Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit Wiring 17 Setting and Adjustment 18 LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting and Installation 41 Wiring 41 LED
Operation 32 C96N32-PS 17 Rod seal 1 pc 40 Rod seal 1 pc 41 Piston seal 1 pc 42 Large cushion seal 2 pcs 43 Small cushion seal 1 pcs 45 Cylinder tube gasket 2 pcs 40 C96N40-PS 50 C96N50-PS 63 C96N63-PS 80 C96N80-PS 100 C96N100-PS Lock part is replaced as an entire unit. The seal kit for replacement contains the rod seal for the cylinder and lock.
JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23
17 17 1 1 1 1 4 4 4 in seal kit 17 17 17 17 18 18 18 4 4 4 4 4 4 4 18 18 18 18 27 27 27 4 4 4 4 2 2 2 27 27 27 27 29 29 29 2 2 2 2 4 4 4 A grease pack (10 g) is included.
13.2 52.2 7.1 1/4 34.5 29.5 20.1 15.5 6 11 48.5 6.3 33.7 28.7 12.4 16.5 11.4 52.2 6.2 3/16 34.6 29.6 24 AS2051F 14.8 15.5 6 11 50.7 6 34.4 29.4 19.4 14.8 17 13.2 54.4 7.1 NAS2051F 1/4 35.5 30.5 25.1 18 8 15.2 59.8 8.1 36.5 31.5 30.3 18 15.2 59.8 8.1 5/16 36.5 31.5 30.3 17 6 13.2 59 7.4 38.3 33.3 40.8 17 13.2 59 7.4 1/4 38.3 33.3 41.2 AS3001F 19.8 18 8 15.2 64.4 8.2 39.1 34.1 45.5 19.8 18
Weight [g] D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.The auto switch may be damaged if a screw other than the one supplied is used. 5 68 68 63 How to Order D-M9 N Auto Switch Internal Circuit D-M9N(V) Series Lead wire length Nil M L Z 0.5
D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+
6 25.5 26.5 1 8 1 4 17 23 23 29 38 56 64 82 76 93 14 8.6 8.6 4 K 26 26.5 29.5 31 34 35 38 36.5 39.5 30 31 32 37.5 38 39.5 40.5 42 1 8
33 41 44 52 60 68 73 1 2 3 4 1 17-3-66 7 Series VXZ22/23 Pilot Operated 2 Port Solenoid Valve For Zero Pressure Differential Operation The VX series will be revised shortly.
Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.
, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?
Porl llurnber Illodel (Rell t( IH 5A 5t lolt Sire vvr. (02,1 S;l Va-l2 4f2940056 (tRl0EM74 34 .50 2.25 1.63 5.0 sJ2th-12 M4E30r0056 {tR)otMl r ,41 .or 3.50 2.15 3h 20.0 5t[42x1.5 42940056 (rR)0E l.5 .34 .50 2.25 l-63 146 5.0 5tllt6dx2 M43010056 (tRl0tM2.0li{ .41 . n l 3.50 2.7 5 Yg 20.0 Sfll85x2 M{33300560 3.0fi .53 4.00 w 24.0 Sfiltl | 5x2 M437?
N.O. 24 VDC 12 VDC Type 41 Type 20 SYJ700 L type plug connector Non-locking push type With light and surge voltage suppressor N.C.
Mass Unit: g Auto Switch Internal Circuit D-M9NA(V) D-M9NA(V) 8 D-M9PA(V) 8 D-M9BA(V) 7 Auto switch model 0.5 DC (+) Brown 14 14 13 1 Lead wire length (m) Switch main circuit Switch main circuit Switch main circuit OUT Black 41 41 38 3 68 68 63 5 Dimensions Unit: mm DC () Blue D-M9A M2.5 x 4 l D-M9PA(V) Slotted set screw Indicator light DC (+) Brown SMC 4 OUT Black 2.8 2.7 24 0.2 3 3.2 DC
Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-
11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and option part numbers under the manifold base
Contents Guide body White anodized Aluminum alloy 20 25 32 40 CG1N20-PS CG1N25-PS CG1N32-PS CG1N40-PS Small flange For front mounting flange style For basic style Rolled steel Nickel plated 16 Large flange Set of nos. above #8, #9, $0. 17 18 Front plate Nickel plated Platinum silver Rolled steel Rear plate Cast iron Seal kit includes #8 to $0.
(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations
(Recommended tightening torque178 to 185Nm) Gasket (1) CH1 particle filter Fig. 3-17 CH1 side Installation of particle filter HRL Series 3.3 Installation 3-33 HRX-OM-X037 Chapter 3 Transport and Setting Up 3. Attach the CH1 filter bracket.
Alarms that allow continuous pump operation are shown in Table 5.4-17 Alarms that allow continuous pump operation (1/2) and Table 5.4-18 Alarms that allow continuous pump operation (2/2).