CV/MVGQ

TZ N 20 25 32 40 8 10 32 41 32 8 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 36 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 9 10 40 45 40 10 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 40 9 10 40 45 40 12 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 40 10 11 53 50 53 14 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 44.5 M14 x 1.5 Dimensions

CV/MVGQ

32 41 32 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 C J G5-S 10 9 10 40 45 40 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 9 10 40 45 40 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 CV 14 10 11 53 50 53 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 Dimensions by Stroke Single Acting

Air Cylinder Series CA2

15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 1/4 3/8 3/8 1/2 1/2 CS2 50 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 63 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 14 M18 x 1.5 31 80 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 17 M22 x 1.5 37 100 Up to 750 20 to 750 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 17

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

10 8 10 8 KK 23 18.5 1/8" D (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L1: Nut material PVDF dimensions 21 25 5 22.5 19.5 18 47.5 44.5 24 21.5 9 1/4" MS 25.5 25 3/8" 21.5 23.5 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" LQ 12 24 29 25 6 24 22 20 52.5 50.5 26 10 29.5 30 MQR 25 30.5 19 32 37 29.5 35.5 7 26.5 24 28 64 61.5 14 T 36 37 29.5 41 25 41 49

CM2

8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66 5 7 24 16 45 52 14 88 21 22 41 47.3 8 10 46.5 7 M14

CA2

10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 16 19 23 28 36 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 8 11 11 13 16 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 6-8-36 37 Series CA2Q Air

XL

-6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

High Vacuum Angle Valve, XL Series

In the case of oxygen at room temperature and 10-6Torr, one atomic layer impinges in a few seconds. O After a few seconds at 10-6Torr 41

SMC Pneumatic Clean Series

32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5 32-0.039 0 21 82 36 10 8 M32 x 2 21.5 41.5 19 Air cylinder CM2 2122CM2/ 101110112122Head side flange style (G) / CM2G, CM2G With rubber bumper Standard

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

Table of Contents

Weight (g) Model End boss type (Symbol) M K E W MHZ2-10 65 66 65 64 MHZ2-16 147 148 148 147 MHZ2-20 277 277 277 277 MHZ2-25 494 496 495 495 12-2-41 41 Parallel Style Air Gripper With Dust Cover Series MHZJ2 Size: 6, 10, 16, 20, 25 How to Order MHZJ2 16 F9BW D Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Bore size Auto switch Action 6 10 16 20 25 6 mm 10 mm 16 mm

NCQ2/CQ2

Basic Style CQ2 NCQ2 CQ2 NCQ2 A B Bore size (mm) 5 st 36.5 39 41 42.5 H1 C C F K M D S V E H L N O U 10 st 38 40.5 41.5 42.5 5 st 33 35.5 36.5 37.5 10 st 41.5 44 46 47.5 inch 12 16 20 25 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6 8 7 12 5.4 5.4 7 10 6 8 10 12 32 38 47 52 6.5 5.5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 5 6 8 10 3.5 3.5 4.5 5 22 28 36 40 3.5 3.5 5.5 5.5 6.5 depth 3.5 6.5 depth

CM2

8 32 41 32 52 20 36 20 33.5 M10 X 1.25 19.5 17 32 6 M26 X 1.5 15 5.5 30 10 22 9 13 10 8 40 45 40 60 25 40 26 34.5 37.5 M10 X 1.25 19.5 17 32 6 M26 X 1.5 15 5.5 12 22 9 13 10 8 40 45 40 60 32 40 26 21 M14 X 1.5 21.5 M32 X 2 44.5 42.5 46.5 22 41 8 7 14 24 10 16 11 11 53 50 53 77 40 32 Dimensions by stroke Boss-cut Built-in One-touch fitting (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

ISO Standard Hydraulic Cylinder

40 16 8 3/8 58 D50 25 to 800 65 65 9 86 105 69 M8 x 1 9 M20 x 1.5 36.5 28.5 50 15 28 28 24 24 25 42 10 50 16 11 3/8 58 63 25 to 800 77 77 9 98 118 84 M8 x 1 9 M27 x 2 36 33 58 19 36 36 30 21 32 50 10 56 18 13 1/2 66 80 25 to 800 96 96 11 119 143 96 10.5 M33 x 2 41 32 M10 x 1.25 75 13 45 45 41 26 41 60 16 70 17 17 1/2 74 100 25 to 1000 115 115 13.5 138 162 113 14.5 M42 x 2 42 42 M14 x 1.5

JA/JAH/JB/JS

10 12 12 12 16 16 20 24 27 27 33 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 8 9 9 13 13 13 15 15 18 24 24 24 42 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16

JA/JAH/JB/JS

0.8 1 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 8 10 14 14 45 55 12 12 16 16 21 24 31 41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000 54000 71000 0.01 0.01 0.02 0.02 0.05

Floating Joint

JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 3 4.5 5 6 8.5 10 16 21 17 20 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 0.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

8 10 18 22 28 32 5 5 8 10 10 14 18 22 +0.048 0 5 IY-G012 +0.4 +0.2 0.2 0.4 12 28 11 8.1 10 16.6 12 6.5 IY-J015 +0.048 0 +0.2 0 +0.048 0 0.1 0.3 16 34 8.5 10.3 11.5 21 16 8 IY-G02 +0.058 0 +0.4 +0.2 +0.058 0 0.2 0.4 20 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 41 10.5 12.8 14 25.6 20 10 IY-G03 +0.058 0 +0.4 +0.2 +0.058 0 0.2 0.4 M10 x 1.25 M14 x 1.5 M18 x 1.5 42 16 22 12 14 41.6

Air Slide Table

10 18 12 27 49 40 400 113 10 10 19 16 35 62 50 670 201 16 16 33 20 43 72 60 1,100 314 21 21 49 25 52 88 70 1,900 491 41 41 82 Double-ported type (MXQA) 6 20 34 32 230 29 10 10 18 8 23 42 40 330 51 10 10 19 12 30 52 50 580 113 16 16 33 16 37 70 60 920 201 21 21 49 20 46 80 70 1,600 314 41 41 82 Low thrust with high rigidity type (MXQB) For applications which require more guide rigidity than