Compact Cylinder Mass Unit: g Auto Switch Internal Circuit D-M9NA(V) D-M9NA(V) 8 D-M9PA(V) 8 D-M9BA(V) 7 Auto switch model 0.5 DC (+) Brown 14 14 13 1 Lead wire length (m) Switch main circuit Switch main circuit Switch main circuit OUT Black 41 41 38 3 68 68 63 5 Dimensions Unit: mm DC () Blue D-M9A M2.5 x 4 l D-M9PA(V) Slotted set screw Indicator light DC (+) Brown SMC 4 OUT Black 2.8 2.7 24 0.2 3 3.2 DC
Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-
11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and option part numbers under the manifold base
Note 2) Except double (latching). 2-4-17 L VQ1000 Kit (Lead wire cable) D side U side Stations 1 2 3 It is the standard type which lead wire is extracted directly. Maximum stations are 16.
Contents Guide body White anodized Aluminum alloy 20 25 32 40 CG1N20-PS CG1N25-PS CG1N32-PS CG1N40-PS Small flange For front mounting flange style For basic style Rolled steel Nickel plated 16 Large flange Set of nos. above #8, #9, $0. 17 18 Front plate Nickel plated Platinum silver Rolled steel Rear plate Cast iron Seal kit includes #8 to $0.
(Recommended tightening torque178 to 185Nm) Gasket (1) CH1 particle filter Fig. 3-17 CH1 side Installation of particle filter HRL Series 3.3 Installation 3-33 HRX-OM-X037 Chapter 3 Transport and Setting Up 3. Attach the CH1 filter bracket.
Alarms that allow continuous pump operation are shown in Table 5.4-17 Alarms that allow continuous pump operation (1/2) and Table 5.4-18 Alarms that allow continuous pump operation (2/2).
MB1 Made to Order Specifications (For details, refer to page 6-17-1.)
11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27
MB1 Made to Order Specifications (For details, refer to page 6-17-1.)
Specifications 41 Specifications 41 Dimensions 42 Output Unit Summary of Product Parts 43 Mounting and Installation 44 Installation 44 Wiring 45 Specifications 48 Specifications 48 Dimensions 48 -1No.EX-OMI0032-G Input Unit Summary of Product Parts 49 Mounting and Installation 50 Installation 50 Wiring 52 Specifications 56 Specifications 56 Dimensions 56 Maintenance 57 Troubleshooting 58
17 37 37 The value of W in the table means the amount of auto switch protrusion from the body end surface.
Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71
17 11-4 IDFB Series 11 2 IDX-OM-W020 11 T IDFB15E PE 1 2 3 : 0.25inch (6.5mm) : 0.002inch 2 (1.25mm 2) 0.003inch 2 (2mm 2) : 0.0008inch 2 (0.5 mm 2)o 0.003inch 2 17 17 11-5 IDFB4E 11E-11-T R V 11-5 IDFB Series 11 3 IDX-OM-W020 11 T IDFB15E-11-T R V CM FM15 OLR C1 ILS PRS PTC PTC r TB12 MC RY TDR GFCI EDV 11-5 IDFB Series 11 4 IDX-OM-W020 12 V 12 V V 12
Following items can be set onContinuous pump operation setting screen: Pump operation sustainable temperature Pump operation sustainable time (1) (2) Setting for continuous pump operation Table 5.4-17 Settings for continuous pump operation No.
Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] Auto switch model Auto switch model D-M9m(V) D-M9mW(V) D-M9mA(V) D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV Bore size Bore size A B 20 4 8.5 25 4.5 9 32 4.5 9.5 40 7 12 Hs1 Hs2 Hs1, Hs2 Hs1 Hs2 20 16.5 17 17 23 17 25 19 19.5 19.5 25.5 19.5 32 22.5 23 23 29 23 40 26.5 27 27 32.5 27 * Adjust the auto switch after confirming
) () () () () () () 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Release valve Supply valve Supply valve 1 1 2 2 stations Release valve 2 stations Release valve 14 Supply valve 2 Supply valve 3 4 3 stations 15 Release valve 3 stations Release valve 3 5 6 Supply valve Supply valve 16 4 stations Release valve 4 stations Release valve 4 7 8 Supply valve 17 Supply valve 5 5
68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 CRB2 90 180 90 180 90 180 90 180 90 180 12 63 3 10 CRBU2 69 (32) 9 52 3 15 A CRB1 56 (25) 9 41 4 B 20 MSU 43 (20) 7 32 3 30 CRJ 36 (17) Operating range at proper mounting position (Lm/2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588
Table 5.19-9 List of set value Set value Explanation Initial value (Default setting) Setting/checking are not available unless the serial protocol setting is simple communication protocol. 1200bps 2400bps 4800bps 9600bps 19200bps BCC (simple communication protocol) Setting/checking 17. Press the [SEL] key once.
Single acting type, Normally closed Double acting Single acting Basic type Side ported Nil E K H M D20Axial ported 12-2-17 17 Series MHZA2-6/MHZAJ2-6 Construction: Standard Type MHZA2-6 Double acting/With fingers open Single acting/Normally open e o @4 @1 i !1 w !2 !4 !0 !5 !6 !7 t r !3 u q @3 @2 Single acting/Normally closed !8 !