ZQ-OM01401 ) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18 33 4 0.25 34 32 27 48 0.35 46 42 35 62 0.45 57 52 44 76 0.05 12 11
0 OFF 501015 ( 1 OFF IN/OUT 2.3 ) (2 ) () IDFB Series 42 4.2 IDX-OM-W020 5 5 5-1 3 ON OFF 600mm 1 10% () ( ) 60cm 1 10% 3 IDFB Series 5-1 5 1 IDX-OM-W020 5 () 60cm 1 2 INOUT INOUT () IDFB Series 5-1 5 2 IDX-OM-W020 6 6 6-1 IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E 10 SCFM 15 SCFM 25 SCFM 41 SCFM 59 SCFM 71 SCFM (ANR) (1) 37 F (2.8C) (17 m 3/h) (25 m 3/h) (43