V

63 80 100 125 25 50 75 100 Courtesy of Steven Engineering, Inc. !

Microspeed Cylinder

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (basic

Clean Air Module

AME Digital flow switch AMF Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Filter Restrictor Regulator ZFC SF SFD LLB LLB AD GD Nominal filtration rating: 0.01 m Nominal filtration rating: 0.01 m (Filtration

Compressed Air Preparation Filter

40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43 93.1 30 45 70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

Cylinder with lock

Bore size (mm) Bolt Hexagon wrench size Tightening torque (Nm) 32, 40 MB-32-48-C1247 4 5.1 50, 63 MB-50-48-C1249 5 11 80, 100 Foot MB-80-48AC1251 6 25 Other MB-80-48BC1251 5) When replacing the support brackets, the tie-rod nuts on the cylinder body will be loosened.

Rotary Actuator

Size 30 Size 50 to 100 Stopper screw AFor end adjustment in clockwise direction Stopper screw BFor end adjustment in counter clockwise direction Fig. (1) Rotation range of shaft keyway (size 30) Fig. (2) Rotation range of shaft keyway (size 50 to 100) 19 - Internal structure and parts description Rotary actuator internal structure Component parts No.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

3

100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal

XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

High Vacuum L Type Valve

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD

Single Axis Electric Actuator Series LJ1

motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) The code is L for elbow piping for all manifold stations.

2/3 Port Valve for Various

VN Rated voltage 1 2 3 4 5 6 7 8 9 Solenoid valve option Nil Standard 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard.

ARM10/11

100 150 0 20 40 60 80 100 Flow rate /min(ANR) Flow rate /min(ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow

ARM10/11

100 150 0 20 40 60 80 100 Flow rate /min(ANR) Flow rate /min(ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow

VQ5000

Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal 0 1 Coil voltage Function 1 2 3 Stations 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC sepecifications.

Heavy Duty Stopper Cylinder

300 300 200 200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (10) Port size Size Port size 50 to 100 Rc1/4 Perform followings before piping.