PFxx-OMO0007CN

(OUT2) [2nL] (20 ) [2PL] 3 (OUT2) [2nH] (20 ) [2PH] () -28No.PF-OMO0007CN [F_3] [-] 9L,3 3 9 -29No.PF-OMO0007CN <> 3[F_][d_][unL] [unL] [Loc] 3 <> 3[Loc] [unL] 3 -30No.PF-OMO0007CN -31No.PF-OMO0007CN () IN IN -32No.PF-OMO0007CN IN (30 ) -33No.PF-OMO0007CN (OUT1) 80 mA OUT1 OFF (OUT2) 80 mA OUT2 2 2 () -34No.PF-OMO0007CN PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 N2 050 () 110

DOC1003077

OFF. 89 Flow rate is zero. 130 150 (10) 25 0 : Variable fan speed mode Fan speed controlled according to controller output volume 1 : Low noise mode Constant fan speed regardless of controller output volume Fan Control Check the set value for low temp. cutoff temperature and confirm the temperature really reaches this value.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Blank flange : Test piece posture: lateral 110 Pa Vacuum pump Durability test conditions Valve side Chamber Bellows side Vacuum pump Recommended direction of pumping 9 XL-OMO0001-A 6 Parts Replacement Procedure 6-1. Precautions Be sure to follow [1. Precautions 1] when disassembling the product for maintenance.

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

High Vacuum L Type Valve

Vacuum pump 110 Pa Endurance test condition Valve side The pumping direction is not limited, but if the pumping creates a flow stream, the durability of the product could be impaired. Therefore, the pumping direction shown on the right figure (bellows side pumping) is recommended.

Compact Rotary Actuator

Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.

MHS

N 16 28 47 82 130 204 359 525 780 1320 () mm 4 4 6 8 8 12 16 20 24 32 g 60 100 140 237 351 541 992 1,850 3,340 6,460 1) 1625 =20mm 3263 =30mm 80125 =50mm 0.5MPa MHS4 MHS4 -16D MHS4 -20D MHS4 -25D MHS4 -32D MHS4 -40D MHS4 -50D MHS4 -63D mm 16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110

Membrane Air Dryer

IDG75 IDG100 IDG60H IDG75H IDG100H Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 725 900 1190 665 830 1110 Outlet air flow rate L/min(ANR) 600 750 1000 600 750 1000 Purge air flow rate L/min(ANR) 125 150

Coolant valve

Rc1/4 12 to 14 Rc3/8 22 to 24 Warning Rc1/2 28 to 30 Rc3/4 45 to 50 Rc1 65 to 70 Rc1 1/4 80 to 90 Rc1 1/2 100 to 110 Rc2 140 to 150 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. 5 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 3 Be sure to read this before handling.

Fieldbus system (SI unit – PROFIBUS DP compatible)

Please refer to an individual catalog for the size when other manifolds are connected. n_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 n_m L 9 10 11 12 13 14 15 16 L1 139.5 150 160.5 171 181.5 192 202.5 213 L2 278.8 299.8 Wiring (for power supply, communication and input) and piping are done on only one side.

Series MLGP

. + = 4 . 1 = a V V 2 V m M E k 2 Ek: Kinetic energy (J) M : Mass of object being transported (kg) m : Mass of moving parts of cylinder (kg) V: Maximum speed (m/s) Va: Average speed (m/s) Mass of moving parts of cylinder (kg) Bore size Standard stroke (mm) (mm) model 20 25 30 40 50 75 100 125 150 175 200 250 300 350 MLGPM20 0.40 0.42 0.45 0.47 0.59 0.65 0.71 0.77 0.83 0.89 1.08 1.20 1.31

Flow Control Equipment

Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

PA3145/3165/3185

Pilot pressure range Ambient and fluid temperature (C) 0 to 60 (No freezing) Lubrication Required (Turbine oil, Class 1 lSO VG32 equivalent) VPA3165-06 VPA3145-03 Free Mounting orientation Impact resistance/Vibration resistance (m/s2) Note) 150/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil rated voltage Terminal type VT Coil insulation type Class B or equivalent (130C) (3) Shock/Vibration resistance (m/s2) 150/50 (4) VP Note 1) If it is low temperature, dry air should be used.

VT325

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

02 SYA5000 3 position closed center 00 3 1 4 02 With sub-plate 3 8 With sub-plate 3 position exhaust center 03 4 3 position pressure center 5 5-2-3 2 Series SYA3000/5000/7000 Specifications Fluid Operating pressure range MPa Air 0.15 to 0.7 0.1 to 0.7 0.2 to 0.7 (0.7 x P + 0.1) to 0.7P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 Max. 60 Non-locking push type Not required Unrestricted 150

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Impact/Vibration resistance (m/s2) 150/50 Note) Manifold Possible Use dry air (Dew point: 20C or less). If using a lubricant, be sure to use a lubricant for low temperatures.

VNC/VNH Series

Rc1 1/4 80 to 90 Rc1 1/2 100 to 110 Warning Rc2 140 to 150 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. Operating Environment 1. Do not use in an atmosphere having corrosive gases, chemicals, sea water, water, water steam, or where there is direct contact with any of these . 2.