Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

Digital Flow Switch ( compatible)

Setting of switch operation 1_P/1_N (page 37) (Selection of display colour) Setting of Add dEC1 dEC2 (page 41) 3. Input of set values Setting of Setting of P1L/n1L Setting of P_1/n_1 P1H/n1H P1/n1 H_1 WH1 (page 40) (page 37) (page 39) 4. Delay time Setting of dtH1(ON) dtL1(OFF) (page 38) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (page 41) 6.

Filter Regulator

Product (15) Plug assembly -40- 12Disassembly Drawing 12-1. AW20-D / AW30-D / AW40-D Cross recessed round head screws (4 pcs.) (10) Valve assembly Bonnet Valve spring (Protrusion on IN side) Pressure regulating screw assembly Valve guide (7) Element Pressure regulating spring (11) Baffle (12) Diaphragm assembly OUT I N (8) Bowl seal Body I N (9) Bowl assembly -41- 12-2.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series.

Vacuum Gripper

-7A-X2 25 28 1.8 15 ZPG25U-7A-X2 25 28 ZPG32C-7A-X2 32 35 20 24.5 2.3 ZPG32U-7A-X2 32 35 20 24.5 4.5 ModelZPGB-7A-X2 ModelZPG20UT-7A-X2 (Suction cup formThin flat type) (Suction cup formBellows type) Dimensions Model A B D E F G H Y ZPG10B-7A-X2 10 12 5.5 13.5 21.5 26 5.5 13 ZPG13B-7A-X2 13 15 8.7 19 24 28.5 7.5 ZPG16B-7A-X2 16 18 10 21 25.5 30 8.5 ZPG20B-7A-X2 20 22 12.6 25 29 33.5 15 10.5

Compact Cylinder with Air Cushion and Lock Series RLQ

Unlocks when pressurized 17 7 77 60 4 x 9 Flat washer 4 pcs. 4 x 14 Depth of counterbore 10.5 depth 4 x 15.6 Depth of counterbore 15 depth 84.5 104 + Stroke 8 55 + Stroke 41 Retraction locking LOCK 30.5 Pc PL Port thread type Rc NPT G 1/8 1/4 M5 x 0.8 Dust cover (Manual unlocking unit) PL Unlocking port Unlocks when pressurized Rod end male thread M18 x 1.5 11 26 28.5 33.5 Rod end nut Refer

155

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5

MY2

steel Special resin NBR NBR NBR NBR NBR Description Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring No. 14 15 18 39 40 41 42 43 Qty. 1 1 2 2 2 2 4 2 22 Series MY2H Single Axis Type 16, 25, 40 MY2H G Bore size Stroke PG Q + Stroke (LL) L LA 4-B depth of counter bore C LD through hole 4-MM, depth M Cylinder mounting center line PA Work piece mounting center

4 Port Solenoid Valve Series VQD1000

U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n x C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 P = 11 12.5 (46) L plug connector (L) n: Stations Dimensions n L 11 138 130 10 127 119 L1 L2 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Refer to pages 15 and 16 for detailed selection procedures.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.) Model AS Applicable tubing O.D.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations

IP8101 Series

Electrical Wiring 15 Without Output Function (IP8101-030 and IP8101-033) 15 With Output Function (IP8101-032 and 52-IP8101-034) 15 Electrical Wiring 16 C ATEX Intrinsic Safety Type of Explosion Protected Construction 17 ATEX Intrinsic Safety Type of Explosion Protected Construction 17 Explosion Protected Construction Rate 17 Wiring 17 Barrier 18 Description of Components 19 Contents of LCD

Fieldbus system (PROFIBUS DP compliant)

32 Specifications 32 Dimensions 33 SI Unit Summary of Product Parts 34 Mounting and Installation 36 Installation 36 Wiring 37 Setting 41 Specifications 41 Specifications 41 Dimensions 42 Output Unit Summary of Product Parts 43 Mounting and Installation 44 Installation 44 Wiring 45 Specifications 48 Specifications 48 Dimensions 48 -1No.EX-OMI0032-G Input Unit Summary of Product Parts 49 Mounting

SMC Pneumatic Clean Series

Air Cylinder 2122CG1W/ CG1W 1011Axial foot style (L) / CG1WL CG1WL 10112122With rubber bumper B 15 LT LH W Y X 2-LC (Knock pin position) W Y M X LX LZ Z LS + Stroke ZZ + 2 Stroke 4-LD (mm) 7 7 6 6 LD 4 4 4 4 LC 30 25 22 20 LH 16.5 16 15 15 X 60 69 69 69 LS 4 3.5 3.5 3 M 3 3 3 3 LT B 8.5 8 7 7 Y 10 10 10 10 W 54 44 36 32 LX 187 175 173 163 ZZ 71 58 49 44 LZ Z Bore size 63.5 53 52 47 54.5

Compact Guide Cylinder

MGPKM, MGPKL [mm] Bore size [mm] Standard stroke A B C DA DB E FA FB G GA 50 st or less Over 50 st 100 st or less Over 100 st 100 st or less Over 100 st 50 st or less Over 50 st 100 st or less Over 100 st 32 25, 50, 75, 100, 125, 150, 175, 200 60 78 52.5 55 37.5 40 14 16 7.5 25.5 23 12 3 45 12 40 69 87 64 47 16 16 5 23 12 5 49 15 50 79 100 69 48 20 20 10 31 16 5 59 15 Bore size [mm] GB H

AS-FG/ASD-FG

-10 AS221FG-N02-07 36 21 33.9 43.2 18.5 10 13.2 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 27.2 36.4 AS321FG-02-06 AS221FG-N02-09 60 17 27.8 39.3 12.8 6 15.2 5/16" 20 21 36 33.9 43.2 AS321FG-02-08 AS221FG-N02-11 63 18.5 29.5 41 15.2 8 17.9 3/8" R(PT) 1/4 23 43.8 48.8 21.8 19 42.8 37.8 27.8 39.3 AS321FG-02-10 AS321FG-N02-07 67 21 31.8 43.3 18.5 10 13.2 1/4" 17 60 NPT 1/4 19 21.8 29.5 41 AS321FG

Modular Type Regulators Series AR

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)