Exhaust Cleaner for Clean Rooms AMP Series 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5
Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.
/OTHER), .62322 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .62322 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .66138 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .52359 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .60627 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .50104 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .62322 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .33069 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .44092 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .62322 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .44092 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .62322 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .62322 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .62322 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .62322 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .62322 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
/OTHER), .62322 lb, ModelApplicable flow rate sensorFlow rate measurement range Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output
Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1)Note 1)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 2)Sensor input--Output Note 3)specificationsHysteresisResponse time Note 4)Linearity Note 4)Repeatability