High Vacuum L Type Valve

XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

HRX-OM-X027

Pressure unit is MPa: Setting unit is 0.01MPa Pressure unit is PSI: Setting unit is 1PSI MPa to PSI to HRS-R Series 5.16 Alarm customize function 5-41 HRX-OM-X027 Chapter 5 Display and setting of various functions Changing of operation when communication error Setting and checking 20. Press the [SEL] key once.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Model Bolt Proper tightening torque N.m L1 MGZ/MGZR20 MGZ/MGZR25 MGZ/MGZR32 MGZ/MGZR40 MGZ/MGZR50 MGZ/MGZR63 MGZ/MGZR80 L2 11 11 16 16 16 16 20 10 10 12 12 15 15 23 2.5 to 3.1 2.5 to 3.1 4.1 to 6.4 4.1 to 6.4 8.8 to 13.8 8.8 to 13.8 30.4 to 47.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 L2 L1 2.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Thread type 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Stroke (mm) Refer to Standard Stroke on page 8-25-21.

Digital Pressure Switch

Otherwise, chattering will occur. 2: If analogue voltage output is selected, the analogue current output cannot be selected. 3: If analogue current output is selected, the analogue voltage output cannot be selected. -61No.PS-OMM0007-I Piping specifications Model No. 01 N01 W1 WF1 M5 C4 C6 NPT1/8 R1/8 Rc1/8 G1/8 M50.8 One-touch fitting 4 One-touch fitting 6 (with M5 female thread) (with M5

MHC2

When auto switches are used, through hole mounting is not available. 4-M3 x 0.5 (Thread for mounting attachment) Adjusting needle for finger speed M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger closing port) 12-8-4 5 Angular Style Air Gripper Standard Type Series MHC2 Double Acting: Size 10, 16, 20, 25 MHC2-20 2-M5 x 0.8 thread depth 8 (Mounting thread) MHZ MHF 4-M5 x 0.8 thread depth 10

MHC2

When auto switches are used, through hole mounting is not available. 4-M3 x 0.5 (Thread for mounting attachment) Adjusting needle for finger speed M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger closing port) 12-8-4 5 Angular Style Air Gripper Standard Type Series MHC2 Double Acting: Size 10, 16, 20, 25 MHC2-20 2-M5 x 0.8 thread depth 8 (Mounting thread) MHZ MHF 4-M5 x 0.8 thread depth 10

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1

Rotary Table

M5. 2 180 Standard tyoe Number of auto switches 3 90 4 180 2pcs.

Digital Pressure Switch

M5 M5R 01 N01 Port size M50.8 M50.8 R1/8 NPT1/8 M5(0.8) M5(0.8) Wetted parts Pressure sensing part Silicone Material of Piping port C3602 (Electro less nickel plating) O-ring: HNBR With lead wire and connector attached (5-core, 2 m) 55 g 63 g Weight Without lead wire and connector 15 g 23 g Analogue output Voltage output Range Rated pressure range A B C Vacuum 0.0 to -101.0 kPa 0 -101 kPa

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

Sine Rodless Cylinder Series REBR Direct Mount Type

23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z Model REBR15 18 54.5 98 REBR25

3 Position Cylinder Series RZQ

RZQ mounting bolt C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l 9.5 8 10 8.5 16.5 11.5 3 17.5 12.5 3.5 4 Series RZQ Model Selection

RZQ

RB RZQ Mounting Bolt J C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l D9.5 8 -X 10 8.5 20Data 16.5 11.5 3 17.5 12.5 3.5 10-10-5 6

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

28.5 3.5 65 5.0 5.0 27 9.5 M4 x 0.7 2 6 18 61 6.0 M4 x 0.7 13.5 61 41.5 5.5 95 7.5 7.4 37 14.0 M5 x 0.8 2 8 25 89 9.5 M5 x 0.8 20.0 90 58.0 8.6 160 12.0 12.0 54 18.0 M6 x 1 2 12 38 138 14.0 M6 x 1 27.0 134 68.0 11.0 220 22.0 16.5 84 20.5 M8 x 1.25 3 16 60 178 17.0 M8 x 1.25 31.0 NE NG NH NW PA PB PC PD PF Q QW T TT UU YW Z P PE PG Model MY3B16 MY3B25 MY3B40 MY3B63 M5 0.8 4.0 122 42 30 6.5

1.63

MGF MGPWL, MGPWA Common Dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L MM ML MGZ 20 25 32 40 50 63 34 35 37 41 42 49 10 10 14 14 18 18 10 13 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24 27 32 39 18 21 24 27 32 39 24 30 34 40 46 58 M5 x 0.8 M6 x 1 M8

3 Position Cylinder Series RZQ

RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75M5 x 110 L 110 M5 x 135 L 8 9.5 135 M5 x 160 L 160 RZQ32-12-S7515 2 pcs. M5 x 120 L 120 M5 x 145 L 8.5 10 145 M5 x 170 L 170 M6 x 130 L 130 JIS flat washer M6 x 155 L 155 11.5 16.5 3 Nominal size 6 M6 x 180 L 180 4 pcs.

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

LJ1H

Not required. a=3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 45 for deflection data. 2 Series LJ1H10 Dimensions/LJ1H10PB 10 6 Work piece mounting reference plane 80 5H10 depth 8 8 x M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 60 50 (43) Stroke + 125 (table movement range) 232 Z section 3.3 30 90 83 A section