SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 30mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 40mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 50mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 40mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 50mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 32 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 32 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 32 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 30mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 32 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 40mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 32 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 50mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 30mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Adapter Material: Brass, Standard, Pad Diameter: ø4, Pad Type: UM (Flat w/Groove), Pad Material: N (NBR), Mounting Thread Size: A10 (M10 x 1, Male Thread), Vacuum Inlet: U4 (ø4 Tubing/Barb Fitting)
Adapter Material: Brass, Standard, Pad Diameter: ø6, Pad Type: UM (Flat w/Groove), Pad Material: N (NBR), Mounting Thread Size: A10 (M10 x 1, Male Thread), Vacuum Inlet: U4 (ø4 Tubing/Barb Fitting)
Adapter Material: Brass, Standard, Pad Diameter: ø8, Pad Type: B (Bellows), Pad Material: S (Silicone Rubber), Mounting Thread Size: A10 (M10 x 1, Male Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)
Adapter Material: Brass, Standard, Pad Diameter: ø6, Pad Type: B (Bellows), Pad Material: S (Silicone Rubber), Mounting Thread Size: A10 (M10 x 1, Male Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)