SMC Corporation of America
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pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN

positive pressure ZSE50 02 M F 22 L For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward

B e r u t y q w Immersion type q Piping 10 1 (25A) w Tank size e IN/OUT port size r Thread type H Immersion type 6 6 inch Nil None R Rc N NPT F G y Fluid and ambient temperatures t Outlet pipe dimensions and thread type ( p. 9 ) Symbol 1 2 3 4 Pipe projection Short Long Short Long Thread type None None G1" G1" B 40 to 60C u Pilot port size Nil 1/4 1 1/8 Pipe thread (Pipe for the OUT port

Dust removal Dust collection Blow nozzle with improved dust removal efficiency IZH A4 size [ZVB20] 210 x 297 mm (Dimensions) 202 x 212 mm (Static neutralization space) A3 size [ZVB40] 400 x 384 mm (Dimensions) 392 x 298 mm (Static neutralization space) Lamp cover Smartphone c e s e i o p f k v r o a w r i Cosmetic case o Lens s u t s r o s p i p z e u s S .

Bore size Stroke range head cap screw for Model Bracket CW CT CL CX CD M CZ R mounting pivot bracket (Accessory) Without auto switch With auto switch 15.5 20 25.5 28 15.5 20 25.5 28 4.5 4.5 6.6 6.6 4.5 4.5 6.6 6.6 M4 x 10 L M4 x 10 L M6 x 12 L M4 x 10 L M4 x 10 L M4 x 10 L M6 x 12 L M 6 x 12 L 5 6.5 8 10 5 6.5 8 10 5 to 30 5 to 30 5 to 50 5 to 50 5 to 30 5 to 30 5 to 50 5 to 50 14 15 18 20

Terminal PSE200A/PSE201A PSE202A/PSE203A q DC (+) L+ w DC () L e CH1_OUT1 C/Q (CH1_OUT1) r CH1_OUT2 t CH2_OUT1 y CH3_OUT1 u CH4_OUT1 i Auto-shift input N.C. 2000 Power supply with M12 connector/Output cable (Made to Order) * For use when using an M12 connector for IO-Link communication Connector pin assignment Pin no. 7 N.C. 8 N.C. 1 Brown: L+ Sheath O.D. 3.5 Connector size M12 2 White: CH1

200 LX5 + 200 LX3 + 200 LX5 + 200 LX3 + 200 1 2 3 1 2 3 1 2 1 2 1 2 3 to 90 3 to 90 3 to 63 3 to 90 3 to 66 3 to 44 3 to 90 3 to 40 3 to 45 3 to 35 3 to 35 3 to 30 4 2.5 6 4 8 5 10 6.5 12 8 B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) L* is calculated by the number of coils (N) x O.D. 10Clean Series (Example) 10-TCU0425B-1 TUB-11 Polyurethane

min (ANR) Effective area (mm2) Flow rate l/min (ANR) Flow rate l/min (ANR) Number of needle rotations Number of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Effective area (mm2) Flow rate l/min (ANR) Effective area (mm2) Flow rate l/min (ANR) Effective area (mm2) Flow rate l/min (ANR) AS Number of needle rotations Number

Only for ZSE40(F)/ISE40--30/70(L)-M, displays the input mode and the compensation value alternately. If auto shift input is not complete, zero is displayed. 16-2-20 7 Series ZSE40/ISE40 High Precision, Digital Pressure Switch Unit Set Output Type It's only subject to ZSE40(F)/ISE40--(L).

Care should be taken about the voltage drop when the rated voltage is 6 VDC or less or when the response speed is important. (3) When using a C-R element (surge voltage suppressor) for protection of the switching element, please keep in mind that leakage voltage will increase due to leakage current flowing through the C-R element.

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Auto switch CUJ cylinder Cylinder B Cylinder A Auto switch Magnetic substance Non-magnetic spacer of 2.5 mm or more Without Shielding Plate d Bore (mm) 10 L 6 8 L d 19 6 19 6 19.5 6 The space can be reduced by attaching shielding plates (steel plates 0.2 to 0.3 mm thick) to the sides of the cylinders facing each other.

OK OK NG OK OK 17 4-2 W (N) WeN) () V m/s) () Va (m/s) L (m) M (Nm) E (J) g (m/s) (9.8m/ ) (N) W1 (Nm) V=1.4Va MFL F (V=0.) 1 L <> W1.VaW10 M2F2L2 F2 M= WeL =5VaWL 3 2 L W2 M3F3L3 F3 an= F Fmax 3 L F W4 Fmax : () W Ek= W V 2g (V=0.

The clip is commonly used to secure the manifold block and fittings. q 1) Vacuum release application Use 3 (R) port for vacuum pressure and 1 (P) port for vacuum release pressure. The pressure differential between 3 (R) and 1 (P) is the maximum operating pressure differential for each type.

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

Air dryer model IDF100FS-30-R IDF125FS-30-R IDF150FS-30-R Breaker capacity 20 A 30 A Sensitivity current: 30 mA Corrosion is not covered under warranty. Option symbol V With a timer controlled solenoid valve type auto drain Option symbol Float type heavy duty auto drain is changed to the solenoid valve type auto drain.

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !