Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Thermo-chiller/Rack Mount Type

, Ion exchange resin*12 Temperature range [C] 5 to 40 Pressure range [MPa] 0.3 to 0.5 Required flow rate (50/60 Hz)13 [L/min] 8 12 Facility water system Inlet-outlet pressure differential of facility water [MPa] 0.3 or more Port size Rc3/8 Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Synthetic rubber Power supply Single-phase 100 VAC (50/60 Hz), 115 VAC

Series CQ2

) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V,12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indication) Relay, PLC Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

MRQ DC () Blue DD-F5P Weight 20DC (+) Brown (g) D-F59 D-F5P D-J59 D-J51 Auto switch model 0.5 23 23 21 21 Lead wire length (m) OUT Black 3 81 81 71 71 5 127 127 111 111 DC () Blue Dimensions D-J59 OUT (+) Brown Mounting hole Indicator light OUT () Blue D-J51 Main circuit of switch OUT Brown OUT Blue Most sensitive position 11-11-21 22 Solid State Switch Direct Mounting Style D-S99(V)/D-S9P

,

PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-,

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-,

,

PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-,

LEF-OM006xx

1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V CN5 1 LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm

Electric Slide Table / High Precision Type 《 AC servo motor 》

Product weight [kg] Model Stroke Additional weight Size Motor type 50 100 150 with lock 16 S2 1.96 2.35 0.20 25 S3 3.86 4.43 5.83 0.40 -5- LESYH*(D,R,L)*T6/T7 Motor type T6/T7 Model LESYH16*T6 LESYH25R/LT7 LESYH25DT7 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N](Set value: 12 to 24%) *1 65 to 131 127 to

Thermo-chiller

(For communication cable) Weight*9,*12 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1". 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1,LQ2 2 Body class LQ2 Symbol 2 3 4 5 6 LQ2 Applicable fitting Body class

rep-modular-e

Tightening torque: AW10 AW20(K) AW30(K) AW40(K) AW60(K) 21 3 to 4 Nm 12 7 to 9 Nm 14 12 to 14 Nm 7. Pressure Gauge Adapter, Plug Assembly Process Procedure Tools Check item Applicable model Actuators Modular F.R.L. Pressure Control Equipment Disassembly Hexagon wrench key Nominal: AW20(K) AW30(K) AW40(K) AW60(K) 1) Remove the plug.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Tightening torque: AW10 AW20(K) AW30(K) AW40(K) AW60(K) 21 3 to 4 Nm 12 7 to 9 Nm 14 12 to 14 Nm 7. Pressure Gauge Adapter, Plug Assembly Process Procedure Tools Check item Applicable model Actuators Modular F.R.L. Pressure Control Equipment Disassembly Hexagon wrench key Nominal: AW20(K) AW30(K) AW40(K) AW60(K) 1) Remove the plug.

VDW Series

SOL. 2 () 2 ( ) 21 Compact Direct Operated Series VDW 2/3 Port Solenoid Valve for Fluid Control Specific Product Precautions 1 Be sure to read before handling. Refer to pages 18 through 21 for safety instructions and precautions for 2/3 port solenoid valve for fluid control.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Please change the parameter in the initial setting. *3 The travel distance of the actuator per 1 pulse should be 10 [m/pulse]. 12 - LECSS LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VQZ 285.5 21 273 No.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Refer to p.0-20 and 0-21 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.2.0-3 and 2.0-4 for precautions on every series.

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

21.3 18.3 11.7 16 27.5 20.4 9.3 12.7 17 14.3 32.1 31.1 27.1 16.5 18.5 21 16 17 18.5 30.2 31 32.4 34.4 34.2 34.5 36.4 43.2 23.1 23.9 25.3 25.2 24.9 25.2 27.2 33.9 14.2 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 36.1 12.7 NPT 1/8 19 21 15 32 18.2 34 34.4 35.4 29.4 18.5 40.4 17.5 NPT 1/4 36 20 21 Reference dimensions of 10-32 UNF and NPT threads after installation. 15-9-60 5 Speed Controller