Air Cylinder CLA Series Fine Lock Model

with Rod Boot M14X1.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 t\,126X1.5 242 ' , u ' 2 O 27 /a 42 20 10 153 I 234 244 43 1.2 59 % 1 6 30 46 1 0 21 50 12 168 1 9 0 104 'r u:3j 38 261 273 52 1.2 66 269 1t4 31 ,s 48.5 23 60 '16 182 23 0 49 58 290 296 52 1.2 66 2Aa 37 ', 55 23 70 20 2Ca 2A 0 7 1 327 347 65 12.5 80 336 40 56.5 25 80 25 226 36 0 72 241 65 1 4 . 0 81 365 Trunnion Type/CLAT with Rod Boot

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Title not found

with Rod Boot M14X1.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 t\,126X1.5 242 ' , u ' 2 O 27 /a 42 20 10 153 I 234 244 43 1.2 59 % 1 6 30 46 1 0 21 50 12 168 1 9 0 104 'r u:3j 38 261 273 52 1.2 66 269 1t4 31 ,s 48.5 23 60 '16 182 23 0 49 58 290 296 52 1.2 66 2Aa 37 ', 55 23 70 20 2Ca 2A 0 7 1 327 347 65 12.5 80 336 40 56.5 25 80 25 226 36 0 72 241 65 1 4 . 0 81 365 Trunnion Type/CLAT with Rod Boot M14X1.5

Series AK1000

psig (0.17 MPa) Inlet pressure: 50 psig (0.34 MPa) AK1300 150 psig (1.0 MPa) 75 psig (0.52 MPa) Inlet pressure: 100 psig (0.69 MPa) 40 0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200 300 400 500 600

AC Servo Motor Driver (MECHATROLINK-II type)

30 20 10 Parameter *1,*2 Para.

AC Servo Motor Driver (MECHATROLINK-III type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

reduces flow setting time

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

VXR21/22/23

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5

04-miw-e

MI-A2503-25 MI-A3203-32 MI-A0802-8 MI-A1202-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MI-A1201-12 MI-A1202-12 MI-A1203-12 MIW12-PS MIW-A1204 MI-A2001-20 MI-A2002-20 MI-A2003-20 MIW20-PS MIW-A2004 MH-G01 MH-G01 (contents quantity 30 g) MI-A2501-25 MI-A2502-25 MI-A2503-25 MIW25-PS MIW-A2504 MI-A3201-32 MI-A3202-32 MI-A3203-32 MIW32-PS

06-cbm2-e

Lock piston seal CBM2-20-PS CBM2-25-PS CBM2-32-PS CBM2-40-PS NBR 20 25 32 40 CBM2-20-PS CBM2-25-PS CBM2-32-PS CBM2-40-PS Cushion needle seal Set of left nos. @6, @7. With lock at double ends CBM2-20-PS-W CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W 20 25 32 40 CBM2-20-PS-W CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W Set of left nos. @6, @7. Seal kit includes @6 and @7.

Speed Controller with

Metric size Inch size Air 1.5 MPa (1.05 MPa Note 1)) 1 MPa (0.7 MPa Note 1)) 0.1 MPa 5 to 60C (No freezing) Applicable cylinder bore size (mm) 2 3.2 4 6 8 10 12 1/2" 3/8" 5/16" 5/32" 1/4" 1/8" AS1002F AS2002F AS2052F AS3002F AS4002F 6, 10, 16, 20 Note) 20, 25, 32 20, 25, 32, 40 40, 50, 63 63, 80, 100 Note 2) Nylon, Soft nylon, Polyurethane Applicable tube material Note 1) In case of AS1002F

Dual-Rod Cylinder Series CXS

, 25, 32 New New With Air Cushion Series CXS 20, 25, 32 W With End Lock Series CXS 6, 10, 15, 20, 25, 32 Dual-Double-Rod Type Series CXSW 6, 10, 15, 20, 25, 32 Auto Switches Made to Order

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

VXZ

The apparent power in parentheses is for VXZ2232. 50 66(60) 20 60 57(51) 15 AC VXZ22 DC 50 93 25 60 79 20 AC VXZ23 DC JIS Symbol OUT IN 17-3-63 Applicable Fluids Check List Refer to pages 17-3-62 and -63 for models and specifications. Refer to pages 17-3-62 and -63 for models and specifications.

Rotary Table Series MSU

D-R80, D-S79, S7P 20 Double vane is available with 90 rotation setting only.

Information

14 15 18 20 5 5 8 19 21 27 30 19 21 27 30 34.5 37 42 47.5 34.5 35.5 42 47.5 CQ-C012 CQ-C016 CQ-C020 CQ-C025 25 28 35 40 25 28 35 40 100 100 4 4 5 5 4 4 5 5 12 16 20 25 12 16 20 25 45.5 49 54 57.5 39.5 40.5 52 57.5 CQ2 80 90 10 5 5 8 CQ-C012 CQ-C016 CQ-C020 CQ-C025 100 100 CQS 80 90 10 The double clevis pin and retaining ring are not included.

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

pressure (MPa) Bore sizes (mm) 0.04 (0.03) 20, 25, 32, 40 0.035 (0.025) 1 (0.5) 20, 25, 32, 40 0.025 0.5 0.035 (0.025) 1 (1) 0.03 0.025 1 Figures in ( ) are for 11-CM2X. 12, 16 12, 16 1 (0.5) 0.5 20, 25 20, 25 Figures in ( ) are for 11-CQSX.

P-E99-4A Air Cylinder with Drop Prevention Mechanism — Cylinder with End Lock & Cylinder with Lock — Prevents dropping when air supply decreases or residual pressure is exhausted  Cylinder with End Lock Pick and place Locking door Drop prevention at stro

position Retracted end Bore size 6, 10, 15, 20 to 32 Locking position Both ends Bore size 10, 16 to 32 Series MTS Series MXS Series MXQ Series MY1H Locking position Retracted end Bore size 12, 16 to 40 Locking position Retracted end Bore size 8, 12, 16 to 25 Locking position Retracted end Bore size 8, 12, 16 to 25 Locking position Both ends Bore size 16 to 40 6 8 10 12 15 16 20 25 32 40

Compact End Lock Cylinder Series CBQ2

L1 (mm) With rear lock With front lock Bore size (mm) I J K C D E H Standard stroke A B Q A B F Q 32 72.5 65.5 12.5 65 58 7.5 10.5 13 16 45 M8 x 1.25 60 4.5 14 40 82 75 14 71.5 64.5 8 11 13 16 52 M8 x 1.25 69 5 14 10, 15, 20, 25 50, 75, 100 50 83.5 75.5 14 73.5 65.5 10.5 10.5 15 20 64 M10 x 1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).