Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Size With internal shock absorber With adjustment bolt With internal shock absorber With external shock absorber With external shock absorber With adjustment bolt For high energy For low energy 1 2 3 7 10 20 30 50 70 100 200 1 0.2 to 0.7 1.5 2 6 39 7 161 231 116 25 0.2 to 1.0 Note) 574 1060 0.2 to 0.7 0.2 to 1.0 116 48 805 1210 294 81 1310 1820 0.2 to 1.5 1100 240 0.2 to 1.0 0.2 to 2.0 1600

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

25

MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa PA(P) SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa PAX 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 PB PB 0.1 0.1 0.1 PAF 0 0 0 50 100 150 200 250 500 1000 1500 2000 0 Discharge (mL/min) 0 Discharge (mL/min) 400 800 1200 1600

3

flow range Pressure Loss (Reference Data) PFMC7501 (for 500 L/min) PFMC7102 (for 1000 L/min) PFMC7202 (for 2000 L/min) 50 50 50 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa Supply pressure 400 kPa 40 40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10 0 0 0 0 400 800 1200 1600

10

Allowable rotating eccentric angle 2 3 Installation Requirement for Swing Impacts (mm) Model Load on mounting frame 2 (Allowable rotating angle) With cap Basic type R (Min. installation radius) Model S (Stroke) RJ0604 RJ0805 RJ0806 RJ1006 RJ1007 RJ1410 RJ1412 RJ2015 RJ2725 450 N 380 N RJ0604 RJ0805 RJ0806 RJ1006 RJ1007 RJ1410 RJ1412 RJ2015 RJ2725 76 4 630 N 258 96 5 900 N 277 115 6 1600

Air Slide Table/Long Stroke Type Series MXY

For the maximum allowable load mass for each piston speed, please refer to Graph (1). 1600 26 25 23.5 The above value represents the applicable load at the position where the moment does not work at the time of stop. Factors such as impact, etc. are not in consideration with the value.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

For the maximum allowable load mass for each piston speed, please refer to Graph (1). 1600 26 25 23.5 The above value represents the applicable load at the position where the moment does not work at the time of stop. Factors such as impact, etc. are not in consideration with the value.

Mechanically Jointed Rodless Cylinder Series MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 m 160 160 150 150 140 140 (2400) (2400) (2400) (2400) (2400) (2400) l 130 130 (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) m l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600

Membrane Air Dryer

Chart IDG75, 75H IDG100, 100H Single Unit Type Model Selection Made to Order Specific Product Precautions Unit Type Outlet air atmospheric pressure dew point (oC) Outlet air atmospheric pressure dew point (oC) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 P1 = 0.5 MPa 10 10 P1 = 0.5 MPa P1 = 0.7 MPa 20 20 P1 = 0.7 MPa IDG100 IDG75 30 30 IDG75H IDG100H 40 40 50 50 0 200 400 600 800 1000 0 400 800 1200 1600

EXxx-OMK0006

The parameters that can be saved in internal EEPROM of the SI unit are as follows:Index Sub-Index Name 1005 COB ID, SYNC 1006 Communication cycle period 100C guard time 100D life time factor 1016 1 to 9 Consumer heartbeat time 1017 Producer heartbeat time 1029 1 Communication error 1400 1to 2 1st receive PDO parameter 1600 0 to 8 1st receive PDO mapping 1800 1 to 3,5 COB-ID used by PDO 1A00

Mechanically Jointed Rodless Cylinder Series MY2

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) D16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 -X 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

Power Clamp Cylinder

Recommended shim thickness) Arm length L: 10 in 0.14 0.04 0.10 1600 1400 1200 1000 800 600 400 200 0 Clamping force (lbf) 0.7MPa 0.5 MPa 0.3 MPa 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Shim thickness (in) 187 Model Selection 2 Slim-line power clamp cylinder mounting When using a hard stop Arm length L (Distance to a hard stop) Clamp arm Cylinder Shim q Upper hard stop Clamping block Clamp arm Unclamping

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

cushion Rotation time (s/90) Rubber bumper Without cushion 0.25 x 100.2 to 0.7 10 0.39 x 100.2 to 0.7 15 0.12 0.2 to 1 40 0.025 20 0.25 0.2 to 1 40 0.048 30 0.40 0.2 to 1 40 0.081 40 ) Allowable kinetic energy with cushion Maximum energy absorption with optimal adjustment of cushion needle Weight Table (g) Standard weight Size 90 180 120 150 10 220 270 15 600 700 20 900 1100 30 1400 1600

MY1

Also, for long stroke operation involving vibration and impact, use of a side support is recommended even if the spacing value is within the allowable limits shown in the graph. 90 MY1C63 MY1C63 MY1C63 MY1C63 80 (1600) (1600) (1600) (1600) 70 MY1C50 MY1C50 MY1C50 MY1C50 l l 60 (1400) (1400) (1400) (1400) MY1C40 MY1C40 MY1C40 MY1C40 50 MY1C32 MY1C32 MY1C32 MY1C32 40 (1200) (1200) (1200) (1200

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

LEC-OM07605CN

PA_ _ ]) PA01 **STY 1000h PA02 **REG 0h PA03 *ABS 0h PA04 *AOP1 A-1 2000h PA05 10 PA06 1 PA07 1 PA08 ATU 0001h PA09 RSP 16 PA10 INP 1600 [pulse] PA11 1000.0 PA12 1000.0 PA13 0h PA14 *POL 0 PA15 *ENR 4000 [pulse/rev ] PA16 *ENR2 2 1 PA17 **MSR 0h PA18 **MTY 0h PA19 *BLK 00ABh PA20 *TDS Tough Drive 0h PA21 *AOP3 A-3 0001h PA22 **PCS 0h PA23 DRAT 0h PA24 AOP4 A-4 0h PA25 OTHOV

Process Valve Series VNA

(mm) Model Threaded Note) Flange Av x 10-6 m2 VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 30 32 36 95 120 110 140 170 260 220 370 400 560 400 560 630 820 720 960 990 1500 1000 1600 0.3 0.2 7 3 8 11 15 11 15 14

Rotary Cylinder Series MRQ Size: 32, 40 1

D20Weight Rotating angle Flange (g) Basic weight (g) Add'l stroke weight (g/mm) Size 80 to 100 1400 4 500 32 170 to 190 1500 80 to 100 2100 40 5 500 170 to 190 2300 Calculation: (Example) MRQBS32-50CA Basic weight 1400 g 4 x 50 = 200 g Stroke additional weight Total 1600 g For the weight of auto switch alone, refer to page 11-11-1.

SFOD-OMT0009CN

[] 14096 X (1) ()1 ()1 11 800 1 (2) ()1 ()2 1600 1 (3) ()2 ()1 400 1 ()1 ()1 0 1 4097 4096 1 2 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 14096 X 12 1 800 2.5mm 2 3 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1) 50 No.SFOD-OMT0009CN-B 7.3 XX X 1CW X 1 2 2CCW 1 XX 1 2 2 1) XX 1) XX 1) XX 0 XX 02 1a 2b 21 1)

JXCx-OMT0001CN

[] (1) ():1 ():1 Undefined No.11 1 4096 X 800 1 (2) ():1 ():2 1600 1 (3) ():2 ():1 400 1 ):1 ():1 01 40974096 1 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 800 2.5mm Undefined No.12 1 4096 X 2 3 =1 /2 (3 ) =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1 -50No.JXC-OMT0001CN-C 9.3 XX X () 1:CW 2:CCW X ORIG direction 1 2 1 2: XX ORIG