pa

Blue (100 VAC) 2 (, +) 2 Red (200 VAC) Indicator light Indicator light With indicator light With indicator light Red (+) DC Blue (100 VAC) Series VC (Class H coil) Red (100 VAC) Grommet, Conduit, Conduit terminal AC circuit For energy-saving circuit, there is the polarity. 1 DIN terminal Since internal connections are as shown below for the DIN terminal, make connections to the power supply

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

0x02 0X06 0002 0064: Force 100 Mbps/Full duplex Ex.

Fieldbus system EtherNet/IP compatible SI Unit

0X06 0002 0064: Force 100 Mbps/Full duplex Ex.

PFxx-OMY0005

(Displays 0 when the value is below 90 L/min) 200 to 2100 L/min 100 to 1050 L/min (Displays 0 when the value is below 200 L/min) 10.0 0 to 10%F.S. (Displays 0 when the value is below 100 L/min) : The zero-cut range of the accumulated value and accumulated pulse value should be 1%F.S. or more.

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

XL-OMV0002

154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L n L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 20 19 18 17 2 L1 L2 L3 L4 298 285.5 273 260.5 260.5 248 235.5 223 210.5 210.5 198 185.5 110.5 123 135.5 148 148 160.5 173 287.5 275 262.5 250 250 237.5 225 212.5 200 200 187.5 175 100 112.5 125 137.5 137.5 150 162.5 263.7 253.7 243.7 233.7 223.7 213.7 203.7 193.7 183.7 173.7 163.7 153.7 83.7 93.7 103.7 113.7 123.7 133.7 143.7

Sine Rodless Cylinder Series REA

Model determination 2 Sine Rodless Cylinder Series REA Model Selection Method 2 Precautions on Design 1 Selection Method 40 32 25 500 500 300 200 300 400 Recommended driving force: Fn(N) 200 300 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 200 100 100 100 50 40 20 30 40 50 20 30 40 50 20 30 Usable

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

70 100 200 300 10 30 50 70 100 200 300 Eccentric distance l (mm) Eccentric distance l (mm) Selection graph to 700mm/s Selection Example: Vertical Upward Mounting Solid line: Operating pressure 0.4MPa or more 100 50 Selection conditions Mounting: Vertical upward (lifter) Maximum speed: 500mm/s Load mass: 40kg Eccentric distance: 80mm Load mass m (kg) Refer to graph based on vertical mounting

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

Water-cooledThermo-chiller

Operating time Min. 0.5 s 1 s 2 s 0.05 s 0.1 s 0.2 s 0.01 s 0.02 s 100 200 400 600 1000 2000 4000 130 300 500 700 1500 3000 Current (% for chiller main breaker volume) 124 Series HRW Specific Product Precautions 3 Be sure to read this before handling. Refer to back page 1 for Safety Instructions and back pages 2 to 5 for Temperature Control Equipment Precautions.

Digital Flow Switch ( compatible)

A to B C to D 500 L 5 to 500 -25 to 525 L/min 1000 L 10 to 1000 -50 to 1050 2000 L 20 to 2000 -100 to 2100 PF2MC7 40 to 4000 -200 to 4200 500 L 0.17 to 17.66 -0.90 to 18.50 cfm 1000 L 0.35 to 35.31 -1.80 to 37.10 2000 L 0.70 to 70.63 -3.50 to 74.20 The flow ranges and relationship between the fluid and PD are shown in the figures below.

Digital Flow Switch ( compatible)

A to B C to D 500 L 5 to 500 -25 to 525 L/min 1000 L 10 to 1000 -50 to 1050 2000 L 20 to 2000 -100 to 2100 PFMC7 40 to 4000 -200 to 4200 500 L 0.17 to 17.66 -0.90 to 18.50 cfm 1000 L 0.35 to 35.31 -1.80 to 37.10 2000 L 0.70 to 70.63 -3.50 to 74.20 The flow ranges and relationship between the fluid and PD are shown in the figures below.

3 Port Solenoid Valve Series VQ100 1

C (+) () Lead wire color Lead wire color B () Reset 100 VAC, 200 VAC 100 VAC, 200 VAC AC Yellow Yellow Set Blue Red A A Single solenoid (AC) Latching solenoid (AC) A Set A Blue Red COM Blue Red SOL. C C SOL. SOL. C COM SOL. Gray Gray Reset Single B C B Reset Latching Note 1) Single: No polarity ON: Orange light lights. Note 2) Setting side energizing: Orange light lights.

3 Port Solenoid Valve Series VQ100

C (+) () Lead wire color Lead wire color B () Reset 100 VAC, 200 VAC 100 VAC, 200 VAC AC Yellow Yellow Set Blue Red A A Single solenoid (AC) Latching solenoid (AC) A Set A Blue Red COM Blue Red SOL. C C SOL. SOL. C COM SOL. Gray Gray Reset Single B C B Reset Latching Note 1) Single: No polarity ON: Orange light lights. Note 2) Setting side energizing: Orange light lights.

3 Port Solenoid Valve Series VQ100 1

C (+) () Lead wire color Lead wire color B () Reset 100 VAC, 200 VAC 100 VAC, 200 VAC AC Yellow Yellow Set Blue Red A A Single solenoid (AC) Latching solenoid (AC) A Set A Blue Red COM Blue Red SOL. C C SOL. SOL. C COM SOL. Gray Gray Reset Single B C B Reset Latching Note 1) Single: No polarity ON: Orange light lights. Note 2) Setting side energizing: Orange light lights.

Clean Gas Filter

0.1 1 10 Flow rate L/min (ANR) SFB20-02 0.1 Inlet pressure Max. flow rate line 0.3 MPa Pressure drop MPa 0.1 MPa 0.01 0.7 MPa 0.5 MPa 0.001 0.0001 1000 10 100 Flow rate L/min (ANR) 304 SFB100/200 Series Clean Gas Filter/Clean Gas Strainer: Cartridge Type/Straight Type Dimensions SFB100/200: Rc 1/4 SFB101/201: NPT 1/4 SFB104: M5 HAA HAW Bracket 2 x M5, Rc 1/4, NPT 1/4 AT IDF IDU 24 40 50

HRX-OM-R039

Operation display panel For power supply of 100 V specifications, connect the plug to the outlet of 100 VAC (50/60 Hz). For power supply of 200 V specifications, connect the plug to the breaker (recommended size: 15 A) of the user's equipment. Power supply cable Model label Shows the part number of the product. For details, refer to section 1.4.1 Product Label.

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

HRX-OM-W002

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]