CY1

x 0.8 39 31 51 17 8 CY1R32 7.5 9.5 4.5 21 34 17 M5 M6 x 1 50 41 3 76 6.5 62.5 22 10 CY1R40 7.5 9.5 25.5 7.5 19.5 M5 45 3 39 M6 x 1 60 74.5 28 90 10 6.5 CY1R50 7.5 11 9 M6 3 35.5 19.5 60 92.5 38 110 39 15 10 M8 x 1.25 78 CY1R63 7.5 18 10 M6 3 34.5 118 49 24.5 10 M8 x 1.25 90 70 104.5 39 15 Note 1) FE, FF and HB provide a clearance of 1mm between the body and the floating joint

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

JA/JAH/JB/JS

-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07

JA/JAH/JB/JS

-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07

VHK

B Q L2 L3 L4 L5 L6 L1 H 1(P) 2(A) C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 1.2 26 23 11 3.5 41 18 54 51 11 M5 M5 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 2.0 2.0 29.1 16.5 29 29.1 61.6 58.2 1 8 11 3.5 41 8.6 1.2 13 18 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 32.6 16.5 VHK-01S-01S 1 8 1 8 30 57 32.6 65.2 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

MGP

X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6

Battery-less

x 0.8 thread depth 10 5 +0.03 +0.01 depth 5 Auto switch mounting groove (2 locations)5 17 5 +0.03 +0.01 depth 5 6 7.5 A 53.4 46 45 44 29 45 24 A 32 C 22.5 51.7 0.3 46 (D/21) x C 65 51 Table operating range1 2 [2] Origin2 21 E D x M5 x 0.84 [Stroke end] 6.54 9 Stroke end [Origin]3 26 A-A G 116 + Stroke 23.5 Stroke F 4H9 ( +0.030 0 ) depth 4 41 29 5 4H9 ( +0.030 0 ) depth 4 42 6 x M5 x 0.8

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074 0 +0.074 0 +0.087 0 MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D 34H9 42H9 52H9 65H9 Rc 1/8 (G 1/8, NPT 1/8) 82H9 569 Parallel Style Air Gripper

Rotary Actuator/Vane Type

14 0 0.043 1.5 1.5 8 7 10 0.5 25.5 14 13 21 M4 x 0.7 M4 x 0.7 4.5 4.5 M5 x 0.8 30 16 4 56 64.5 22 44 36 26 59 30 50 47.5 13 22 80.005 0.020 16 0 0.043 2 2 9 8 12 1.0 33.5 15.5 14 25 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 42 21.5 4.5 71.5 82.5 24 52 42 29 69 40 63 53 15 30 100.005 0.020 25 0 0.052 3 4.5 10 9 20 1.0 39 21 20 31.6 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 47.8 25 5 87.5 98 30 64 52 38

Floating Joint

41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 13 17 17 22 22 22 27 27 32 41 41 41 55 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 1148 JA Series Made to Order: Individual Specifications Please contact SMC

Mechanically Jointed Rodless Cylinder Series MY1

needle M5 x 0.8 (Port) 2 x M5 x 0.8 G G 2 x M5 x 0.8 (Hexagon socket head plug) MY3A MY3B (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A MY3M Z + Stroke M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) 2 x 2 x J depth K XX (WW) XX (WW) M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) MY1BG MY1BG VV VV 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) (Hexagon

3 Port Solenoid Valve Series SYJ300/500/700

M5 x 0.8 Type 41 Applicable solenoid valve SYJ314SYJ314MSYJ324SYJ324MHow to Order SS3YJ3-41-05 --M3 Type 41 Type S41 Pilot valve is on the A port side. ( ) Valve mounting direction Stations 02 2 stations Pilot valve is opposite the A port side. Applicable blanking plate assembly SYJ300-10-2A Nil R port M5 x 0.8 : : A A R port 20 20 stations Pilot valve is on the A port side.

VP300/500/700

3 8 1 2 VV3P3 VV3P5 VV3P7 Base type 42 41 Individual exhaust Common exhaust VV3P3-41-051-02 Symbol Supply port is common.

Magnetically Coupled Rodless Cylinder

M5 6 47 8 61 26 70 9.5 6.0 28.5 41 92 40 M6 x 1.0 M5 6 55 8 71 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

M5 6 47 8 61 26 70 9.5 6.0 28.5 41 92 40 M6 x 1.0 M5 6 55 8 71 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

MXS Series Air Slide Table

With end lock (16) MXS16R With buffer (16) MXS16F 2-M6 X 1 thread 10 deep Operating port 2-M5 X 0.8 J 13 12 18 48 20 41 3 30 0.5 37.5 Dimensions not indicated are the same as basic type.

Table of Contents

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Intrinsically Safe Valve

53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)

Air Cylinder

-RN 14.5 M10 x 1 Cover side (Head side) Piping port 2 x M5 x 0.8 5 6 M5 x 0.8 20 20.3 18.3 0 0.3 19 20 2.3 2 x 5.5 Mounting hole 18.3 0 0.3 9.5 15 8 21 33 55.5 + Stroke 28 42 Cover outside diameter 83.5 + Stroke With head end lock: ClBJ2F16-HN 6 2 x M10 x 1 Cover side (Rod side) Piping port 2 x M5 x 0.8 8 5 20 M5 x 0.8 19.8 18.3 0 0.3 20 19 2 x 5.5 Mounting hole 12.5 2.3 18.3 0 0.3 8 12.5