Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing o u Resin materials eliminated Laser marking is employed for the model designation. d t g e a c 2 s u s d i e Reduction of outgassing due to surface treatment n o u d t R g g e a c 1 s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

D-DN

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

EXxx-OMV0017-D

Power off is displayed when power is not supplied. 3 Power status Indicates the connection status of the PCNFC reader / writer. 4 R/W connection status R/W undetected: NFC reader / writer is not identified or USB is not connected.

q"s

Relief flotv characledstics suppry pressurc: i .0 r pa Pressure characteiistics sei plessu:0.4 Mpa Flow characteristics supp y pGssure: 1.0 M Pa 1 0.9 0.8 d : 0 . 7 0 6 0 .s 'rt E o.+ 0 0.1 0.0 0.0" " " o 50 100 150 200 250 300 o 1 0.6 0.8 1 1.2 Supply pfessure (lvlPa) 50 100 150 200 250 Frow rale (4min (ANB)) Series lTV205n Hysteresis Linearity Repeatability 0.9 0.8 o.7 ii 0.6 3 o.s : 0.4

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 29.4 35.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L2 L3 D1 L1 H T Max.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Table of Contents

D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style . D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-Z73/D-Z76/D-Z80 Direct Mounting Style. 2-color Indication Type . D-A79W Rail Mounting Style . Solid State Switches . General Purpose Type. D-F79/D-F7P/D-J79 Rail Mounting Style. D-F7NV/D-F7PV/D-F7BV Rail Mounting Style .

CYP

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

Digital Pressure Switch ( compatible)

0x0013 (19) 0 R Product ID Example: ISE20C-L 0x0014 (20) 0 R Product text Pressure sensor Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23) 0 R Software version FW-Vx.y x: Large revision number y: Small revision number 0x0017 (36

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

C92

Support bracket except centre trunnion Centre trunnion No. of auto switches Style Auto switch model 32 40 50 63 80 100 32 40 50 63 80 100 2 (On different faces or same face) Reed switch Solid state switch D-A5, D-A6 115 110 105 80 60 15 20 1 2 (On different faces or same face) 20 D-A59W 120 115 110 85 60 25 70 1 15 2 (On different faces or same face) 15 120 115 110 85 60 25 70 D-F5/J5 1 10

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

SMC Pneumatic Clean Series

M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Model (2) Weight (g) Operating pressure range (MPa) Function Vacuum specifications (MPa) Port size Effective area (mm2) Valve model Type 2(A) port 1(P), 3(R) port Grommet L plug connector, M plug connector 3(R) port 1(P) port SY11 3 4 Standard 0 to 0.7 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.14 100 kPA to 0.6 N.C.

3 Port Solenoid Valve Rubber Seal Series SY100

Model (2) Weight (g) Operating pressure range (MPa) Function Vacuum specifications (MPa) Port size Effective area (mm2) Valve model Type 1(P), 3(R) port 2(A) port Grommet L plug connector, M plug connector 1(P) port 3(R) port SY11 3 4 Standard 0 to 0.7 0.14 100 kPA to 0.6 100 kPA to 0 M3 x 0.5 M3 x 0.5 N.C.