LEH_C

4 4 10 10 PNP PNP 1P 1P 6 6 20 20 AN LECPA () AP AN LECPA NPN NPN 32 8 32 8 PNP AP PNP 40 12 40 12 (m) 8 8 8 8 A A 1.5 1 1.5 1 10 10 ( B B F F 3 3 3 3 15 15 C C 5 5 5 R 20 20 R 5 ( () R R S S / P.42 7.3 <> (NPNPNP) LEHS10K3-4 NPN 6 - 4.3 3 8 2 5 1 4 7 6 1 2 3 4 5 6 7 8 ( DC24V) 7 - 5. 5.1 I/O LEC-CN5-* PLC DC24V 2) CN5 1) CN4 LE-CP-*-* () LE-CP-*S-* () CN3 CN2

0.

VQZ100 VQZ100-S-01(R) (-Q)Note) Note) For AC voltage valves there is no S option. It is already built-in to the rectifier circuit. 01 02 VQZ200 VQZ200-S(-Q) Caution 02 03 VQZ300 VQZ300-S(-Q) Thread type Note) R indicates external pilot type. Except VQZ100, external pilot type and internal pilot type are common.

KQ2

With thread sealant (Male thread only) One-touch fittings Nil None S With thread sealant Note) Port size with sealant: Only R R R R Products color 1 8 1 4 3 8 1 2 Symbol 2 Body White Black Release button Light gray Blue Nil Port size/Applicable tubing O.D. Applicable tubing O.D.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

Large Size Vacuum Module: Series ZR

AC voltage: S is not available for AC.

Air Cylinder CLA Series Fine Lock Model

DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock. O For the D-As'model (with indicator lamp), if used at less than the operating current range, LED will not tum on, but switch will operaie properly. a Never use load exceeding maximum conlact capacity of switch.

Magnetically Coupled Rodless Cylinder

from bottom with CAP bolt Bolt size: MD XB WF FG XA 2-SS (Helical insert thread) Body R S HL Note 1) Note 2) HB FF Note 1) Switch rail FC D Section D-D (mm) A BA BB CC FC FE Note1) FG FH HB Note1) HL L LA LF MD R Note2) S SS WF XA XB FF Note1) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 18 4.5 8 4.4 4.5 7.5 14.5 38.5 35.5 53 17 8.5 M4 4.5 M4 x 0.7 14 6.5 16.5 6.5 4 45 14 62 29 14.5 M3

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

S Couplers

1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1/4 1 1/4 Female thread type Female thread type Body size Port size Part no.

Air Cylinder MGQ Series Compact Guide Cylinder

TYPe d beains 3 tandard s 'qo ' okd ( fYnI ro r r 2.9r 2 3 . 40' I lo , ?

AWG

Orange mark 33 Series AWG20/30/40 Dimensions AWG20 Q Panel fitting dimension G W Bracket (Option) K J U T P R IN OUT V N C M Plate thickness AWG20: Max. 3.5 Set nut (Option) S IN OUT SMC B OUT Port size O S O S Min. clearance for maintenance Drain D H E A AWG30/40 Q G W Bracket (Option) Panel fitting dimension K J U T P R IN OUT V N C M Set nut (Option) S Plate thickness AWG30/40: Max. 3.5

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

58

Nil 3 S n Auto switch Nil Without auto switch Refer to the table below for the applicable auto switch model.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component Parts Material Note No.

Title not found

TYPe d beains 3 tandard s 'qo ' okd ( fYnI ro r r 2.9r 2 3 . 40' I lo , ?

VCW

Grommet: G Conduit: C 2-M 2-M L L K Approx. 300 K Q F D Approx. 280 D Q F C R C G (PF) 1/2 R E B A H E 2-P Port size A H 2-P Port size B DIN connector: D Conduit terminal: T 2-M 2-M L L K Cable 6.8 to 10 K 27.5 F F Q (Q) 34 S 25 U R C R C G (PF) 1/2 (44) E B A H D (S) E G (PF) 1/2 B A H D 2-P Port size 2-P Port size N.C.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.