ZP 0 to 60 0 to 250 0 to 100 10 to 200 X X X X X X X X X X X X X X X X X X X X X X X The above table covers only general characteristics of subject rubber materials.
(ON ON ON (LED)No.10() Err9 (P3)(P2) () Err9 Err9 ON ON ON ()5mm Err5 5mm 1 Err10: Err11 CPU Err12 ON 13-2 () 200 200 ( 6) 57 *200.0 PRG STEP P6 200.0 200 200 300mm/sec 50% 35% 58 141 No. No.
temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.
300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !
39.5 M3 x 0.5 M4 x 0.7 10 to 40 31.5 6 6 ( 5.8) 29 5.5 38 4 5 5 8 20 3.5 6.5 14.5 7 16 44 M4 x 0.7 M6 x 1.0 10 to 60 34 8 8 ( 7.8) 36 5.5 47 7 5 7 10 25.5 5.4 9 18 10 20 47.5 M5 x 0.8 M6 x 1.0 10 to 60 37.5 10 10 ( 9.8) 40 5.5 52 7 6 8 10 28 5.4 9 19.5 10 25 10 to 50, 75, 100 54 M6 x 1.0 M6 x 1.0 42 12 12 (11.8) 45 8.5 Rc 1/8 NPT 1/8 G 1/8 49.5 60 7 7 4.5 10 12 34 5.5 9 23 10 30 10
Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.
(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC50B-(F,N)06(F,N)10 (C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC60(A)-(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC60B-(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1.
Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.
10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.
9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65
mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0
5 0.5 0 0 0.1 0.2 0.4 0.5 0.3 0.2 0.4 0.5 0.3 Operating time (s/90) Operating time (s/90) MHY2-20D MHW2-32D 6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 40 4 30 3 20 2 10 1 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D 20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50
5 0.5 0 0 0.1 0.2 0.4 0.5 0.3 0.2 0.4 0.5 0.3 Operating time (s/90) Operating time (s/90) MHY2-20D MHW2-32D 6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 40 4 30 3 20 2 10 1 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D 20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50
20 10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using
x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s)
3 7.9 3.0 0.61 4.5 15 3/8 (10A) 6 1.10 26 8 1.60 38 1.0 10 2.20 53 1/2 (15A) 10 2.20 53 Note) Weight of grommet type.
6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !
Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.
to 60 (No freezing) 10 to 100 Dusttight, Low jetproof (equivalent to IP65) Enclosure VDW Environment Location without corrosive or explosive gases VQ Valve leakage (cm3/min) 0 (with oil pressure) Mounting orientation Unrestricted VX2 (3) 30/150 or less Vibration/Impact resistance (m/s2) 24, 12 VDC, 100, 110, 200, 220, 230 VAC (50/60 Hz) 100, 200, 220, 230 VAC (50/60 Hz) VX Rated voltage
Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V Selects the analogue input range. (AXB cannot select the following ranges. -10..10 V/ -5..5 V/ -20..20 mA) -5..5 V -10..10 V -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.