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Applicable air dryer Port size Rc A B C D E F G H I J Weight [kg] IDF-S0183 IDF6E 1/2 725 109 240 15 270 410 71 275 85 616 5.6 IDF-S0202 IDF8E 3/4 749 111 240 15 270 410 75 300 90 646 6.1 IDF-S0184 IDF11E 3/4 815 138 240 15 270 405 89 300 90 653 6.3 IDF-S0185 IDF15E1 1 897 135 270 15 300 405 105 380 106 775 10.2 43 IDF/IDU Series Specific Product Precautions 1 Be sure to read this before

bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations 1 Left Right OUT 1 OUT 5 Stations L1 L2 L3 1 106

Screw mounting DIN rail mounting 139.2 5.5 mounting hole 117.1 125 105.2 116.2 106 2 104.3 11.9 2.9 2.5 144.2 2.9 2.9 81 5.5 mounting hole 66.3 136.2 144.2 125 DIN rail mounting bracket 10 JXC73/83/93 Series Controller Details Parallel I/O JXC73/83 No.

KV2 Torque Specifications Thread NPT Standard Thread Torque (in-lbs) 1/8 62 to 80 1/4 106 to 124 3/8 195 to 212 1/2 248 to 266 3/4 248 to 266 Stud end into metallic ports Metallic: Aluminum, zinc, stainless steel, and brass 22 Series KV2 Important Information DOs DONTs 1 1 Tighten fitting by hand. Apply final torque with wrench at the hex.

900 14 6 900 880 950, 1000 16 7 1050 1030 23 314.9 359.9 6 130 Easy to Operate Integrated Controller / Slider Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor Model Selection EQFS H Series EQY H Series Auto Switch Electric Specifications Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS40H (170) 6 H9 (+0.030 0 ) depth 7 106

106 64 46 16 16 LQ3H7B-M 1" 95.5 95.5 22 22 LQ3H7C-M 1 1/4" 93.3 93.3 28.5 28.5 LQ3H8C-M 1 1/2" 1 1/2" 101.3 39 60 114 77 55 36 36 24.5 22.5 24 64 62 29 22 1/2" 915 A LQ3 Series Dimensions Female connector: LQ3H-F Metric Size Port size Rc (NPT) Model Applicable tubing O.D.

Page 106 uParticle Filter Set . Page 117 Recommended External Piping Flow . Page 108 iWired remote controller . Page 117-1 Cable Specifications . Page 108 Operation Display Panel . Page 109 Cooling Capacity Calculation List of Function . Page 109 Required Cooling Capacity Calculation . Page 118 Alarm . Page 109 Precautions on Cooling Capacity Calculation ...

Note 3) Reference dimensions AS431F-04-11 104 16.2 21 49.4 25.8 32.6 57.1 18.5 3/8" 24 28.6 49.6 42.1 56.7 49.2 1/2 (23.8) AS431F-04-13 106 19.4 22 52 26.8 36.3 60.8 21.7 1/2" 489 Series AS Made to Order Specifications: Please contact SMC for detailed dimensions, specifications, and delivery.

54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 59 18.5 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5 3/8" 17.9 23 104 16.2 65 21 16.2 28.6 49.2 56.7 24 49.6 R 1/2 42.1 AS431FG-04-12 AS431FG-N04-11 36.3 60.8 54.4 22 32.6 52 49.4 26.8 12 21.7 3/8" 17.9 25.8 105 19.4 104 21 16.2 NPT 1/2 56.7 49.2 49.6 42.1 29 23.8 AS431FG-N04-13 57.1 36.3 52 1/2" 21.7 26.8 106

0.5 3EB 1P 5EA 49.8 L plug connector with cover (LL) 52-SY9120-LL02 03 Insulation: Red (+) Insulation: Black () 4.1 16.7 14 0.3 mm2 L 148.3 (Lead wire length) Cable type (TT) 52-SY9120-TT02 03 Lead wire marking No.1 (+), No.2 () 0.75 mm2 L 165.1 (Lead wire length) Max.10 11 ATEX Compliant Body Ported Type Series 52-SY9000 Dimensions 2-position double L plug connector (L) 52-SY9220-L02 03 106

2 x P (Port size) AF-A 90 A 106 AF-A 66 70 Bracket (Option) 13 3.2 AR-A 11 AL-A B C V Q OUT IN AW-A AC OUT AF AF AR With float switch Specifications AL AL Contact capacity: 15 VA (AC) 15 W (DC) Contact point: 1a, 1b AW AG E AV AF B Clearance for maintenance 210 Clearance for maintenance G 1/2 Float switch Part number: IS400-1 to 2 210 Bracket mount With float switch Model P A B C Q V B AL30

1 Stop-SW actived Reset Stop-SW OFF ON OFF ON PLC OFF OFF PLC ON CN1 EMGOFF CN1 EMGON 106 - 3 ON JOG 31 TB Ver.511 LEC-T1-S () Ver1.** Ver1.** Ver2.**2 Ver2.**1 LEC-T1-S ON/OFF ON LEC-T1ON OFF ON OFF OFF AX IS. Caution! 1 Enable SW is OFF Motor Blocked Turn ON it!

. / . 96 13.1 . 96 13.2 . 97 13.3 . 97 13.4 . 98 13.5 . 99 13.6 . 100 14. . 100 14.1 / . 100 14.2 . 101 14.3 . 102 3 No.SFOD-OMT0009CN-B 14.4 . 102 14.5 . 102 14.6 . 103 14.7 . 103 15. . 104 15.1 . 104 15.2 . 106 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 4 No.SFOD-OMT0009CN-B JXC73/83 Series/

.: GR-S-010 (10 g), GR-S-020 (20 g) For instructions on how to replace replacement parts/seals, refer to the operation manual. 106 Mechanically Jointed Rodless Cylinder/Basic Type Series MY3B 16, 25, 40, 63 Replacement Procedure is P.312 Construction Actuators Modular F.R.L.

11.5 17 M22 x 1.5 M26 x 1.5 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106

Theoretical Output OUT IN [N] Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 12 6 OUT 113 23 34 45 57 68 79 90 102 113 IN 85 17 25 34 42 51 59 68 76 85 16 8 OUT 201 40 60 80 101 121 141 161 181 201 IN 151 30 45 60 75 90 106 121 136 151 20 10 OUT 314 63 94 126 157 188 220 251 283 314 IN 236 47 71 94 118 141 165

Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

C0.2 (2) B 0.2 A 0.2 Hexagon socket head cap screw D Bore size (mm) A (mm) B (mm) C (mm) MLGPM MLGPL 54 12 14 72 20 M5 x 0.8 24 64 15 18 82 25 M6 x 1.0 30 78 18 22 98 32 M8 x 1.25 34 86 18 22 106 40 M8 x 1.25 40 110 22 27 130 50 M10 x 1.5 46 124 22 27 142 63 M10 x 1.5 58 156 28 33 180 80 M12 x 1.75 54 188 33 39 210 100 M14 x 2.0 62 9-11-5 5 Series MLGP Specific Product Precautions 3 Be sure

150 175 200 225 250 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 225 250 [mm] Bore size h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 73 86 98 111 136 161 186 211 236 40 81 94 106