(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/8AS2201FG-01-04AS2211FG-01-04AS2301FG-01-04AS2311FG-01-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/8AS2201FG-01-08AS2211FG-01-08AS2301FG-01-08AS2311FG-01-08

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/8AS2201FG-01-08AS2211FG-01-08AS2301FG-01-08AS2311FG-01-08

Vacuum Unit Ejector / Vacuum Pump System

Is E or F: For pressure switch for vacuum ,lead wire with connector (Length 2m) for pressure switch for vacuum G When 1.

Vacuum Unit Ejector / Vacuum Pump System

Note 7) Select F or H for (1) System/Body Type for the single unit model. -13No. ZK2-OM00201 (4) Wiring Note 8) Symbol Type L Individual wiring Note 9) F D-sub connector (25 pins) Note 10) P Flat ribbon cable connector (26 pins) Note 10) N No wiring (No valve) Note 8) Common wiring is available only solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

PC Wiring System

Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5

Compact Cylinder

G D 50 63 F N Piping Mounting brackets are included, (but not assembled).

IZx-OMP0064

2) With High speed static neutralization cartridge With air purge, For IZS41-1120-F 2 6 0.3 5 1.5 Discharge time [s] Discharge time [s] 0.1MPa s s 4 0 1 3 0.2MPa 200 500 0.3MPa 0.4MPa 0.5MPa 2 0.5 1 0 0 0 100 200 300 400 500 0 500 1000 1500 2000 mm mm Installation distance [mm] Installation distance [mm] 3) With Energy saving static neutralization cartridge With air purge, For IZS41-1120J-F

MY1

8 MY1HG-F (W) Component Parts Description Material Note No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ VQD 4(A), 2(B) port 3(R) port 1(P) port 25P 26P/20P (P kit) 20P (J kit) F kit P kit J kit L kit S kit 2-3-11 12 Series SQ1000 Kit (D-sub connector kit) F Manifold Specifications Simplification and labor savings

Electro-Pneumatic Positioner

D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

Title not found

Temp.140'F (60"C)) Rod Boot (Rubber) (l\rax. Temp. 230"F (1 10'C) ) Stroke Min. = 1" (25mm) Max. :12"(300mm) Others Consult Factory 'When ordering stroke should be in mm not inches. Boi (ln. Nom.) 50mm (2) 63mm (2'/.1 80mm (3) 100mm (4) CyllndrType -J N R H J K Mounting B Bodystuds L Foot F Front Flange G RearFlange C Sgl. Clevis D Dbl.

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8

60

G H F SUP. SUP.

Stopper Cylinder

QA [mm] F 13 Tubing O.D. 6 B + Stroke R R 8 QB Stroke Q Bore size QA F Q QB QU QW 1.8 Stroke 20 Tubing O.D. QA F 13 KA KB Tubing O.D. 6 8 QB Stroke Q QU 32 6 7.5 20 13 38 60.5 40 6 8 24.5 13 42 68 50 8 9.5 26 16 50 82 29 1.8 Stroke 20 QW Tubing O.D. QA F 13 Tubing O.D. 6 QU 8 QB Stroke Q 29 1.8 Stroke 20 QW 32 to 50 20 Tubing O.D.

Filter Regulator AW30, 40

1/4 Non-relieving Flow direction: Right to left Drain cock with barb fitting: 6 x 4 nylon tube Note 1) Body size 3 8 30 40 1 2 Note 2) Thread type Metric thread (M5) Rc NPT G Nil Display units for product name plate, caution plate for bowl, and pressure gauge: PSI, F Note 3) Note 1) N F When more than one specification is required, indicate in ascending alphabetical order.