The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available, SYJ 5 port valve manifold, 4/5 PORT SOLENOID VALVE, VVD, 215 lb

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

CRQ2

, 15, 20, 30, 40 10, 15 10, 15 20, 30, 40 Chart 5.

MHZ2/MHZJ2

M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 5 5 8 8 10 10 12 12 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.5 0 +2.5 0 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Refer to pages 4 through 7 for the standard type dimensions, which are the same except for those shown above. 32 Series MHZ2/MHZJ2 Model Selection Method Model Selection Selection procedure Confirm gripping

SMC Pneumatic Clean Series

6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18 18 22 26 90 90 108 108 20 20 25

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 V.

CE

-12-8 P . 10-12-30 P . 10-12-18 P . 10-12-27 10-12-1 2 Achieve rationalization of production lines with position feedback Stroke reading cylinder Measurement is possible throughout the full stroke range.

CE

-12-8 P . 10-12-30 P . 10-12-18 P . 10-12-27 10-12-1 2 Achieve rationalization of production lines with position feedback Stroke reading cylinder Measurement is possible throughout the full stroke range.

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Area: (800) 258-9200-www.stevenengineering.com 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20

NCQ8

Green LED lights up Indicator light Lead wires Oilproof vinyl heavyduty cord, 0.11" (2.7mm), 20" (0.5m) 2.3x 10-4in2 (0.15mm2) x 3 cores (Brown, Black, Blue) 2.8x 10-4in2 (0.18mm2) x 2 cores (Brown, Blue) Note 1) Refer to page 50 for auto switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

Slider Type/Ball Bushing Bearing

5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

Vacuum Unit

6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

42

Description Material Q'ty VFR VVQ5000-80A-1 Gasket HNBR 10 Type VVQ5000-80A-2 Gasket HNBR 10 Option VQ7 A For 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5 27 32 32 37 37 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 10 (12) 10 (12) 10 (12) 10 (13) 12 (14) 12 (14) 16

JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.