VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

C92

Support bracket except centre trunnion Centre trunnion No. of auto switches Style Auto switch model 32 40 50 63 80 100 32 40 50 63 80 100 2 (On different faces or same face) Reed switch Solid state switch D-A5, D-A6 115 110 105 80 60 15 20 1 2 (On different faces or same face) 20 D-A59W 120 115 110 85 60 25 70 1 15 2 (On different faces or same face) 15 120 115 110 85 60 25 70 D-F5/J5 1 10

Compact

0.05 ST 5, 10ST 15, 20 ST 5, 10 ST 15, 20 0.00 0 20 40 60 0.00 0 20 40 60 0.00 0 20 40 60 Load [N] Load [N] Load [N] ST = Stroke 14 MXZ Series Auto Switch Mounting Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Mounting D-M9mV D-M9mWV D-M9mAV D-M9m D-M9mW D-M9mA (1) Bottom mounting 5 10*2 15*1 15*1 (2) When mounting an auto switch into the groove from the top*3 15 15 30

VEX1

Grommet terminal Conduit terminal DIN terminal a Model b c d e f g h i j VEX5510 VEX5511 19 130 110 9 12 2.3 204 204.5 222 221.5 32 VEX5710 VEX5711 136 120 9 20 2.3 221 221.5 239.5 239 VEX5910/5911 Bracket (Option) Pressure gauge (Option) Grommet terminal (E) DIN terminal (D) Applicable O.D. 6 to 8 Conduit terminal (T) 1/4 (P2) 1/4 (P1) Refer to page 1983.

/

K J F H K J (D) F H 2 x P Port size 2 x P Port size Conduit terminal: T DIN terminal: D M N E (N) (M) E C C 25 32 31.5 (44) A A G1/2 L L G1/2 OUT IN OUT IN Applications B B (D) F H (D) F H K J K J 2 x P Port size Cable 6 to 12 2 x P Port size With bracket e a g d Bracket h b i (mm) Model A B C D E F H J K Port size P N.C. 1/4, 3/8 1/2 3/4 1/1 40 52 65 70 22 29.5 36 40.5 20 26 32.5 35 30

CY1F

(mm) Bore size D-A9, D-A9V D-F9, D-F9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.) (mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Air Combination

AC20-D to AC60-D Model AC20-D AC30-D AC40-D AC40-06-D AC50-D AC60-D Air filter [AF] AF20-D AF30-D AF40-D AF40-06-D AF50-D AF60-D Component Regulator [AR] AR20-D AR30-D AR40-D AR40-06-D AR50-D AR60-D Lubricator [AL] AL20-D AL30-D AL40-D AL40-06-D AL50-D AL60-D Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size Note 1) 1/8 [AR] Fluid Air Ambient and fluid temperature

Copper-free Actuators

Pin Cylinder Series C(D)JP 1.2-2 20-CJP Double acting SCJPl 1.2-8 20-CJP Single acting Large bore size cylinder Series C(D)S1 Standard SC51l 1.10-2 20-CS1N Fine lock cylinder Series C(D)L RB Standard SCLAl 3.1-33 20-CLA J Cylinder with lock Series C(D)NA D SCNAl Standard 20-C(D)NA 3.3-1 -X End lock cylinder Series C(D)B 20Standard 20-CBM2 SCBM2l 3.4-4 Standard 20-CBA1 SCBA1l 3.4-12 Plate

EXxx-OMN0027CN

1 -57No.EX-OMN0027CN-D (Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50+10.45 V -10.45+10.50 V -5..5 V -5.25+5.22 V -5.22+5.25 V -20..20 mA -21.00+20.90mA -20.90+21.00mA 0..10 V 0.00+10.45 V +0.05+10.50 V 0..5 V 0.00+5.22 V +0.03+5.25 V 1..5 V +0.75+5.22 V +0.78+5.25 V 0..20 mA 0.00+20.90mA +0.10+21.00mA 4..20 mA +3.00+20.90mA +3.10+21.00mA -58No.EX-OMN0027CN-D (1) No.

LVQ

LVQ20 C A B D (Max.

Fieldbus System

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

CRQ2

M ab BA BA BB D (AU)Max.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Electric Actuators

Dimensions [mm] Model L1 L2 A B C D E F G J K 138 LEPS10m-25m 152.5 20 22 30 29 20 29 39 88.2 61.8 LEPS10m-50m 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10Lm-25m 124 138.5 20 22 30 29 20 29 39 88.2 47.8 LEPS10Lm-50m 149 163.5 24 43 34 50 24 50 60 113.2 19 Series LEPY/LEPS Specific Product Precautions 1 Be sure to read before handling.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Technical Data 1219 MY1H Series Auto Switch Mounting Auto Switch Proper Mounting Position Auto Switch Proper Mounting Position (mm) D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AV Auto switch model D-A9 D-A9V A A Bore size A A 25 32 40 81 85 112.5 116.5 133.5 137.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

AW

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MDHR2-20, 30 MDHR2-10, 15 H H L L Auto switches of D-M9NV, D-M9PV and D-M9BV are used. Auto switches of D-M9N, D-M9P and D-M9B are used. Auto switches of D-M9NV, D-M9PV and D-M9BV are used. Max. Protrusion of Auto Switch from Edge of Body: L, H Max.

Intrinsically Safe Valve

53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

CKZ2N

D E E F G 6F7+0.010 +0.022 through F G 20 0.03 10 3 20 0.03 30 0.025 30 0.025 10 H 9 through 30 0.025 30 0.025 I 9 through M6 x 1.0 H I 15 0.03 15 0.03 30 3 25 0.05 R45 50 0.05 6.5 6.5 18 10 10 18 R25 19 R6 R6 R25 19 19 19 NAAMS code A Weight kg (lbs) NAAMS code A Weight kg (lbs) B C D E F G H I B C D E F G H I Part no.