VHK H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2
VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 1 27 22 26 41 3.5 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4
3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.016 +0.008 075(3/4") 075(3/4") #10-32UNF #10-32UNF 5/16 0.31 5/16 0.31 +0.002 0 +0.020 +0.012 106(1 1/16") 106(1 1/16") 5/16-24UNF 5/16-24UNF 3/8 0.71 3/8 0.71 +0.002 0 +0.020 +0.012 150(1 1/2") 150(1 1/2") 3/8-24UNF 3/8-24UNF 3/8 0.71 3/8 0.71 +0.002 0 +0.020 +0.012 1/2-20UNF 1/2-20UNF 1/2 0.87 1/2 0.87 200(2"), 250(
50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc(PT) 1/8 57.5 30 14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25
Parameter list for each mode . 15 4.1 Parameters common to each mode . 16 4.2 Position control mode . 16 4.3 Speed control mode . 16 4.4 Torque control mode . 17 5.
.16 stations 16 Note) 16 stations With DIN rail bracket (Without DIN rail) Note 1) Refer to page 419 for details.
Symbol 2 to 8 10 to 16 20 to 32 40, 50 02 04 06 08 10 13 16 20 25 32 40 50 Suffix 2 4 6 8 10 13 16 20 25 32 40 50 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 B4 M4 x 0.7 Female thread Applicable cylinder model Symbol M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Nil ZC(D)UK 16 to 32 M10 x 1.25 B10 Material Note) -X11 pad: 2 to 8 diameter and flat style
80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20 66 86 47 40 60
6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16
After assembly is completed, perform an operation test and check that there is no air leakage. 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 Direction of the shaft(key) 39 Fig. (19) Direction of assembly of the shaft 46 - Troubleshooting Refere nce Problem Possible cause Solution page 16 Supply pressure isnt applied correctly.
Noise reduction: 19 dB(A) BC Sintered Body Type Series AN Noise reduction: 13, 16, 18, 21 dB(A) High Noise Reduction Type Series AN02 Uses a flame resistant material for the case.
AS321F-N02-09SD AS321F-02-12SD NPT 1/4 19 23 9.8 1.2 49.3 5/16" 15.2 29.5 41 18.5 44.3 32.8 22 12 20.9 82 76 21.3 54.8 AS321F-N02-11SD AS321F-03-06SD 3/8" 17.9 31.8 43.3 21 39.3 27.8 17 6 12.8 77 80 AS321F-N03-07SD AS321F-03-08SD 1/4" 13.2 27.8 39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41
) (PF3W511 ) (M54 ) 2 mm (41) -17No.PF-OMN0009CN-F (PF3W504/520/540 ) ,(3.0,4 ) 8 0.50.7 Nm (41) , , 4 (PF3W511/521 ,(4.0,4 ) 1.01.2 Nm (41) ,, 4 -18No.PF-OMN0009CN-F () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm -19No.PF-OMN0009CN-F PVC PVC PVC PVC
Y-G02 Y-MU03 A1 8.5 12 L1 25 31 E1 18 L1 25 31 MM M8 x 1.25 M12 x 1.25 NDH10 8 10 MM M8 x 1.25 M12 x 1.25 E1 16 18 A1 8.5 12 Size 20, 25 32, 40 Size 20, 25 32, 40 +0.058 0 +0.058 0 NL 9 10 R1 10.3 4 NZ 16 22 NX 8 11 NO 20.5 24 U1 11.5 14 R1 10.3 10 NX 8 11 NO 20.5 24 U1 11.5 14 NDH10 NL 9 10 Part no. I-G02 I-MU03 Part no.
17.8 20.4 10 14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44
K 30 41 50 A 3 4 5 Applicable model ACG20 ACG30 ACG40 Part no.
16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 ZZ 132 132 132 142 160 193 250 278 306 13-/22-MXQ20L10 13-/22-MXQ20L20 13-/22-MXQ20L30 13-/22-MXQ20L40 13-/22-MXQ20L50 13-/22-MXQ20L75 13-/22-MXQ20L-100 13-/22-MXQ20L-125 13
, 1/8" 4, 5/32" 6, 1/4" 38.4 13.8 6 10 2 A 16 4.3 2 x 3.2 (For mounting) + 24.3 Manual override (Lead wire length) 29.9 Approx. 300 53.8 1.2 C6: 29.1 N7: 32.9 (3.2) With bracket Note) For bracket assembly part no., refer to page 16. 19.5 16.3 13.6 7 2 x 3.4 (For mounting) 41 VQZ115l-lGl1-M5-PR M5 x 0.8 (X: External pilot port)
no.) 20 A1 B1 Produced upon receipt of order (Robotic cable only) (13.5) A6 B6 1 2 Connector D (14.7) 15 16 Connector A Cable type (30.7) L (11) (10) Robotic cable (Flexible cable) Nil Connector A terminal no.