3 Port Solenoid Valve

Turbine oil P-32 Viscosity according to ISO Grade Classification of viscosity cst (40C) Classification of viscosity cst (40C) 32 32 Kyushu Oil Co. Stork Turbine 32 Nippon Oil Corp. Turbine oil 32/ Mitsubishi turbine 32 Showa Shell Sekiyu K.K. Turbine 32 Cosmo Oil Co., Ltd. Cosmo turbine 32 Tonen General Sekiyu K.K. General R turbine 32 Japan Energy Corp.

180

hole) 2 x M5 x 0.8 thread depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 21H9 + 0.052 depth 1.5 0 Positioning pin hole 50 MHZ 16 4 69 26 MHF 86 MHL Auto Switch Mounting Groove Dimensions M5 x 0.8 (Finger opening port) MHR MHK MHS 20 12 MHC M5 x 0.8 (Finger closing port) 32 8 3 4 3 MHT MHY MHY MHY2-20D2 Opening/Closing direction through-hole type MHW

Digital Pressure Switch ( compatible)

M5 01 N01 Port size M5 x 0.8 R1/8 NPT1/8 Pressure-sensing part Silicon fluid contact Materials in Piping port (Common) PBT, CB156, heat resistant PPS, O-ring: HNBR part Piping port C3604 (Electroless nickel plating), SUS304, NBR Weight Body 24 g 34 g 36 g Lead wire with connector +39 g Cable specifications Conductor area 0.15 mm2 (AWG26) Insulator Outside diameter 1.0 mm Color Brown, Blue

HRX-OM-W058

5.14.1 Pressure unit switching . 5-32 5.14.2 Pressure unit switching setting and checking . 5-32 5.15 Alarm buzzer sound setting. 5-33 5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking . 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H G I J K L A B C D E F M R +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 16 30 30 36 44 M4 10 10 13 13 10

Round Type Low Pressure Hydraulic Cylinder Series CH
M

H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 +0.027 0 +0.027 0 +0.027 0 +0.027 0 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

73 90 50 11 (12.5) 2(B) port 11 (12.5) 4(A) port Indicator light Indicator light 167 181 59 73 50 90 108 2 4 24.6 38 48 11 (12.5) 11 (12.5) B A 4(A) port 2(B) port 14 12 1 5 3 4 2 30 45 24.6 A B 2-5.6 Mounting hole Manual override 38 48 B A 14 5 3 1 12 30 45 2-5.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5

4 Port Solenoid Valve Series VQD1000

(Initial value) 3 1 (R) (P) Flow characteristics 14/2(PA/B) 4/25/3(A/BEA/EB) Flow characteristics Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Valve model Body ported 10-VQD1121-L M-M5 10-VQD1121 -L M-M5 10-VQD1151-L M-M5 10-VQD1151W-L M-M5 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27 0.31 0.28 0.31 0.28 0.05 0.07 0.06 0.07 Base mounted (With sub-plate

HRX-OM-X027

5.14.1 Pressure unit switching . 5-32 5.14.2 Pressure unit switching setting and checking . 5-32 5.15 Alarm buzzer sound setting. 5-33 5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking . 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Dimensions A (mm) ZL (mm) Model Model A B C D E F G Y B C D E F G Y ZY ZPT40HB-B8 ZPT40HB-A14 M8 x 1.25 40 41.4 28.4 43.2 20.5 32 62 13 40 41.4 28.4 43.2 20.5 32 13 ZPT50HB-A14 -B10 M10 x 1.5 50 51.9 35.7 54 24 35.5 65.5 16.5 ZQ ZPT50HB-B8

RHC

14.5 9 8.5 20.5 14 25 25 29.5 30 27 74.5 64.5 15 17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 REC 32 32 33 33.5 30.5 78 68 15 19.5 12 18 10.5 21.5 14 16.5 9 8.5 22.5 16 40 40 37.5 38 35 82.5 72.5 20 24.5 17 23 15.5 26.5 19 21.5 14 13.5 27.5 21 CX 50 50 43 43.5 40.5 88 78 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 63 63 50.5 50.5 47.5 95 85 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 CY

VQ20/30

Viscosity according to ISO Grade 32 Classification of viscosity (cst) (40C) Turbine oil P-32 Idemitsu Kosan Co.,Ltd. Caution Turbine oil 32 Nippon Mitsubishi Oil Corp. Cosmo turbine 32 Cosmo Oil Co.,Ltd. Series LV Kyodo turbine 32 Japan Energy Corp. Turbine oil 32 Kygnus Oil Co. 1.

AIR COMBINATION

Note 14) Without a valve function Note 15) The combination of metal bowl: 2 and 8 is not available. Note 16) When choosing with W: Filter drain port, the drain cock of a lubricator will be with barb fittings. Note 17) For pipe thread type: M5, NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.)

Compact Vacuum Unit Ejector/ Vacuum Pump System

M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

Modular Type Air Filter Series AF

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Bracket mounting size Accessory specification With auto drain Standard specification Port size Model B 85 115 170 204 208 284 297 P 28 57 73 73 D 25 40 53 70 70 90 95 C 7 10 14

modular-press-e

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

Modular F.R.L. Pressure Control Equipment

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

Process Pump

(Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64 7.5 52 37 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 32 40 32 40 Rod end threads Female threads Male threads Air 1.5MPa 1.0MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port Ambient and fluid temperature JIS class 2 +1.0 0 mm 0.035MPa 0.025MPa M5 x 0.8 M5 x 0.8 Without

Pneumatic Transfer System Series MF

508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15 32 15 32 I 10 15 J 6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C