CV/MVGQ

Z 90 [91] ND S NB NA MM HX H F D C B A NN Bore size (mm) 10 8 0 0.022 10 0 0.022 46 9.5 12.5 M4 x 0.7 35 28 8 4 14 12 15 M8 x 1 91 [92] 16 47 9.5 12.5 M5 x 0.8 41 28 8 5 20 18 15 M10 x 1 10-15-7 8 Series CVJ5 Axial Foot Style (L) CVJ5L M5 x 0.8 M5 x 0.8 53.5 [54.5] 28 [34.5] M5 x 0.8 Manual override Width across flats B1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Table of Contents

x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Model MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074 0 +0.074 0 +0.087 0 34H9 42H9 52H9 65H9 82H9 12-7-29 29 3 Finger Parallel Style Air Gripper Through-hole

ZX

41 1 trimmer Pressure sensor 51 Filter unit (F) M5 x 0.8 External release port 3.6 (Mounting hole) Vacuum switch 1 10 19 13.6 2-R1.8 (Mounting hole) Vacuum switch Supply valve Air operated Release valve External release Release flow rate adjusting needle Interface plate (63.5) 18 15.5 4 2-3.3 Mounting hole M5 (or M6) (PE port) M5 (or M6) (PV port) Vacuum supply pressure port (V port) Vacuum

PF-OMN0009_C

) (PF3W511 ) (M54 ) 2 mm (41) -17No.PF-OMN0009CN-F (PF3W504/520/540 ) ,(3.0,4 ) 8 0.50.7 Nm (41) , , 4 (PF3W511/521 ,(4.0,4 ) 1.01.2 Nm (41) ,, 4 -18No.PF-OMN0009CN-F () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm -19No.PF-OMN0009CN-F PVC PVC PVC PVC

Vacuum Module Series ZX

(or M6) 1 4.7 AMJ 20 5 AMV Pitch = 21 22.5 Vacuum port (V) M5 (or M6) AEP HEP Related Equipment + 79 65.1 10.7 8.5 V V V V Pitch = 21 Vacuum Port (V) M5 (or M6) 4.2 22.5 Vacuum Port (V) M5 (or M6) Vacuum Port (V) M5 (or M6) 897 Series ZX Vacuum port (V) Vacuum port (V) Ejector System Manifold: Type K1 Common EXH port (EXH.)

Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.

Table of Contents

mounting screw M5 x 0.8 x 16 l 1.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 45 50 37 41 41 45 13 17 17 22 26 32 32 41 26 26 26 31 5 6 6 8 8 8 8 10 134 138 140 174 M8 x 1.25 M20 x 1.5 M10 x 1.25 M26 x 1.5 M10 x 1.25 M26 x 1.5 M32 x 2 M14 x 1.5 The bracket is shipped together.

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

MY1

Series MY1MW/CW Dimensions/Centralized Piping Type 16, 20 1 in = 25.4 mm MY1 M C W G Bore size Stroke 8.5 G Cushion needle For 16 Unavailable port 2-M5 x 0.8 2-M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 QQ QQ RR SS RR SS NC Cushion needle TT UU G G TT UU 2-M5 x 0.8 PP PP (Hexagon socket head plug) GB WW XX WW XX 2-ZZ (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV

ISO Cylinder

Weights [g] Bore size [mm] 8 10 12 16 20 25 C85KN 39 41 82 95 189 257 C85KE 41 43 86 98 194 262 Without magnet C85KF 37 39 77 85 174 240 C85KY 37 39 77 85 175 241 Basic weight CD85KN 39 41 83 95 193 261 CD85KE 41 43 86 99 198 266 With magnet CD85KF 37 39 77 85 178 244 CD85KY 37 39 78 85 178 245 Additional weight per 10 mm of stroke 2.3 2.5 4.5 5.5 8.7 12.2 Foot (1 pc.)

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

MXQ

x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.