PFxx-OMX0007

A to B C to D 1,000 L 10 to 1000 10 to 1050 40 to 4000 40 to 4200 L/min 2,000 L 20 to 2000 20 to 2100 40 to 4000 40 to 4200 PF3A7#H 1,000 L 0.4 to 35.3 0.4 to 37.1 40 to 4000 40 to 4200 cfm 2,000 L 0.8 to 70.6 0.8 to 74.2 40 to 4000 40 to 4200 : The flow ranges and relationship between the fluid and PD are shown in the figures below.

PF-OMM0004_C

PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

CJ2

Axial foot 16 40 Mounting bracket weight Front flange 5 15 This basic weight includes weight of rod end nut.

Pin Clamp Cylinder Series CKQ/CLKQ

Pin Clamp Cylinder Lock mechanism Clamp arm Series CKQ/CLKQ 50 Work Work LOCK Feature 1 Pin Clamp Cylinder 50 Series CKQ/CLKQ How to Order Port thread type Guide pin shapes Nil TN TF Bore size Rc NPT G R D Round Diamond 50 50 mm The diamond shape is for pin diameter of 17.5 or over.

Step Motor Controller

) AC servo motor (S6) 200 to 230 VAC 50/60 Hz AC servo motor (S7) AC servo motor (S8) Dimensions (mm) LECSAm 40 135 2 x 6 Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

50 63 80 100 Bore size (mm) JIS symbol 0.01 0.02 Minimum operating pressure Standard Stroke Table Bore size (mm) 32, 40 50, 63, 80, 100 Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

AZ1000

) Max. 5.6 (142.2) (When selecting option code P) 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 150 150 F 0.3MPa 0.3MPa 100 100 0.2MPa 0.2MPa 50 50 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L mm Gripping point L mm MHS2-50D MHS2-50D F 400 400 Internal gripping Pressure 0.6MPa Pressure 0.6MPa 300 300 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 200 200 0.3MPa 0.3MPa 1N: Approx. 0.102kgf

High Vacuum L Type Valve

108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

180

30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 700 180 Angular Type Air Gripper MHY2/MHW2 Series MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 200 0.5 0.5 0.5 60 15 0.4 0.3 0.4 150 0.4 40 0.3 10 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40 Gripping

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

VQ550 Indicator light Indicator light 214 121.8 195 (200.5) 91.5 59.5 105.8 (Port A) 17.5 13.5 (Port B ) 2 2 73 (78.5) 122 106 59.5 (Port A) 17.5 13.5 (Port B) 2 4 SMC SMC 2 4 A B 40 53 66 162 50 41 37 31.5 18 A B A B 53 66 40 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole G1/2 Electrical entry 18 31.5 37 41 50 98 G1/2 Electrical

Series CQ2

50 75 100 125 150 175 200 250 300 Reed switches: D-Z7, Z8 Solid state switches: D-Y5, Y6, Y7 Female threads Male threads 180 Single rod Double acting CQ2 200 Double rod New 180 and 200 Compact cylinder variations A wide range of 15 sizes from 12 to 200 Bore size (mm) Compact cylinder series 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 CQ2 Large bore CQ2 CQS Refer to N320 "CQ2" and

HRX-OM-M005

5 to 40 Circulating fluid flow setting range*4 L/min 10 to 40 10 to 40 Circulating fluid discharge pressure display range MPa 0 to 1.5 0 to 1.5 -30 to 40C: Galden HT135*5 FluorinertTM FC-3283*5 20 to 90C: Galden HT200*5 FluorinertTM FC-40*5 Circulating fluid (No intrusion of foreign body) Refrigerant R404A (HFC) R404A (HFC) Quantity of refrigerant kg 2.9 0.72 (At 20L/min) 0.72 (At 20L/min

MHF2

L L H Holding point Holding point H MHF2-12D MHF2-8D 80 50 Pressure 0.2MPa 40 60 0.5MPa 0.5MPa Pressure 0.2MPa 0.6MPa 0.6MPa Overhang Hmm Overhang Hmm 0.7MPa 30 0.7MPa 0.3MPa 0.3MPa 40 0.4MPa 0.4MPa 20 20 10 40 20 80 60 40 20 0 0 50 30 10 Gripping point L mm Gripping point L mm MHF2-20D MHF2-16D 100 0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang

XLG Series

H 4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

Air Cylinder

15 + 40(n 2) 2 (n = 2, 4, 6)3 50 + 20 (n 2) (n = 2, 3, 4, 5) CG3 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6)3 50 + 27.5 (n 2) (n = 2, 3, 4, 5) JMB D-M9V 5 5 10 + 10 (n 2) (n = 4, 6)4 MB D-A9V 5 10 10 + 15 (n 2) (n = 4, 6)4 MB1 D-M9 D-A9 10 (5)5 10 15 + 15 (n 2) (n = 4, 6)4 CA2 D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6)4 D-M9W 15 (10)5 15 20 + 15 (n 2) (

Model Selection 1

VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).