3 Port Air Operated Valve Series SYJA300 It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.
Polyurethane Tubing TU/TIUB Series RoHS KQ2 KQB2 20 m roll 100 m roll (TU1610 is reel.) 100 m roll, 200 m roll For general pneumatic tubing Flexible Polyurethane tubing Model/Specifications Option Manufactured upon receipt of order (Please consult with SMC.)
SET Proceed to the auto shift mode. 16-3-15 15 Series PSE530/200 Operation 3: Special Setting 3 Auto shift Refer to C Auto shift function on page 16-3-17 for details.
1.5 3.5 Note) Flow rate values are measured at 0.5 MPa and 20C Flow Direction Symbols on Body How to Order JIS Symbol Symbol 1F 06 D 200 AS Type adjustable by flat head screwdriver Body size 100 200 205 300 400 M5 standard Applicable tubing O.D. 1/8 standard Inch size Metric size 1/4 standard 3.2 3/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 1/2 standard 4 5/32" 6 3/16" 8 1/4"
Body size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard Applicable tubing O.D. 1/2 standard Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" With One-touch fittings 4 5/32" 6 3/16" 8 1/4" 10 5/16" 12 3/8" 1/2" Use 1/8" tube. 15-9-97 7 Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow
AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.
[GSDML ] PLC [SC_MonSs] [Monitior Short Enable 1 Circuit(Power) ] Disable 1 Enable [OC_Mon] [Monitor Open 2 2 Disable Circuit] [Inrush] [Inruch Current Enable 100 mse 3 Disable Filter] 0.1 ms [Filter_T] [Input Filtering 1.0 ms 4 1.0 ms 10 ms Time] 20 ms 1.0 ms [SigExt_T] [Input Extention 15 ms 15 ms 5 100 ms Time] 200 ms Enable Val: 1 65000 4 ON/OFF [Counter] []
msec 1 1 1 100 msec Bit 5 Bit 4 Bit 3 ON 0 0 0 0 0 1 0 1 0 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 6 Zone M Output feedback 0 Disable 1 Enable Bit 7 55 No.EX##-OMY0006CN Table 10-9 Safety Mode (Module Passivation/xxx)Byte2Zone 1 Output feedback parameter Bit 2 Bit 1 Bit 0 OFF Table 10-8 Bit 5 Bit 4 Bit 3 ON Table 10-8 Bit 6 Zone1 Output feedback
g 1 0.927= 20L/min 3 420 (1 atm)65R.H. 0 (1 atm) 4 mm PVC 1.14 mm AWG23 0.72 mm -36No.PF-OMO0007CN () a(L/min) b(L/min) PF2A710 A 1 10 PF2A750 B 5 50 PF2A711 C 10 100 PF2A721 D 20 200 PF2A751 E 50 500 -37No.PF-OMO0007CN PF2A710/750 PF2A711/721/751 -38No.PF-OMO0007CN ()ZS-37-A (L )ZS-37-B ZS-29-T -39No.PF-OMO0007CN NPN(1 ) + (15 V) NPN(1 ) + (420 mA) PNP(1 ) + (15 V) PNP(1 )
NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184
Calculation methodExample: MDLUL32-100 Basic weight0.72 (axial foot typesize32) Additional weight0.16/50 stroke Stroke100 stroke 0.72 +100/50 x 0.16 = 1.04kg 2 Series MLU Mounting Bracket Part No.
15 Air consumption (l/min [ANR]) Discharge pressure (MPa) 0.4MPa Discharge flow rate (l/min) SUP = 0.5MPa 0.3 0.3MPa SUP = 0.5MPa 150 10 0.4MPa SUP = 0.5MPa 0.2MPa 0.4MPa 0.2 100 0.3MPa 0.3MPa 5 0.2MPa 0.1 50 0.2MPa 00 5 10 00 5 10 15 00 50 100 150 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) 4 Series PA3000 Dimensions PAm331m-m03 152 4-7 64 2-M5 with depth 8 139
2.9 (0.16) SQ1530 20 or less 100 Metal seal 26 or less Dust proof Pressure Enclosure center 3.2 (0.18) SQ1531 25 or less 100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.
, Auto power OFF Zero clear, Units display switching Function Withstanding pressure 1.5 MPa 200 kPa 200 kPa Fluid Air, Non-corrosive gases Power supply 3 V (DC), Type AA dry cell x 2 pcs. 12 months continuous operation (Without backlighting, temperature conditions: at 25C) Battery life Response speed 250 ms 2% F .S. or less (Temperatue conditions: at 25C) Display accuracy 1% F .S. or less
, Auto power OFF Zero clear, Units display switching Function Withstanding pressure 1.5 MPa 200 kPa 200 kPa Fluid Air, Non-corrosive gases Power supply 3 V (DC), Type AA dry cell x 2 pcs. 12 months continuous operation (Without backlighting, temperature conditions: at 25C) Battery life Response speed 250 ms 2% F .S. or less (Temperatue conditions: at 25C) Display accuracy 1% F .S. or less
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F-03 ASG521F-03 ASG620F-04 ASG621F-04 Inlet
Made to Order (Refer to page 725 for details.) 724 AS-FM Series Speed Controller for Low Speed Operation with One-touch Fitting In-line Type How to Order 200 1 F M 06 AS Lock nut option AS-F Nil J Hexagon lock nut Round lock nut TMH Body size M5 standard 1/8 standard 1/4 standard ASD Made to Order Refer to the below for details. 100 200 205 AS Applicable tubing O.D.
Metric size Type (Recommended flow rate) ZL Symbol Tubing size Metric size (Release bushing: Light gray) Symbol Tubing size Applicable model Flow rate l/min (ANR) 04 100 200 Max. 20 Max. 50 4 ZFC100 ZFC100 ZFC200 ZFC200 ZY 06 6 ZF 08 8 ZP Specifications SP ZFC100-04X17 ZFC100-06X17 ZFC200-06X17 ZFC200-08X17 4 10 6 20 6 30 8 50 Model Connecting tube O.D.
O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122