MLGP

6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

MXS

MGC MGF CY1 q B MY1 Normally ON w * Adjust the switch position according to load and speed.

0.01

Dimensions SFD100 different diameters SFD200 different diameters One-touch fitting dimensions(A, B) One-touch fitting dimensions(A, B) Port size q Port size w Port size q Port size w 4 8 4.5 5.5 SMC 6 10 Basic dimension 114.5 Basic dimension 72 5.5 4.5 Fitting dimension A Fitting dimension B Fitting dimension A Fitting dimension B 8 12 5.5 5 Total length 81 (A + 72 + B) 76.5 (72 + A) 81.5

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

Low Friction Cylinders Series MQ

Y F I 4 x N through 0.2 D E M B + Stroke L K 0.2 A + Stroke M E 25, 30, 40 2 x P H effective thread depth C Q Y F 2 x 4 x OB Depth of counterbore RB 2 x 4 x OA effective depth RA J I 4 x N through 0.2 D W E M K B + Stroke L 0.2 A + Stroke M E (mm) Bore size (mm) P Stroke range (mm) RB Note) H OA A B C D E F W I Y J K L M N OB Q RA TN TF 10 39.5 M3 x 0.5 M4 x 0.7 10 to 40 31.5 6 6 ( 5.8)

Series VS

(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN

Wireless System

A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no.) *

SMC Electronic Switch Series Variations

q Supply the vacuum and electrical power source to the unit.

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Vacuum Equipment

capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.

4

Flow-rate Characteristics/Weight Flow-rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Set screw (Unused) r i y d Auto switch mounting bracket u e c Auto switch mounting screw M2.5 x 0.45 x 6 l Switch spacer (For BQ-2) e b Square nut (For BQ-2) w Cylinder q BQ-2 is a set of a, b and c shown above. BQ2-012 is a set of d and e shown above. Cylinder series Applicable bore size (mm) Auto Switch Mounting Bracket Part No.

1

B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal

Fluoropolymer Piping Equipment

" A A 1/4" B B 1/4" B B 3/8" The table of combination is the same as that for A side.

Power Clamp Cylinder

B) Under the above conditions, adjust shim q so that the space between the upper hard stop and the lower hard stop is about 0 mm. Theoretically there is no clamping force to the lower hard stop under this condition. C) In order to generate clamping force from the state described in step B, insert additional shim.

CLQ

3 @0 CNS CLS Section B-B' (Both ends tapped) CLQ MLGP Retraction locking Section B-B' (Through-hole) !4 !7 !8 #3 RLQ MLU ML1C D-X 20With bumper Rod end male thread Data Note) The sectional drawing above shows the locked condition. Component Parts No. q w e r t No. !7 !8 !

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Large Size Vacuum Module: Series ZR

B Bracket B Note) 1 Dimensions for mounting bracket B 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

5 Port Air Operated Valve

e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1