MHZ

Internal Grip MHZ2, 11-MHZ2 MHZ2-6 MHZ2-25/11-MHZ2-25 40 100 Pressure 0.2 MPa Pressure 0.2 MPa 30 Overhang H (mm) Overhang H (mm) 80 H H 0.5 MPa 0.5 MPa Pressure 0.2 MPa Pressure 0.2 MPa 0.6 MPa 0.6 MPa 60 0.3MPa 0.3MPa 20 0.7 MPa 0.7 MPa 0.7 MPa 0.7 MPa 0.3 MPa 0.3 MPa 0.4 MPa 0.4 MPa Gripping point L 40 0.4 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.6 MPa 10 20 MHZAJ2, MHZJ2 0 20 40 60 80 100

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

G (NN 1) x H Section AA Section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MGQ MGG MGC MGF MGZ CY MY 3.8-3 End Lock Cylinder Series CBM2 20, 25, 32, 40 How to Order L 40 150 H N CBM2 Standard L 40 150 C73 H N CDBM2 With auto switch Air cylinder with auto switch Number of auto switch Mounting 2 1 n S n Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion B L F G C D U T Bore size 20 25 32 40 20mm 25mm 32mm 40mm Auto

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

36 (mm) Without rod boot With rod boot Bore size (mm) P l R S T V W X Y H ZZ e f h ZZ 40 1/4 37 106 11 7.5 8 27 8 66 207 55 25 92 233 50 3/8 43 112 11 10 9 30 10 73 225 60 28 99 251 1/4 stroke 63 3/8 47 116 11 12 10 37 10 80 243 65 30 106 269 80 1/2 57 127 11 16 13 40 13 90 270 80 32 116 296 100 1/2 66 137 12 20 16 47 13 100 299 100 35 123 322 1/5 stroke 125 1/2 77 137 12 20 16 55 15 100

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

H unit Use this unit when the cylinder is operated in a load and speed range above the L unit limit line and below the H unit limit line. 100 3 5 10 20 50 100 1 2 3 4 5 10 20 30 30 100 200 40 50 MY1B m1,m2,m3 max. m1,m2,m3 max.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CY1 MY1 3.4-3 End Lock Cylinder Series CBM2 20, 25, 32, 40 How to Order L 40 150 H N CBM2 Standard L 40 150 C73 H N CDBM2 With auto switch Air cylinder with auto switch Number of auto switch Mounting 2 1 n S n Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion B L F G C D U T Bore size 20 25 32 40 20mm 25mm 32mm 40mm Auto switch Without auto

VZ100/300/500

L plug connector (L) DIN terminal (D) M plug connector (M) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor 4-6-21 22 Series VZ300 Type 40 Manifold: Bottom Ported Rc 1/8 VV3Z3-40Stations 2-M5/01 Grommet (G), (H) (Die-cast hole) (Mounting hole) (Mounting hole) 4-Rc 1/8 (P , R port) G: 300 mm H: 600 mm (Pitch) Manual override

AC Servo Motor Driver (CC-Link Type ）

MR-EKCBL30M-L MR-EKCBL30M-H MR-EKCBL40M-H MR-EKCBL50M-H The other encoder cables are all of 2-wire type. Incorrect setting will result in an encoder alarm 1 (A16) or encoder alarm 2 (A20). The following cables are of 2-wire type.

Environment

LEF How to Order LEJ LEL S2 25A-LEJS 40 500 A H LEM Series compatible with secondary batteries w e r q t y u i o !

Cylinder with Lock Series CLS

D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 105 110 115 15 105 + 40 (n4) 2 110 + 40 (n4) 2 115 + 40 (n4) 2 15 + 40 (n2) 2 n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 10 90 95 100 D-Y69 D-Y7PV D-Y7WV 90 + 30 (n4) 2 95 + 30 (n4) 2 100 + 30 (n4) 2 10 + 30 (n2) 2 n pcs.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30

Vacuum Pad: Ball Joint Type

(mm) Model A B C D F Y H I J K K Q: 4 Q: 6 ZPT10F10-0-A10 12 12.5 27 10 10 38.5 74.5 88.5 89.5 1.5 ZPT13F10-0-A10 39 23 Hexagon width across flats 13 15 13 1/8 (Rc, NPT, NPTF) 10.5 13 27.5 75 89 90 2 ZPT16F10-0-A10 18 16 M14 x 1 Additional Dimensions by Stroke (mm) Hexagon width across flats 19 H I J K Stroke 20 +38 +10 5 5 D C +28 30 +48 +20 I 40 +84 +30 +54 50 +94 +40 J H F Width across

Compressed Air Cleaning Filter Series

O F 34 10 one-touch fitting Combination of D: With auto drain (N.O.) and H: For medium air pressure D I L T (Accessory) Bracket N K J M U V E B IN OUT 20 1/4 female threaded C Option H A J: Drain guide 1/4 female threaded Drain G M5 Maintenance space 20 1/4 female threaded (mm) A Model Port size Bracket related dimensions B C D E F G H 173 I 56 J 20 K 5 T 6 U 6 L 12 M 6 V 10 N 35 O 54 P 70

CJ5-S

14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS Data 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23

CJ5-S

14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS Data 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23

Modular Type Regulators Series AR

Metal Bowl Metal Bowl With Sight Glass NPT Threads Port Size Symbol 02 03 04 Accessories Symbol Nil B* C D H* Applicable Body Size 20 30 40 Port Size 1/4 3/8 1/2 Applicable Body Size All All 30, 40 30, 40 All Description None Mounting Bracket Float Auto Drain (N.C.)

5 Port Solenoid Valve SY Series

: SY7220(-F2) G H C8, N9 C10, N11 SY7220-02(-F2) G H 20 (A, B port) 1/4 (For mounting bracket) 2-M4 x 0.7 depth 6.5 20 7 31.5 [38.5] 40 24.5 One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" G: Approx. 300 H: Approx. 600 77 121.4 [125.8] (Lead wire length) 13.6 B A Manual override (For manifold mounting) 24.2 19 42 (For mounting) 23.2 (52) (66) (Light/surge voltage

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63