REA/REB

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

REA/REB

driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC

CHKD/CHKG

11.5 11.5 16 17 D-A9/A9V D-Z7/Z80 12 11 9.5 11 12 14 16 20 Since this is a guideline including hysteresis, not meant to be guaranteed.

Compact 5-Port Solenoid Valve

(Red) Supply valve 2 40 5 1 3 5 7 9 11 13 15 17 19 21 23 25 27 29 31 33 35 37 39 41 Station 1: Black, Supply valve Release valve 1 2 3 4 5 6 7 8 9 10 Black White Black White Black White Black White Black White Black White Black White Black White Station 1 2 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 Station 1: White, Release valve Station 2: Black, Supply valve Supply valve Station

High Purity Fluoropolymer

Model L H E M N C B 4 6 LQ2E22 LQ2E21 B (E) 4 6 19 18 34.5 19.9 (L) 10 LQ2E52 LQ2E51 LQ2E42 LQ2E41 LQ2E33 LQ2E32 LQ2E31 43 5 6 8 9 22 24 26.2 C (M) SMC 52 42.5 12 19 10 12 C (E) H 6 11 28 30 33.1 21 59.5 51 (L) Class 2, 3 7 14 32 36 40 26 58.5 Inch sizes (M) N Applicable tubing O.D.

ZPT/ZPX

90 P. 13-11-93 to 94 Buffer stroke Pad dia. 40 50 63 80 100 125 Buffer stroke (mm) 25 50 75 100 Pad Material and Characteristics : Little or no influence : Can be used depending on conditions.

CG5-S

6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 40 10 24 to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

20 3 +10 0 30 +7 +20 50 +52 +40 +25 13-11-116

CJ5-S

6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 Up to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38

CJ5-S

6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 Up to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38

RQ

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stroke range (mm) Bore size (mm) FD FT FV FX FZ L L1 M A B RQ 63 9 9 80 92 108 18 43.5 60 30 to 100 73 55 M FV MU 80 11 11 99 116 134 20 53.5 77 40 to 100 83.5 63.5 100 11 11 117 136 154 22 53.5 94 40 to 100 98 76 D4-FD FT L FX FZ B + Stroke -X A

MRHQ

adversely affecting the gripper's life. 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L mm MRHQ25 MRHQ25 120 100 Pressure 0.2MPa 100 Pressure 0.2MPa 80 Overhang H mm Overhang H mm 80 60 0.3MPa 0.5MPa 0.6MPa 0.7MPa 60 0.7MPa 0.4MPa 0.3MPa 0.4MPa 40 0.5MPa 40 0.6MPa 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 12-11-7 8 Series MRHQ

Table of Contents

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

HRX-OM-S004

. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100/150-W-20/40/46. 8-11 8.4 Cooling

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

(Default settings) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Response Time Response time (ms) (at the pressure of 0.5 MPa) Actuation type 10-SV2000 25 or less 17 or less 29 or less 33 or less 10-SV3000 28 or less 26 or less 32 or less 10-SV4000 40 or less 40 or less 82 or less 10-SV1000 11 or less 10 or less 18 or less

C95Series

I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating

C76

138.5 83 88 83.5 88.5 58 63 58.5 63.5 108 113 108.5 113.5 D-C7/C80 D-C73C/C80C NCA D-J79C 8.5 (33.5) D-A73 D-A80 13.5 (38.5) DD-A72/A7H/A80H D-A73C/A80C D-F7/F7W D-J79/J79W D-F7WV D-J79C D-F7BAL, D-F79F 32 84 59 9 (34) 8 109 -X 40 139 89 64 14 (39) 13 114 2032 40 32 40 136 81 86 82 87 56 61 57 62 6 (31) 11 (36) 7 (32) 12 (37) 5 10 6 11 106 111 107 112 D-A79WL Data D-H7/H7C /H7W D-H7BAL

C76

32 40 138 138.5 83 88 83.5 88.5 58 63 58.5 63.5 108 113 108.5 113.5 D-C7/C80 D-C73C/C80C NCA D-J79C 8.5 (33.5) D-A73 D-A80 13.5 (38.5) DD-A72/A7H/A80H D-A73C/A80C D-F7/F7W D-J79/J79W D-F7WV D-J79C D-F7BAL, D-F79F 32 84 59 9 (34) 8 109 -X 40 139 89 64 14 (39) 13 114 2032 40 32 40 136 81 86 82 87 56 61 57 62 6 (31) 11 (36) 7 (32) 12 (37) 5 10 6 11 106 111 107 112 D-A79WL Data D-H7/H7C

A

122 38 40 30 27 22 5.4 8.4 40 2.3 40 NAL3000 53 142 38 53 41 40 23 6.5 8 53 2.3 56 NAL4000 70 177 41 70 50 54 26 8.5 10.5 70 2.3 73 NAL5000 90 254 45 90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

HRX-OM-Q026

/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250-W-20/40. 8-17 8.5 Pump Capacity