Digital Flow Switch

or Rear entry Main materials of parts in contact with fluid FKM, SUS304, PPS, PBT, Brass (Electroless nickel plated), HNBR, Si, Au, GE4F Rc1/4, NPT1/4 Straight type: 70 g Bottom entry: 85 g G1/4 Straight type: 115 g Bottom entry: 130 g Piping port sizes 8 one-touch tube fitting Straight type: 50 g Bottom entry: 65 g Flow adjusting valve +45 g Weight Lead wire +35 g Bracket +20 g Panel mount

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

5 to 45 Circulating uid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating uid system Rated ow 50/60 Hz (Outlet)6 L/min 29/45 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz7 L/min

AC Servo Motor Driver (SSCNET Type)

The machine stops once after moving the distance set in Pr.50 "Setting for the movement amount after near-point dog ON" from the OFF --> ON position. Later the operation restarts and then stops at the first zero signal to complete the machine OPR.

ZQ-OM01401

) 10 (%) [mA] 40 NPN PNP NPN PNP 2 OUT1: OUT2: [mA] 80 [V] 28(NPN ) 26.4(NPN ) [V] 2 (80mA ) [ms] 2.5 (20,100,500,1000,2000ms ) 0.2 (%) F.S. 1digit 1 0 1 0 ( ) 1 to 5V2.5 (%) F.S. 1 (%) F.S. 1k 3 1/2 7 LED () 2 (%) F.S. 1digit (253) ON OUT1: OUT2: IP40 [] -5 to 50 -10 to 60 [%RH] ,35 to 85 [ACV] 1000 1 [M] 50 (DC500V ) 2 (%) F.S. (-5 to 50 25) 2 (AWG26) 5

MHS

=20mm 3263 =30mm 80 =50mm 0.5MPa MHSH3 / MHSH3-32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3

Digital Pressure Switch

C, Storage: -10 to 60 C (no condensation or freezing) Operating humidity range Operation, Storage: 35 to 85% RH (no condensation) Withstand voltage 1000 VAC, 1 minute between terminals and housing Insulation resistance 50 M or more at 500 VDC between terminals and housing UL Temperature rating Surrounding air temperature rating: Maximum 50 oC Temperature characteristics 2% F.S. (25 C reference

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

CYP

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

CYPSeries

Dynamic moment Me3 We W L2 = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

CYPSeries

Dynamic moment Me3 We W L2 = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

EX500

32.3 28.3 47.3 45 l Terminal no.

Compact Cylinder Double Acting, Single Rod JCQ Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional

LV50-OMQ0002

Time Accumulated pulse output mode 50 msec Time -35No.LV50***-OMQ0002-G [F 2] Setting of OUT2 Set the output mode of OUT2.

LECP6_C

CN1(P.18) 4.2 CN2CN3: LE-CP-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 USB 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O P.27 6.3 /(P.24) 17 - 5.

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

High Power Cylinder:

Solenoid valve ( ): Effective area [mm2] : Metal seal Speed controller Composed effective sectional area (mm2) B 9.0 to 14.4 A 3.6 to 6.3 VQ1000 (4.5) VQ1000 (6.3) SY3000 (5.9) SX3000 (5.9) VJ5000 (3.6) VZ3000 (3.6) C 16.2 to 18.0 D 36 to 45 VF5000 (45) E 64.8 to 67 Refer to System selection table, and the appropriate solenoid valve, speed control valve ad bore size may be selected.

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

VT317

VQ VKF Surge voltage suppressor mounting part (For G) VQZ VZ VS VFN Surge voltage suppressor Electrical entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire C Conduit JIS Symbol T Conduit terminal D DIN terminal Rated voltage 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 50 60 50 60 4 50 60 5 6 24 VDC 12 VDC 7 240 VAC, Hz 50 60 9 Other Option Manifold Accessory

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class