Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 1 (Cylinder Port Side), Port Size: N13 (1/2 inch)

Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 1 (Cylinder Port Side), Port Size: N11 (3/8 inch)

Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 1 (Cylinder Port Side), Port Size: C10 (10mm)

Model: VQC2000, Supply / Exhaust Port Entry: Cylinder Port Side, Port Size: 12mm, Option: -

Model: VQC2000, Supply / Exhaust Port Entry: Cylinder Port Side, Port Size: 1/2 inch, Option: -

Model: VQC2000, Supply / Exhaust Port Entry: Cylinder Port Side, Port Size: 3/8 inch, Option: -

Model: VQC2000, Supply / Exhaust Port Entry: Cylinder Port Side, Port Size: 10mm, Option: -

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

LEC-OM069xx

1 1 Outline 1.

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

OMU0023

2 3 ExOR step 1 with step 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 4 1st shift, Fill in 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 5 2nd shift, ExOR A001h 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 1 Value of 1st 6 3rd shift 0 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 byte: 7 4th shift, ExOR A001h 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 1 "01h" 8 5th shift 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 9 6th shift, ExOR A001h 1 0 0 0 0 0 0 1 1

LX

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

High performance type Step Motor Controller (Servo/24 VDC)

0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57 1 1 1 0 0 1 58 1 1 1 0 1 0 58 1 1 1 0 1 0 59 1 1 1 0 1 1 59 1 1 1 0 1 1 60 1 1 1 1 0 0 60 1 1 1 1 0 0 61 1 1 1

Step Motor Controller (Servo / 24 VDC)

44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43 1 0 1 0 1 1 43 1 0 1 0 1 1 44 1 0 1 1 0 0 44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1

7ND9071en

Housing 15 1 O-ring 16 1 Washer 18 1 Wave spring 19 1 Bushing 36 1 Grounding screw 39 1 Inner cover 42 3 Screw 47 3 Screw 57 1 Conduit entry adapter 61 1 Spool valve cover 63 1 Gasket 100 1 Cover ND92_E1 = H087634, ND92_E2 = H087617, ND9300 = H087628 ND72_E1 = H087634, ND72_E2 = H087617 104 1 O-ring 107 1 Screw 109 1 Pointer 110 1 Stop screw 111 1 Spring 120 1 Prestage unit H039292, also

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable

2/3 Port Valve

IN Model Port size Rc(PT) Orifice size (mm) Model Solenoid coilO Coils: Class B, Class H 1 8 1 4 , VX211 0 2 2 3 4.5 3 1 8 1 4 , VX212 0 2 1 8 1 4 , VX213 0 2 VoltageO 1 4 3 8 , VX222 0 2 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V 1 4 3 8 , 4.5 VX223 0 2 1 4 3 8 , 6 VX224 0 2 1 4 3 8 , 8 VX2250 DC Standard Option 24V 12V 3 8 1 2 , 1 4 , 10 VX2260 1 4 3 8 , 3 VX232 0 2 1 4 3 8 , 4.5