Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Page 603-10 JXC-CD-T JXC-CD-S Straight type JXC-CL-S Straight type T-branch type (Accessory) To SI To ENC To SI To MOT Provided by customer (3 m) Communication cable To PWR Page 603-10 Power supply for controller 24 VDC Power supply plug (Accessory) Page 603-10 Options Teaching box Controller setting kit Conversion cable Note) Page 603-10 P5062-5 (0.3 m) Page 603-10 (With 3 m cable) LEC-T1

C95

45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 214 240 264 293 346 381 212 238 259 288 341 371 32 36 45 50 63 71 7 10 10 10 12 14.5 72 83 100 115 126 150 87 101 120 135 153 178 56 65 77 92 100 120 200 222 244 273 321 356 212 237 259 293 341 381 32 40 50 63 80 100 6-12-24 Refer to page 6-16-1 for details on auto switches.

Electric Actuators

to 150 10 to 150 10 5 5.5 to 11.2 5.4 to 9.0 4.4 4.4 3.3 3.3 10 to 200 10 to 200 10 to 150 10 to 150 10 10 2.8 to 5.6 2.7 to 4.5 3.3 3.3 2.2 2.2 20 to 350 Note 4) Basic Compact Basic Compact Basic Compact Basic Compact Basic Compact Horizontal Max. work load [lb] Note 2) Note 3) Vertical Actuator specifications Electric specifications 20 to 300 Note 4) Horizontal 20 to 350 Note 4) Speed

Electric Actuator

50 60 70 80 10 20 Work load [kg] Work load [kg] LEJS63/Ball Screw Drive: Vertical LEJS63;A LEJS63;B 20 Duty ratio: 50% 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 15000 15000 10 10 Duty ratio: 75% Duty ratio: 75% 5000 5000 0 0 0 10 2.5 5 7.5 0 20 15 5 10 Work load [kg] Work load [kg] LEJB40/Belt Drive: Horizontal LEJB63/Belt Drive: Horizontal 20

Air Slide Table

Bore size (Stroke (mm)) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Applicable Auto Switches/Refer to Best Pneumatics No. 3 for further information on auto switches.

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

Step Motor Driver （ Pulse input type ）

10 10 10 ORIG ACC/DEC 1000 1000 1000 1000 Creep speed 10 10 10 10 ORIG sensor 0 0 0 0 ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 101 - Appendix 1.5 LER series setting value LER Step data default Model LER10K LER10J LER30K LER30J LER50K LER50J Gear Ratio [] 8 12 8 12 7.5 12 No. 0 0 0 0 0 0 Movement MOD ABS ABS ABS ABS ABS ABS Speed 280 420 280 420 280 420 Position 0.00 0.00 0.00 0.00

JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

EXxx-OMY0004

-10 Block diagram of the EX245-FPS1 68 No.EX##-OMY0004 Fig. 10-11 Block diagram of the EX245-FPS2 Fig. 10-12 Block diagram of the EX245-FPS3 69 No.EX##-OMY0004 11.

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

EXxx-OMY0006CN

-10 EX245-FPS1 68 No.EX##-OMY0006CN Fig. 10-11 EX245-FPS2 Fig. 10-12 EX245-FPS3 69 No.EX##-OMY0006CN 11.

CXWM/CXWL

10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 25 25 25 D-A9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 30 30 30 D-M9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 55 55 55 D-M9 D-M9W 2 pcs. (Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 30 30 30 D-M9WV 2 pcs.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

OMR0032

Range Resolution LAT3-10 0 to 10 Refer to the 0.03 LAT3-20 0 to 20 Area Range table on the LAT3-30 0 to 30 right. LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds the 0.5 to 5.0 set value.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

3Ybore size 63 63 all types 4 x 28AW 30 10 14 6 M18 x 1.5 80 32 23 43 16 35 65 30 18.3 80 80 all types 100, 125 all types 4 x 36AW 35 10 14 7 M22 x 1.5 95 36 28 50 16 39 78 35 22.3 N M L E F 100 5 x 40AW 42 10 15 8 M27 x 2 110 40 33 59 20 46 90 43 27.5 160 160 all types 5 x 50AW 50 10 15 10 M33 x 2 120 44 37 66 22 50 100 45 34 C D Spring pin hole Drilled after assembly P A 100 Series CHA

New

Fluid 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa 1) Type of fluid Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side. Also, install a filter on the primary side, and be careful that no foreign material is picked up.