SZ3000

A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Applicable connector: D-sub equivalent JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch for locking a connector 8 3.1 8 36.3 5.5 5.3 FREE LOCK 35 18 28.8 47.6 Terminal no.

Stainless Steel 316 Fittings

1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 10 14 10 14 10 14 16.3 19.1 16.3 19.1 17.8 20.6 20.2 22 23 2.5 4 1.8 1.6 d 5 8 Applicable tube 3 4 2.3 2.6 H1 H2 4 6 3.3 6 5.8 10 M A L 14 6 8 5.3 6.6 14 17 Connection thread 17 25 17 7.5 10 6.8 30 22 27.1 7.6 17 25 17 8 10 7.3 35 22 27.1 26.6 17 9 12 8 45 22 28.7 8.5 17 26.6 17 10 12 9 57 28.7 28 29.9 22

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

CNA

, 16 (n-4) 120+55 2 n=4, 8, 12, 16 D-A3 D-G39 D-K39 n (Same side) Different mounting n=2, 3, 4, 35+30(n-2) n=2, 4, 6, 8, 75+30(n-2) n=2, 4, 6, 8, 80+30(n-2) n=2, 4, 6, 8, 90+30(n-2) With 2 (Different side and same side) n=2, 3, 4, 100+100(n-2) 100+100(n-2), n=2, 4, 6, 8, 20 90 100 110 120 Same side (n-2) 20+55 2 n=2, 4, 6, 8, (n-4) 90+55 2 n=4, 8, 12, 16 (n-4) 100+55 2 n=4, 8, 12,

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

JIS Standard Hydraulic Cylinder

4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 125 140 150 2 (Different surfaces), 1 130 160 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 125 + 55 140 + 55 150 + 55 130 + 55 160 + 55 D-F5NT n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 110 125 135 2

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Table of Contents

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 MRQ DSingle/Double type 2 Switch Block Unit Part No. Series CRB2 20Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.

ISO Cylinder

4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3] 10 (7) [4] 16 7.5 (8.5) 16 6 (7) 3.5 (4.5) 5 (6) 4.5 (5.5) 2 (

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Compact Manifold Regulator Series ARM5

. 4.

Compact Cylinder Series NCQ8

8 2-3/4 2-7/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 1/4-20UNC -2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-1/2 3-3/4 4 4-1/4 4-3/4 5-1/4 5-3/4 6-1/4 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 2-1/8 2-

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 MRQ DSingle/Double type 2 Switch Block Unit Part No. Series CRB2 20Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.

ITV

G thread With at bracket G1/4 G3/8 G1/4 20 depth, depth of counterbore 1.5 Port 1 (Supply port), Port 2 (Output port) 23 depth, depth of counterbore 2 Port 1 (Supply port), Port 2 (Output port) 20 depth, depth of counterbore 1.5 Port 3 (Exhaust port) 100 4 x 7 84 39 52 40 24 24 Flat bracket With L-bracket 1/4 (Rc, NPT) Port 3 (Exhaust port) 1/4, 3/8 (Rc, NPT) Port 2 (Output port) 1/4, 3/8

High Purity Chemical Valve

3, 4, 6 1/8, 3/16, 1/4 LVC3m 8 6, 8, 10 1/4, 3/8 LVC4m 10 10, 12 3/8, 1/2 LVC5m 16 12, 19 1/2, 3/4 LVC6m 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

Plug-in Unit

3(R) port 2-Rc 1/2 1(P) port 4-G 1/2 Conduit port VQC SMC SMC SMC SMC SMC SMC SMC SQ 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 VQ0 13 55.5 42.7 43.5 20.5 VQ4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

4 !5 !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 MRQ DSingle/Double type 2 Switch Block Unit Part No. Series CRB2 20Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.