.5 39.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Precautions 1

Y-020B Y-032B Y-040B Bore size 20 25, 32 40 +0.2 +0.1 9 20 25 36 46 M8 x 1.25 16 18 41 25 9 9 10 14 11 66 M8 x 1.25 +0.2 +0.1 25, 32 9 20 25 38 48 18 9 9 10 14 14 69 22 45 25 M10 x 1.25 M10 x 1.25 +0.3 +0.1 40 M14 x 1.5 12 24 55 68 22 12 13 25 13 92 16 24 50 49.7 49.7 M14 x 1.5 Applicable pin par no. Retaining ring Cotter pin size U1 R1 NX NZ Part no.

Filter Regulator

6.5 8 53 2.3 31.3 38.5 19 7 157 123.9 122.2 117.8 122.3 137.8 142.3 AW40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.5 154 169.5 174 AW40-06-D 50 54 55.5 8.5 10.5 70 2.3 35.5 42.5 21 7 188.9 157.6 155.9 151.5 156 171.5 176 AW60-D 70 75 66 11 22 113 3.2 273.9 242.6 240.9 236.5 241 256.5 261 The dimension C is the length when the filter regulator knob is unlocked. -46-

Guide Cylinder/Compact Type Series MGC

x 1.25 depth 14 75, 100, 125, 150 200, 250, 300 107 19 16 22 75 40 M8 x 1.25 depth 16 37 160 34.5 50 140 8.6 14 depth 10 M10 x 1.5 depth 18 142 25 19 22 110 45 M10 x 1.5 depth 20 42 194 37 80 170 10.5 17 depth 12 M12 x 1.75 depth 21 Bore size (mm) P Note 2) I J K L M N O Q R S T U V W X Y Z WH 20 25 32 40 50 60 80 86 80 25 44 38 25 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 30 52 70 95 46

ML2B

58 68 J 40 46.5 55 I 76.5 91 110 N 16 15 19 H 73 88 106 F 93.5 107.5 130.5 O 18.5 19.5 21.5 N 16 15 19 M 13 15 19 K 46 58 68 J 40 46.5 55 H 73 88 106 F 76.5 91 110 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 RS Q G MM 16 21.5 24.5 PA Rc 1/8 Rc 1/8 Rc 1/4 LL 28 30.5 37.5 KK 15 16 17.5 O 69 84 102 PP 56 62.5 77 NN 22 26 37.5 PA Rc 1/8 Rc 1/8 Rc 1/4 MM

17

A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.

Regulator

28 32.5 28 59.8 27.8 43 AR40-D 70 91.5 35.5 40.5 28 41.5 28 68.8 27.8 52 1/8, 1/4 M421.5 M381.5 1/4, 3/8, 1/2 1/4, 3/8 AR40-06-D 75 93 35.5 40.5 28 41.5 28 68.8 27.8 52 AR50-D 90 125 43 45 28 51 27.8 61.5 AR60-D 95 155 45 50 28 51 27.8 61.5 3/4 M421.5 3/4, 1 1 Model Optional specifications Bracket mount Panel mount Q R U AR20-D 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30-D 41 40 46

CEx-OMP0016

-46-69 Stroke fine ML2B32 per one side -12-24 -24-36 adjustment range Both sides -24-48 -48-72 (mm) ML2B40 per one side -16-32 -32-48 Both sides -32-64 -64-96 How to order 1) When ordering stroke adjustment unit integrated into cylinder body.

MGZ Series

Switch connection side 0.5m Load connection side 0.5m 3.4 SWITCH CD-P 18 9 VOLT 38 46 3.4 15.5 Contact Protection Box Connection To connect a switch unit to a contact protection box, connect the lead wires from the side of the contact protection box marked SWITCH to the lead wires coming out of the switch unit.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

High Vacuum L Type Valve

1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3) for 0.5MPa 46

0.01

port End plate R 3 0 3 0 3 0 center DIN rail 92 Setting dial P P P T T T U U U E E E L L L S S S L L L 20.5 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 Pressure gauge Rc, NPT, G 1/8 SUP port Plug DIN rail mounting bracket 24 L3 11.2 5.3 L4 L5 n Stations 1 Left Right Electrical entry dimensions Right angle Straight union Stations L1 L2 L3 L4 L5 1 46

KS/KX

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

Manifold Specifications

fitting (4(A), 2(B) port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 : With light/surge voltage suppressor 3-3-63 Series VZ5000 Type 21 Manifold VV5Z5-21Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/4 (1(P), 3/5(R) port) PE port G: 300 mm H: 600 mm Manual override (Non-locking) (Lead wire length) (mm) Stations 2 3 66 46