70pvpump

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button

IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03

IR20-OM00008

PRECI SI ON REGULATOR IR 2 0 0 0 0 2 B G No.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

AMH650 AMH850 3/4B/FF/10K 1B/FF/10K 290 AMH350 80 2B/FF/10K 11/2 B/FF/10K 305 312 AMH450 80 339 AMH550 80 391 AMH650 80 540.5 AMH850 80 Precaution Please refer to p.4.5-7 for with pressure differential gauge (GD40-2-01). 4.6-21

High Speed Pilot Operated

r Light/surge voltage suppressor t 4(A)/2(B) port size Thread piping 01 1/8 U With light/surge voltage suppressor (Non-polar) y Thread type u Made to Order Nil Rc F G N NPT Nil 1 For the connector cable for M8 connectors, refer to the back cover.

Compact Manifold Regulator

SRF 2. Accessories ITV Note 1) Note 2) Symbol None Bracket Pressure gauge Panel nut Panel nut IC Nil B G P BG GP Bracket ITVH Digital pressure switch Pressure gauge ITVX Note 1) In case of a type with bracket, the panel nut is included. Note 2) Pressure display means a pressure gauge or digital pressure switch is attached.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

25

F .G. + 24 V Brown (2 pcs.) + 24 VDC + + + 24 V Power supply 24 VDC 0 V 0 V 0 V DC/DC Blue (2 pcs.) 0 V F .G.

VQ5000

Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5650 1-G H 2 position double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

Compact

E _ 6 9 " . q l 1 2 3 4 5 Load (kgl 6 7 8 I IE tleunic Auuat I||oilelSdodi||g trlollloil Criteria of Accelerating Speed (Horizontal Orientation) LXSH5BC .of /.

NVKF

Stations Applicable blank plate ass'y vK300-42-1A Dimuuiun $uies t{U|ff30 Body Ported Grommet (G): NVKF332-"G-M5 inch (mm) Base Mounted Grommet (G) : NVKF334rG-01 T inch (mm) =1 1 .81 (=3001 lld wi'e hQt') Ssis ilUff300 Dimsui Body Ported (Top Ported) lType 20 Manifold NVV3KF3-20-Stations-007 inch(mm L: Dimensions 19 20 14.84 15.59 (377) 't3.78 r4.53115.28 (350) (36s) (388) ( 1 r 1 ) ( 1

ZSE2/ISE2

) Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 48.5 41 39 39 IS 3.5 3.5 ZSM 8.5 8.5 PF2 13 2-3.5 Mounting hole 2-3.5 Mounting hole Piping port M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 13 01: R 1/8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IF Data

MGG

[White] Blue [Black] Black [White] Switch 1 Load Switch 1 Switch 1 Relay Load Relay contact Blue [Black] Blue [Black] Brown [Red] Brown [Red] Brown [Red] Relay Black [White] Black [White] Blue [Black] Black [White] Switch 2 Switch 2 Switch 2 Blue [Black] Blue [Black] The indicator lights will light up when both switches are turned ON. 2-wire with 2 switch AND connection 2-wire with 2 switch

3 Way Direct Acting NVKF 300 Series

Stations Applicable blank plate ass'y vK300-42-1A Dimuuiun $uies t{U|ff30 Body Ported Grommet (G): NVKF332-"G-M5 inch (mm) Base Mounted Grommet (G) : NVKF334rG-01 T inch (mm) =1 1 .81 (=3001 lld wi'e hQt') Ssis ilUff300 Dimsui Body Ported (Top Ported) lType 20 Manifold NVV3KF3-20-Stations-007 inch(mm L: Dimensions 19 20 14.84 15.59 (377) 't3.78 r4.53115.28 (350) (36s) (388) ( 1 r 1 ) (

Compact Cylinder with Solenoid Valve/

Auto switch model D-M9(V), M9W(V), A9(V) Port aperture Bore size (mm) A (Mounting groove number) B (Mounting groove number) C (Mounting groove number) D (Mounting groove number) A (2) (2) (2) 32 D B (2) (2) (2) 40 Diagram seen from the piston rod 50 (2) (2) (2) C 63 (2) (2) (2) Operating Range Auto Switch Mounting Auto switch model Bore size (mm) 32 40 50 63 D-M9, D-M9V D-M9W

Soft Start-up Valve

How to Order Pilot Valve Assembly AV 0 B 1 2 G q w e r t A Symbol Description q Applicable model 2 AV2000-A, AV3000-A 4 AV4000-A, AV5000-A + 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC]*1 4 220 VAC [230 VAC]*1 AC (50/60 Hz) w Rated coil voltage DC 5 24 VDC 6 12 VDC + G Grommet (Lead wire length: 300 mm) D Type D (DIN terminal/With connector) Y Type Y (DIN terminal/With connector)*2 DO Type D (

Booster Regulator Series VBA1110 to 4200 1

Accessory (Option) /Part No. 0.2 to 1.0 MPa VEX Model VBA2200 Ambient and fluid temperature 2 to 50C (No freezing) VBA1110-1 VBA4100 VBA2100 VBA4200 Description AMR G27-20-R1 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the?miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.