XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT Min. port size Weight (g) A D1 D2 L M Model Applicable tubing Nylon Urethane KSH03-34S KSH03-32 9 14 17 23 23 29 55 63 8 10-32 UNF 36.5 37.6 38.6 42 43.1 46.5 53.5 53.9 33 34.5 35.5 36.5 40 41 48 48.5 16 2.5 5 32 10.4 4.0 4.0 12 1 8 12.7 KSH07-34S 14.29 17 1 8 1 4 13.4 10.4 4 13.2 1 4 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5

Electric Actuators

mount specification Series LG1 100W 1 5 0.1 500 Slide screw [Tamagawa Seiki Co., Ltd.] 100W 0.02 Ground ball screw Non-standard motor 500 High rigidity direct acting Without Matsushita Electric 100W 0.05 Rolled ball screw brake Industrial Co., Ltd.

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 13.33796 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 23.58946 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 10.05858 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 19.37475 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 16.53466 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 16.53466 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 11.90496 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 19.84160 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 19.84160 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, VQ5000, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 6.90809 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, DEVICE NET. VALVE. VV5Q51/55 BASE MT 1/2. 10.05858 lb. RP.

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, DEVICE NET. VALVE. VV5Q51/55 BASE MT 1/2. 23.58946 lb. RP.

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, DEVICE NET. VALVE. VV5Q51/55 BASE MT 1/2. 11.61836 lb. RP.

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, DEVICE NET. VALVE. VV5Q51/55 BASE MT 1/2. 19.37475 lb. RP.

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, DEVICE NET. VALVE. VV5Q51/55 BASE MT 1/2. 10.05858 lb. RP.

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, MFLD, PLUG-IN, VQ5000, VALVE, VV5Q51/55 MANIFOLD, RM, VV5Q51/55 BASE MT 1/2, 9.66691 lb