Precision Cylinder Series MTS

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

Vacuum Filter AFJ Series

Note 2) The seal is for 40 m and 80 m elements. 784 Vacuum Filter AFJ20 to AFJ40 Series Dimensions AFJ20 N T J M D U Bracket (Option) S SP R ZCUK C B V Q IN OUT AMJ AFJ AFJ 2 x P (Port size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications

IC

CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

Hand Valve Series VH 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 97(122) 8 92 8 (10) 106(113 ) M8 x 1.25 73 M8 x 1.25 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc 1/4 13.5 4-Rc 1/4, 3/8 VH32-02/03 (Bottom ported) 2 (A) 44 3 (R) 1 (P) 4-Rc 1/4, 3/8 4 (B) 5-8-10 5 Hand Valve Series VH Dimensions: Body Mounted VH40-02 to 04 VH40-06 ( ): Long handle

PSxx-OMU0005CN

ON ON (/ /) 1 OFF OFF DC(+) DC(-) 2 ON DC(+) DC(-) NPN PNP () 3 OFF ( ) () DC(+) DC(-) () 4 -69No.PS-OMU0005CN-C No. 5 () (A/D ) 6 ( ) 10~15 10 -70No.PS-OMU0005CN-C No. 80 mA (Er1,2) () ( ) DC12~24V10% (Er1,2) DC12~24V 10% (Er0,4,6,7,8,9) (Er0,4,6,7,8,9) (Er13) (Er13) No.18 7 "HHH" (HHH) "LLL" (Er3) (LLL) (Er3) 7 F.S.(3.5F.S.) -71No.PS-OMU0005CN-C No.

3M/SMseries

How To Order Manifold Base NvvsFs<2o-H6S(T;-oo. . i r -007 serias vFsooo Manifoldl ;rY't5"r,on" Itanilold spsciticaliols+ : 1010 siations Appllcable itodel:NW5F5-2O R ' Series NVFSOO Construction,/Parts List Sngle Solenoid Symbol 3 Posiiion Cloced Center Main Parts No.

IDX-OM-U010

Do not modify the internal electrical wiring of the product. 10.2 Earth leakage breaker specification Models Item IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R Rated current (A) 10 15 20 30 Sensitivity current (mA) 30 IDFC60/70/80/90 Series 10.1 Safety instructions for use 10-1 IDX-OM-U010 Chapter 10 Option R 10.3 Connection of power supply Connect the power cable according to the procedure

IR1000/2000/3000

Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !

EX500-GPR1A.eng

OUT IN BUS COM A COM B COM C COM D F R P B U S O I R DIA BF SOL RUN GATEWAY UNIT EX500 SERIES 18 19 Switch setting Open the station number switch protective cover and set the switches with a sharp-pointed watchmakers screwdriver etc. NOTE 1. Be sure to turn off the power before setting the switches. 2. Be sure to set these switches before use.

IDX-OM-W094

1 IDFA60/70/80/90 Series 10-2 IDX-OM-W094 R 11 R R (GFCI) 11.1 11.2 IDFA60-23-R IDFA70-23-R IDFA80-23-R IDFA90-23-R (A) 10 15 20 30 (mA) 30 IDFA60/70/80/90 Series 11-1 IDX-OM-W094 R 11.3 M3.5 1.01.3Nm M4.0 1.42.0Nm L N () TEST () [3.2.5 ] L N IDFA60/70/80/90 Series 11-2 IDX-OM-W094 T 12 T T 12.1 12.2 z z AC240V / DC24V 5A() / 2A() DC20V 3mA IDFA60/70/80/90 Series 12-1 IDX-OM-W094

Air Slide Table Series MXQ

Nil S n L Auto switch type Nil Without auto switch Cylinder bore size (stroke mm) Refer to the table below for auto switch part numbers. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil F R Note 2) Standard With buffer With

CDQ2BP series

The indicator light is lit when switch is off for D-P70 and D-P75. Thus, leak current is EXPECTED (D-P70 .. Max. 1 .8 mA, D-P75.. Max. 1.2 mA). This leak current could interfere the micro current control circuit.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA05 10 10 Electronic gear numerator *3. PA06 1 262144 (Position control mode) 5400 Electronic gear denominator *3.

Compact Cylinder High Magnetic Field Design CDQ2BP Series

The indicator light is lit when switch is off for D-P70 and D-P75. Thus, leak current is EXPECTED (D-P70 .. Max. 1 .8 mA, D-P75.. Max. 1.2 mA). This leak current could interfere the micro current control circuit.

High Pressure Coolant Valve

mounting Same as back side 8 locations J B G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

AC Servo Motor Driver (MECHATROLINK-II type)

30 20 10 Parameter *1,*2 Para.

IDX-OM-W095

ADH-E400 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFC60/70/80/90 Series 9-1 IDX-OM-W095 L 9.3 Rc1/225 30 5 IDFC60 2722IDFC70,IDFC80,IDFC90 22 IDFC60 (IDFC70/80/90) 1) 2830Nm 2) 9.4 1 1 IDFC60/70/80/90 Series 9-2 IDX-OM-W095 R 10 R R (GFCI) 10.1 10.2 IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R (A) 10 15 20 30 (mA) 30 IDFC60/70/80/90 Series 10-1 IDX-OM-W095 R 10.3 M3.5