Clean Regulator

: 0.55 MPa, Fluid: Air 0.5 r Outlet pressure MPa 0.4 0.3 OUT IN 0.2 33 0.1 2 x Rc 3/4 to 1 0.0 t e y q 0 1000 2000 3000 4000 Flow rate L/min (ANR) Component parts Material No.

70pvvna

170 28.3 33.3 LVH Port size 32A, 40A, 50A LVD LVQ Applicable cable O.D. 6 to 8 (D, DL) LQ LVN K (Terminal with indicator light: DL) TI/ TIL Manual override (Non-locking) Pilot port L (Conduit terminal: T) PA J (DIN terminal: D) I (Conduit: C) H (Grommet: G) PAX G (Air operated) PB Main port Main port Rc Pilot port Rc A B C D E F G H I J K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1

Return Filter FH100 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM FH FH HOW Model/Rated Flow Rate Model Port size (Rc) Rated flow rate (L/min) Micromesh Paper FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 60 50 1 100 80 1 1/4 150 120 1 1/2 200 160 2 300 260 2 1/2 550 450 3 700 600 Description Part no.

Ionizer Nozzle type IZN10 Series IZS

MPa 1 1 0.7 MPa 0 0 200 300 100 400 500 0 500 0 400 200 100 300 Installation distance [mm] Installation distance [mm] Flow Rate Characteristics Fig. 1: Flow rate characteristics measuring circuit q Energy saving static neutralization nozzle with right angles: IZN10-01-X367 wHigh flow rate nozzle with right angles: IZN10-02-X367 Pressure gauge 0.7 Flow meter Energy saving static neutralization

PSxx-OMP0001E

Lead wire length Output specification CE-compliant 10 For positive pressure 3 m L Wetted part material Sensor part: Silicon, Body part: PBT, O-ring: HNBR Nil No For vacuum and residual puressure 11 Q CE-compliant Piping specification For vacuum 12 R06 6 reducer URL http://www.smcworld.com R07 1/4 reducer Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 Step Motor (Servo/24 VDC) 15 (5.5) (6.3) Actuator

Guide Table Series MGF ø40, ø63, ø100 1

Rc 1/8 relief port Port for extending cylinder Port for retracting cylinder 8-23-8 9 Guide Table Series MGF Construction @2 !2 y u !3 e q t r o w @0 !1 !7 !8 !9 !5 !6 !0 MX i MTS @4 MY CY MG @1 !

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 100VAC 50/60HZ, Electrical Entry: Grommet / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 100VAC 50/60HZ, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 1 (100VAC 50/60HZ), Electrical Entry: W (Grommet / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 1 (100VAC 50/60HZ), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)

Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Manual Override: Non-locking Push Style, Port Size: M5 Thread, Model: PR (Single Unit Type), Option: F (With bracket), CE Compliant: Q (CE Marked)

Function: Standard (0.35W DC, AC), Coil Voltage: 6 (12VDC), Lead Wire: LO (L Plug w/o Connector), Manual Override: Non-locking Push Style, Port Size: M5 Thread, Model: PR (Single Unit Type), Option: F (With bracket), CE Compliant: Q (CE Marked)

Nozzle Type Ionizer

Fixed mounting Pivot mounting DIN rail mounting bracket IZN10-B3 Single unit Manifold*1 *1 The L-bracket and the DIN rail mounting bracket can be used with the manifold.

ALF400 to 900, ALT-5/-9

VE 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 VY1 G Dimensions: Auto Feed Tank PPA AL Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b Width across flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L

Peltier-type Chiller Thermo-con/ Compact Type

(Cl) [mg/L] 0.3 or less p Free carbon (CO2) [mg/L] 4.0 or less p Reference item *1 In the case of [MWNcm], it will be 0.003 to 0.01.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

B * s e i r e S F L A N r o t a c i r b u L d e e F o t u A l e d o M 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N e z i s e p i P 8 / 1 8 / 3 2 / 1 4 / 3 4 / 3 1 1 4 / 1 1 2 / 1 1 2 m f c s p i r d l i o r o f w o l f . n i M 2 . 2 5 . 3 2 . 4 2 . 4 6 . 6 7 . 7 1 . 6 1 3 2 3 6 ) f g k ( s b l t h g i e W ) 5 8 . 0 ( 7 8 . 1 ) 8 8 . 0 ( 4 9 .

Oil Filter FH150 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM Model Port size (Rc) Rated flow rate (L/min) Model/Rated Flow Rate FH FH FH150-02 FH150-03 FH150-04 5 1/4 HOW 10 3/8 20 1/2 Description Part no.